Aerosol Beam and CW Fiber Laser Irradiation for Creation of TiO₂ Film with Lower Electric Resistance

Shinonaga, Togo; Tsukamoto, Masahiro; Takahashi, Masanari; Fujita, Masayuki; Abe, Nobuyuki

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タイトル	Aerosol Beam and CW Fiber Laser Irradiation for Creation of TiO₂ Film with Lower Electric Resistance
著者	Shinonaga, Togo Shinonaga, Togo
	Tsukamoto, Masahiro Tsukamoto, Masahiro
	Takahashi, Masanari Takahashi, Masanari
	Fujita, Masayuki Fujita, Masayuki
	Abe, Nobuyuki Abe, Nobuyuki
キーワード等	CW fiber Laser
	Aerosol beam), (Functional ceramics), (Titanium dioxide), (Electric
	Aerosol beam
	Functional ceramics
	Titanium dioxide
	Electric resistance
抄録	The heating process is a useful method to change TiO₂ film property. When using a continuous wave (CW) fiber laser, local heating can be performed. In our experiments, the film was formed by aerosol beam irradiation. The films were irradiated with a CW fiber laser in vacuum and in air. The film was darkened after the CW fiber laser irradiation in vacuum. The electric resistance of the darkened area on the films was decreased as the energy per unit area was increased. However, the film was not changed after the CW fiber laser irradiation in air. In our previous study, the films were darkened by femtosecond laser irradiation in air. Then, electrical resistance of the darkened area on the films also decreased. Electric resistance of the darkened area after CW fiber laser irradiation in vacuum was much smaller than that after femtosecond laser irradiation.
公開者	大阪大学接合科学研究所
公開者の別表記	Joining and Welding Research Institute, Osaka University
公開者 (ヨミ)	オオサカダイガクセツゴウカガクケンキュウジョ
掲載誌名	Transactions of JWRI
巻	40
号	1
開始ページ	31
終了ページ	34
刊行年月	2011-06
ISSN	03874508
NCID	AA00867058
URL	http://hdl.handle.net/11094/4654
言語	英語

著者版フラグ	publisher
NII資源タイプ	紀要論文
ローカル資源タイプ	紀要論文
dcmi資源タイプ	text
DCTERMS.bibliographicCitation	Transactions of JWRI.40(1) P.31-P.34
DC.title	Aerosol Beam and CW Fiber Laser Irradiation for Creation of TiO₂ Film with Lower Electric Resistance
DC.creator	Shinonaga, Togo
	Tsukamoto, Masahiro
	Takahashi, Masanari
	Fujita, Masayuki
	Abe, Nobuyuki
DC.publisher	大阪大学接合科学研究所
DC.language" scheme="DCTERMS.RFC1766	英語
DCTERMS.issued" scheme="DCTERMS.W3CDTF	2011-06
DC.identifier" scheme="DCTERMS.URI	http://hdl.handle.net/11094/4654
DC.subject	CW fiber Laser
	Aerosol beam), (Functional ceramics), (Titanium dioxide), (Electric
	Aerosol beam
	Functional ceramics
	Titanium dioxide
	Electric resistance
DCTERMS.abstract	The heating process is a useful method to change TiO₂ film property. When using a continuous wave (CW) fiber laser, local heating can be performed. In our experiments, the film was formed by aerosol beam irradiation. The films were irradiated with a CW fiber laser in vacuum and in air. The film was darkened after the CW fiber laser irradiation in vacuum. The electric resistance of the darkened area on the films was decreased as the energy per unit area was increased. However, the film was not changed after the CW fiber laser irradiation in air. In our previous study, the films were darkened by femtosecond laser irradiation in air. Then, electrical resistance of the darkened area on the films also decreased. Electric resistance of the darkened area after CW fiber laser irradiation in vacuum was much smaller than that after femtosecond laser irradiation.
citation_title	Aerosol Beam and CW Fiber Laser Irradiation for Creation of TiO₂ Film with Lower Electric Resistance
citation_author	Shinonaga, Togo
	Tsukamoto, Masahiro
	Takahashi, Masanari
	Fujita, Masayuki
	Abe, Nobuyuki
citation_publisher	大阪大学接合科学研究所
citation_language	英語
citation_date	2011-06
citation_journal_title	Transactions of JWRI
citation_volume	40
citation_issue	1
citation_firstpage	31
citation_lastpage	34
citation_issn	03874508
citation_public_url	http://hdl.handle.net/11094/4654
citation_keywords	CW fiber Laser
	Aerosol beam), (Functional ceramics), (Titanium dioxide), (Electric
	Aerosol beam
	Functional ceramics
	Titanium dioxide
	Electric resistance

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