Evaluation of Plasma Ion Beam Sputtered TiN/TiAlN Multilayers on Steel for Bio Implant Applications

Balasubramanian, Subramanian; Guruswamy, Brindha; Takahashi, Makoto; Nishikawa, Hiroshi; Kobayashi, Akira

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タイトル	Evaluation of Plasma Ion Beam Sputtered TiN/TiAlN Multilayers on Steel for Bio Implant Applications
著者	Balasubramanian, Subramanian Balasubramanian, Subramanian
	Guruswamy, Brindha Guruswamy, Brindha
	Takahashi, Makoto Takahashi, Makoto
	Nishikawa, Hiroshi Nishikawa, Hiroshi
	Kobayashi, Akira Kobayashi, Akira
著者 (ヨミ)	タカハシ, マコト
著者 (ヨミ)	ニシカワ, ヒロシ
キーワード等	Surface modification
	Multilayers
	Nanoindentation
	Plasma ion beam sputtering
抄録	Layers of 1.2 μm thick TiN / TiAlN were deposited onto 316L stainless steel substrates by a plasma ion beam sputtering technique. The layers were sputtered in pure Ar and N₂ with the ion beam voltage of 1 keV and ion beam current of 30mA. Polycrystalline nature with FCC structure was identified from XRD analysis. The presence of Ti, Al, C and N elements on the surface of the film was confirmed by the XPS survey spectrum taken on the surface of the coatings. The Ti2p region can be decomposed into several contributions corresponding to the different oxidation states of titanium. The columnar nature of growth was observed from the cross sectional HRTEM analysis. The nano-hardness of the TiN/TiAlNcoatings were found to be 30 GPa. The superior corrosion resistance in simulated body solution environment was observed for the multilayer coated specimen.
公開者	大阪大学接合科学研究所
公開者の別表記	Joining and Welding Research Institute, Osaka University
公開者 (ヨミ)	オオサカダイガクセツゴウカガクケンキュウジョ
掲載誌名	Transactions of JWRI
巻	40
号	2
開始ページ	55
終了ページ	58
刊行年月	2011-12
ISSN	03874508
NCID	AA00867058
URL	http://hdl.handle.net/11094/4553
言語	英語

著者版フラグ	publisher
NII資源タイプ	紀要論文
ローカル資源タイプ	紀要論文
dcmi資源タイプ	text
DCTERMS.bibliographicCitation	Transactions of JWRI.40(2) P.55-P.58
DC.title	Evaluation of Plasma Ion Beam Sputtered TiN/TiAlN Multilayers on Steel for Bio Implant Applications
DC.creator	Balasubramanian, Subramanian
	Guruswamy, Brindha
	Takahashi, Makoto
	Nishikawa, Hiroshi
	Kobayashi, Akira
DC.publisher	大阪大学接合科学研究所
DC.language" scheme="DCTERMS.RFC1766	英語
DCTERMS.issued" scheme="DCTERMS.W3CDTF	2011-12
DC.identifier" scheme="DCTERMS.URI	http://hdl.handle.net/11094/4553
DC.subject	Surface modification
	Multilayers
	Nanoindentation
	Plasma ion beam sputtering
DCTERMS.abstract	Layers of 1.2 μm thick TiN / TiAlN were deposited onto 316L stainless steel substrates by a plasma ion beam sputtering technique. The layers were sputtered in pure Ar and N₂ with the ion beam voltage of 1 keV and ion beam current of 30mA. Polycrystalline nature with FCC structure was identified from XRD analysis. The presence of Ti, Al, C and N elements on the surface of the film was confirmed by the XPS survey spectrum taken on the surface of the coatings. The Ti2p region can be decomposed into several contributions corresponding to the different oxidation states of titanium. The columnar nature of growth was observed from the cross sectional HRTEM analysis. The nano-hardness of the TiN/TiAlNcoatings were found to be 30 GPa. The superior corrosion resistance in simulated body solution environment was observed for the multilayer coated specimen.
citation_title	Evaluation of Plasma Ion Beam Sputtered TiN/TiAlN Multilayers on Steel for Bio Implant Applications
citation_author	Balasubramanian, Subramanian
	Guruswamy, Brindha
	Takahashi, Makoto
	Nishikawa, Hiroshi
	Kobayashi, Akira
citation_publisher	大阪大学接合科学研究所
citation_language	英語
citation_date	2011-12
citation_journal_title	Transactions of JWRI
citation_volume	40
citation_issue	2
citation_firstpage	55
citation_lastpage	58
citation_issn	03874508
citation_public_url	http://hdl.handle.net/11094/4553
citation_keywords	Surface modification
	Multilayers
	Nanoindentation
	Plasma ion beam sputtering

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