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jwri40_02_055
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論文情報
タイトル
Evaluation of Plasma Ion Beam Sputtered TiN/TiAlN Multilayers on Steel for Bio Implant Applications
著者
Balasubramanian, Subramanian
Balasubramanian, Subramanian
Guruswamy, Brindha
Guruswamy, Brindha
Takahashi, Makoto
Takahashi, Makoto
Nishikawa, Hiroshi
Nishikawa, Hiroshi
Kobayashi, Akira
Kobayashi, Akira
著者 (ヨミ)
タカハシ, マコト
ニシカワ, ヒロシ
キーワード等
Surface modification
Multilayers
Nanoindentation
Plasma ion beam sputtering
抄録
Layers of 1.2 μm thick TiN / TiAlN were deposited onto 316L stainless steel substrates by a plasma ion beam sputtering technique. The layers were sputtered in pure Ar and N₂ with the ion beam voltage of 1 keV and ion beam current of 30mA. Polycrystalline nature with FCC structure was identified from XRD analysis. The presence of Ti, Al, C and N elements on the surface of the film was confirmed by the XPS survey spectrum taken on the surface of the coatings. The Ti2p region can be decomposed into several contributions corresponding to the different oxidation states of titanium. The columnar nature of growth was observed from the cross sectional HRTEM analysis. The nano-hardness of the TiN/TiAlNcoatings were found to be 30 GPa. The superior corrosion resistance in simulated body solution environment was observed for the multilayer coated specimen.
公開者
大阪大学接合科学研究所
公開者の別表記
Joining and Welding Research Institute, Osaka University
公開者 (ヨミ)
オオサカ ダイガク セツゴウ カガク ケンキュウジョ
掲載誌名
Transactions of JWRI
巻
40
号
2
開始ページ
55
終了ページ
58
刊行年月
2011-12
ISSN
03874508
NCID
AA00867058
URL
http://hdl.handle.net/11094/4553
言語
英語
カテゴリ
紀要論文 Departmental Bulletin Paper
Transactions of JWRI / Vol.40 No.2 (2011-12)
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text
DCTERMS.bibliographicCitation
Transactions of JWRI.40(2) P.55-P.58
DC.title
Evaluation of Plasma Ion Beam Sputtered TiN/TiAlN Multilayers on Steel for Bio Implant Applications
DC.creator
Balasubramanian, Subramanian
Guruswamy, Brindha
Takahashi, Makoto
Nishikawa, Hiroshi
Kobayashi, Akira
DC.publisher
大阪大学接合科学研究所
DC.language" scheme="DCTERMS.RFC1766
英語
DCTERMS.issued" scheme="DCTERMS.W3CDTF
2011-12
DC.identifier" scheme="DCTERMS.URI
http://hdl.handle.net/11094/4553
DC.subject
Surface modification
Multilayers
Nanoindentation
Plasma ion beam sputtering
DCTERMS.abstract
Layers of 1.2 μm thick TiN / TiAlN were deposited onto 316L stainless steel substrates by a plasma ion beam sputtering technique. The layers were sputtered in pure Ar and N₂ with the ion beam voltage of 1 keV and ion beam current of 30mA. Polycrystalline nature with FCC structure was identified from XRD analysis. The presence of Ti, Al, C and N elements on the surface of the film was confirmed by the XPS survey spectrum taken on the surface of the coatings. The Ti2p region can be decomposed into several contributions corresponding to the different oxidation states of titanium. The columnar nature of growth was observed from the cross sectional HRTEM analysis. The nano-hardness of the TiN/TiAlNcoatings were found to be 30 GPa. The superior corrosion resistance in simulated body solution environment was observed for the multilayer coated specimen.
citation_title
Evaluation of Plasma Ion Beam Sputtered TiN/TiAlN Multilayers on Steel for Bio Implant Applications
citation_author
Balasubramanian, Subramanian
Guruswamy, Brindha
Takahashi, Makoto
Nishikawa, Hiroshi
Kobayashi, Akira
citation_publisher
大阪大学接合科学研究所
citation_language
英語
citation_date
2011-12
citation_journal_title
Transactions of JWRI
citation_volume
40
citation_issue
2
citation_firstpage
55
citation_lastpage
58
citation_issn
03874508
citation_public_url
http://hdl.handle.net/11094/4553
citation_keywords
Surface modification
Multilayers
Nanoindentation
Plasma ion beam sputtering