Evaluation of Plasma Ion Beam Sputtered TiN/TiAlN Multilayers on Steel for Bio Implant Applications

Balasubramanian, Subramanian; Guruswamy, Brindha; Takahashi, Makoto; Nishikawa, Hiroshi; Kobayashi, Akira

doi:https://doi.org/10.18910/4553

Evaluation of Plasma Ion Beam Sputtered TiN/TiAlN Multilayers on Steel for Bio Implant Applications

Balasubramanian, Subramanian; Guruswamy, Brindha; Takahashi, Makoto et al.

Transactions of JWRI, 2011, 40(2), 55-58

アクセス数:385件（2025-05-11 22:43 集計）

固定URL: https://doi.org/10.18910/4553

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タイトル	Evaluation of Plasma Ion Beam Sputtered TiN/TiAlN Multilayers on Steel for Bio Implant Applications
著者	著者名 Balasubramanian, Subramanian
	著者名 Guruswamy, Brindha
	NRID 1000010294133 1000010294133 researchmap permalink AB_MTakahashi AB_MTakahashi Scopus Author ID 55701142600 55701142600 著者名 Takahashi, Makoto ; タカハシ, マコト
	NRID 1000090346180 1000090346180 ORCID 0000-0002-4363-9520 0000-0002-4363-9520 researchmap permalink read0191232 read0191232 Scopus Author ID 57219209494 57219209494 著者名 Nishikawa, Hiroshi ; ニシカワ, ヒロシ
	NRID 1000070110773 1000070110773 著者名 Kobayashi, Akira ; コバヤシ, アキラ
キーワード等	Surface modification
	Multilayers
	Nanoindentation
	Plasma ion beam sputtering
抄録	Layers of 1.2 μm thick TiN / TiAlN were deposited onto 316L stainless steel substrates by a plasma ion beam sputtering technique. The layers were sputtered in pure Ar and N₂ with the ion beam voltage of 1 keV and ion beam current of 30mA. Polycrystalline nature with FCC structure was identified from XRD analysis. The presence of Ti, Al, C and N elements on the surface of the film was confirmed by the XPS survey spectrum taken on the surface of the coatings. The Ti2p region can be decomposed into several contributions corresponding to the different oxidation states of titanium. The columnar nature of growth was observed from the cross sectional HRTEM analysis. The nano-hardness of the TiN/TiAlNcoatings were found to be 30 GPa. The superior corrosion resistance in simulated body solution environment was observed for the multilayer coated specimen.
出版者	大阪大学接合科学研究所
	オオサカダイガクセツゴウカガクケンキュウジョ
	Joining and Welding Research Institute, Osaka University
収録物名	Transactions of JWRI
巻(号)	40(2)
ページ	55-58
刊行年月	2011-12
言語	英語
ハンドルURL	https://hdl.handle.net/11094/4553
DOI	https://doi.org/10.18910/4553
PISSN	03874508
NCID	AA00867058
アクセス権	open access
出版タイプ	Version of Record
カテゴリ	紀要論文 Departmental Bulletin Paper
カテゴリ	Transactions of JWRI / Vol.40 No.2 (2011-12)

資源タイプ	紀要論文
ローカル資源タイプ	紀要論文
DCMI資源タイプ	text
DCTERMS.bibliographicCitation	Transactions of JWRI. 2011, 40(2), p. 55-58
DC.title	Evaluation of Plasma Ion Beam Sputtered TiN/TiAlN Multilayers on Steel for Bio Implant Applications
DC.creator	Balasubramanian, Subramanian
	Guruswamy, Brindha
	Takahashi, Makoto
	タカハシ, マコト
	Nishikawa, Hiroshi
	ニシカワ, ヒロシ
	Kobayashi, Akira
	コバヤシ, アキラ
DC.publisher	大阪大学接合科学研究所
	オオサカダイガクセツゴウカガクケンキュウジョ
	Joining and Welding Research Institute, Osaka University
DC.language' scheme='DCTERMS.RFC1766	英語
DC.type' scheme='DCTERMS.DCMIType	text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2011-12
DC.subject	Surface modification
	Multilayers
	Nanoindentation
	Plasma ion beam sputtering
DCTERMS.abstract	Layers of 1.2 μm thick TiN / TiAlN were deposited onto 316L stainless steel substrates by a plasma ion beam sputtering technique. The layers were sputtered in pure Ar and N₂ with the ion beam voltage of 1 keV and ion beam current of 30mA. Polycrystalline nature with FCC structure was identified from XRD analysis. The presence of Ti, Al, C and N elements on the surface of the film was confirmed by the XPS survey spectrum taken on the surface of the coatings. The Ti2p region can be decomposed into several contributions corresponding to the different oxidation states of titanium. The columnar nature of growth was observed from the cross sectional HRTEM analysis. The nano-hardness of the TiN/TiAlNcoatings were found to be 30 GPa. The superior corrosion resistance in simulated body solution environment was observed for the multilayer coated specimen.
DC.identifier	10.18910/4553
DC.format	4553
citation_title	Evaluation of Plasma Ion Beam Sputtered TiN/TiAlN Multilayers on Steel for Bio Implant Applications
citation_author	Balasubramanian, Subramanian
	Guruswamy, Brindha
	Takahashi, Makoto
	Nishikawa, Hiroshi
	Kobayashi, Akira
citation_publisher	大阪大学接合科学研究所
citation_language	英語
citation_date	2011-12
citation_journal_title	Transactions of JWRI
citation_volume	40
citation_issue	2
citation_firstpage	55
citation_lastpage	58
citation_public_url	https://hdl.handle.net/11094/4553
citation_doi_detail	10.18910/4553
citation_doi	https://doi.org/10.18910/4553

Evaluation of Plasma Ion Beam Sputtered TiN/TiAlN Multilayers on Steel for Bio Implant Applications

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