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Please use this identifier to cite or link to this item: http://hdl.handle.net/11094/6123

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Title: High Rate Zinc Oxide Film Deposition by Atmospheric TPCVD Using Ar/Air Plasma Jets
Creator: ANDO, Yasutaka
TOBE, Shogo
TAHARA, Hiorokazu
Publisher: 大阪大学接合科学研究所
Publisher.Alternative: Joining and Welding Research Institute, Osaka University
Publisher.Transcription: オオサカ ダイガク セツゴウ カガク ケンキュウジョ
Date.Created: 2008-07
NII Type: Departmental Bulletin Paper
Local Type: 紀要論文 Departmental Bulletin Paper
Dcmi Type: text
URI: http://hdl.handle.net/11094/6123
ISSN: 03874508
NCID: AA00867058
Journal Title: Transactions of JWRI
Vol.: 37
Iss.: 1
Start Page: 33
End Page: 37
Date of Issued: 2008-07
Language: eng
Textversion: publisher
Appears in Collections:紀要論文 Departmental Bulletin Paper


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