Rewriting Process of Lower Electrical Resistance Lines on TiO₂ Film using Methods of Whitening with CW Fiber Laser and Darkening with Femtosecond Laser

Tsukamoto, Masahiro; Muraki, Yu; Shinonaga, Togo; Yoshida, Minoru; Takahashi, Masanari; Abe, Nobuyuki

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タイトル	Rewriting Process of Lower Electrical Resistance Lines on TiO₂ Film using Methods of Whitening with CW Fiber Laser and Darkening with Femtosecond Laser
著者	Tsukamoto, Masahiro Tsukamoto, Masahiro
	Muraki, Yu Muraki, Yu
	Shinonaga, Togo Shinonaga, Togo
	Yoshida, Minoru Yoshida, Minoru
	Takahashi, Masanari Takahashi, Masanari
	Abe, Nobuyuki Abe, Nobuyuki
キーワード等	Femtosecond Laser
	CW Fiber Laser
	Titanium Dioxide
	Aerosol Beam
抄録	Rewriting process of lower electrical resistance lines on a titanium dioxide (TiO₂) film was developed. In this process, lower electrical resistance lines were written on a TiO₂ film without producing surface topography changes by femtosecond laser irradiation. By heating with a CW fiber laser under air, the electrical resistance of these lines was retained to the higher resistance with no topography changes. This result indicated that the lines could be erased by the local heating method under air. When the erasing-treated area was irradiated with a femtosecond laser, the lower electrical resistance lines could be rewritten with no topography changes of the film surface.
公開者	大阪大学接合科学研究所
公開者の別表記	Joining and Welding Research Institute, Osaka University
公開者 (ヨミ)	オオサカダイガクセツゴウカガクケンキュウジョ
掲載誌名	Transactions of JWRI
巻	40
号	2
開始ページ	29
終了ページ	36
刊行年月	2011-12
ISSN	03874508
NCID	AA00867058
URL	http://hdl.handle.net/11094/4806
言語	英語
カテゴリ	紀要論文 Departmental Bulletin Paper
カテゴリ	Transactions of JWRI / Vol.40 No.2 (2011-12)

著者版フラグ	publisher
NII資源タイプ	紀要論文
ローカル資源タイプ	紀要論文
dcmi資源タイプ	text
DCTERMS.bibliographicCitation	Transactions of JWRI.40(2) P.29-P.36
DC.title	Rewriting Process of Lower Electrical Resistance Lines on TiO₂ Film using Methods of Whitening with CW Fiber Laser and Darkening with Femtosecond Laser
DC.creator	Tsukamoto, Masahiro
	Muraki, Yu
	Shinonaga, Togo
	Yoshida, Minoru
	Takahashi, Masanari
	Abe, Nobuyuki
DC.publisher	大阪大学接合科学研究所
DC.language" scheme="DCTERMS.RFC1766	英語
DCTERMS.issued" scheme="DCTERMS.W3CDTF	2011-12
DC.identifier" scheme="DCTERMS.URI	http://hdl.handle.net/11094/4806
DC.subject	Femtosecond Laser
	CW Fiber Laser
	Titanium Dioxide
	Aerosol Beam
DCTERMS.abstract	Rewriting process of lower electrical resistance lines on a titanium dioxide (TiO₂) film was developed. In this process, lower electrical resistance lines were written on a TiO₂ film without producing surface topography changes by femtosecond laser irradiation. By heating with a CW fiber laser under air, the electrical resistance of these lines was retained to the higher resistance with no topography changes. This result indicated that the lines could be erased by the local heating method under air. When the erasing-treated area was irradiated with a femtosecond laser, the lower electrical resistance lines could be rewritten with no topography changes of the film surface.
citation_title	Rewriting Process of Lower Electrical Resistance Lines on TiO₂ Film using Methods of Whitening with CW Fiber Laser and Darkening with Femtosecond Laser
citation_author	Tsukamoto, Masahiro
	Muraki, Yu
	Shinonaga, Togo
	Yoshida, Minoru
	Takahashi, Masanari
	Abe, Nobuyuki
citation_publisher	大阪大学接合科学研究所
citation_language	英語
citation_date	2011-12
citation_journal_title	Transactions of JWRI
citation_volume	40
citation_issue	2
citation_firstpage	29
citation_lastpage	36
citation_issn	03874508
citation_public_url	http://hdl.handle.net/11094/4806
citation_keywords	Femtosecond Laser
	CW Fiber Laser
	Titanium Dioxide
	Aerosol Beam

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