Stroboscopic sampling moiré microscope (SSMM) for investigating full field in-plane vibration of MEMS mechanical transducers

Yadi, Mona; Uenohara, Tsutomu; Mizutani, Yasuhiro; Morimoto, Yoshiharu; Takaya, Yasuhiro

doi:https://doi.org/10.1016/j.precisioneng.2024.11.004

Stroboscopic sampling moiré microscope (SSMM) for investigating full field in-plane vibration of MEMS mechanical transducers

Yadi, Mona; Uenohara, Tsutomu; Mizutani, Yasuhiro et al.

Precision Engineering, 2025, 92, 21-29

アクセス数:440件（2025-07-27 07:40 集計）

固定URL: https://hdl.handle.net/11094/100207

閲覧可能ファイル

ファイル	フォーマット	利用条件	サイズ	閲覧回数	利用開始日	説明	information
PrecisEng_92_21	pdf	なし	2.45 MB	35	2025.02.06

Creative Commons : 表示 - 非営利 - 改変禁止

論文情報

ファイル出力 EndNote Basic出力 Mendeley出力

タイトル	Stroboscopic sampling moiré microscope (SSMM) for investigating full field in-plane vibration of MEMS mechanical transducers
著者	著者名 Yadi, Mona
	NRID 1000010868920 1000010868920 researchmap permalink uenohara_tsutomu uenohara_tsutomu Scopus Author ID 57194101957 57194101957 著者名 Uenohara, Tsutomu
	NRID 1000040374152 1000040374152 ORCID 0000-0003-4646-9640 0000-0003-4646-9640 researchmap permalink mztnyshr mztnyshr Scopus Author ID 8570752500 8570752500 著者名 Mizutani, Yasuhiro
	NRID 1000020029573 1000020029573 著者名 Morimoto, Yoshiharu
	NRID 1000070243178 1000070243178 researchmap permalink TAKAYA-SI_C299792458 TAKAYA-SI_C299792458 Scopus Author ID 7005796519 7005796519 著者名 Takaya, Yasuhiro
キーワード等	Atomic force microscopy (AFM)
	Dynamic properties
	In-plane vibration measurement
	MEMS mechanical transducer
	Quartz tuning fork (QTF)
	Ultrafast stroboscopic system
内容	Yadi M., Uenohara T., Mizutani Y., et al. Stroboscopic sampling moiré microscope (SSMM) for investigating full field in-plane vibration of MEMS mechanical transducers. Precision Engineering 92, 21 (2025); https://doi.org/10.1016/j.precisioneng.2024.11.004.
抄録	Precise analysis of the full-field in-plane vibration of microelectromechanical system (MEMS) transducers is crucial for assessing their device functionality and performance. As an example, in the context of frequency/amplitude modulation of Quartz Tuning Fork (QTF)-based atomic force microscopy (AFM) systems, understanding QTF's in-plane vibration can significantly enhance accurate evaluation of tip-sample forces. Current methods, such as analytical and numerical approaches, have limitations when it comes to providing accurate measurements. To address these limitations, we proposed an experimental approach that combines stroboscopic and sampling moiré (SM) techniques. This method focuses on investigating the in-plane vibration of a QTF and utilizes the obtained results to measure the sensor's dynamic properties such as vibration mode shape, resonance frequency (f0), and quality factor (Q). Nanometer-scale light pulses, generated using a custom-designed stroboscope, are synchronized with the QTF's excitation voltage to freeze the vibration effectively, enabling imaging using a standard CCD camera. Subsequently, SM analysis is employed to extract the surface vibration profile, facilitating the measurement of vibration mode shape, f0, and Q. This technique shows promise for analyzing the dynamic behavior of various micro-devices compatible with the sample preparation process.
出版者	Elsevier Inc.
収録物名	Precision Engineering
巻(号)	92
ページ	21-29
刊行年月	2025-03-01
言語	英語
ハンドルURL	https://hdl.handle.net/11094/100207
PISSN	01416359
関連情報 (isIdenticalTo)	DOI (出版社版) https://doi.org/10.1016/j.precisioneng.2024.11.004
アクセス権	open access
権利情報	This article is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.
出版タイプ	Version of Record
カテゴリ	学術雑誌論文 Journal Article

資源タイプ	学術雑誌論文
ローカル資源タイプ	学術雑誌論文
DCTERMS.bibliographicCitation	Precision Engineering. 2025, 92, p. 21-29
DC.title	Stroboscopic sampling moiré microscope (SSMM) for investigating full field in-plane vibration of MEMS mechanical transducers
DC.creator	Yadi, Mona
	Uenohara, Tsutomu
	Mizutani, Yasuhiro
	Morimoto, Yoshiharu
	Takaya, Yasuhiro
DC.publisher	Elsevier Inc.
DC.language' scheme='DCTERMS.RFC1766	英語
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2025-03-01
DC.identifier	https://doi.org/10.1016/j.precisioneng.2024.11.004
DC.subject	Atomic force microscopy (AFM)
	Dynamic properties
	In-plane vibration measurement
	MEMS mechanical transducer
	Quartz tuning fork (QTF)
	Ultrafast stroboscopic system
DC.description	Yadi M., Uenohara T., Mizutani Y., et al. Stroboscopic sampling moiré microscope (SSMM) for investigating full field in-plane vibration of MEMS mechanical transducers. Precision Engineering 92, 21 (2025); https://doi.org/10.1016/j.precisioneng.2024.11.004.
DCTERMS.abstract	Precise analysis of the full-field in-plane vibration of microelectromechanical system (MEMS) transducers is crucial for assessing their device functionality and performance. As an example, in the context of frequency/amplitude modulation of Quartz Tuning Fork (QTF)-based atomic force microscopy (AFM) systems, understanding QTF's in-plane vibration can significantly enhance accurate evaluation of tip-sample forces. Current methods, such as analytical and numerical approaches, have limitations when it comes to providing accurate measurements. To address these limitations, we proposed an experimental approach that combines stroboscopic and sampling moiré (SM) techniques. This method focuses on investigating the in-plane vibration of a QTF and utilizes the obtained results to measure the sensor's dynamic properties such as vibration mode shape, resonance frequency (f0), and quality factor (Q). Nanometer-scale light pulses, generated using a custom-designed stroboscope, are synchronized with the QTF's excitation voltage to freeze the vibration effectively, enabling imaging using a standard CCD camera. Subsequently, SM analysis is employed to extract the surface vibration profile, facilitating the measurement of vibration mode shape, f0, and Q. This technique shows promise for analyzing the dynamic behavior of various micro-devices compatible with the sample preparation process.
DC.rights	This article is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.
DC.format	100207
citation_title	Stroboscopic sampling moiré microscope (SSMM) for investigating full field in-plane vibration of MEMS mechanical transducers
citation_author	Yadi, Mona
	Uenohara, Tsutomu
	Mizutani, Yasuhiro
	Morimoto, Yoshiharu
	Takaya, Yasuhiro
citation_publisher	Elsevier Inc.
citation_language	英語
citation_date	2025-03-01
citation_journal_title	Precision Engineering
citation_volume	92
citation_firstpage	21
citation_lastpage	29
citation_doi	https://doi.org/10.1016/j.precisioneng.2024.11.004
citation_public_url	https://hdl.handle.net/11094/100207

Stroboscopic sampling moiré microscope (SSMM) for investigating full field in-plane vibration of MEMS mechanical transducers

閲覧可能ファイル

論文情報

論文詳細を表示