A New Inductance Extraction Technique of On-wafer Spiral Inductor Based on Analytical Interconnect Formula

Shima, Hideki; Matsuoka, Toshimasa; Taniguchi, Kenji

doi:https://doi.org/10.1093/ietele/e88-c.5.824

A New Inductance Extraction Technique of On-wafer Spiral Inductor Based on Analytical Interconnect Formula

Shima, Hideki; Matsuoka, Toshimasa; Taniguchi, Kenji

IEICE Transactions on Electronics, 2005, E88-C(5), 824-828

アクセス数:387件（2025-08-14 22:13 集計）

固定URL: https://hdl.handle.net/11094/51713

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タイトル	A New Inductance Extraction Technique of On-wafer Spiral Inductor Based on Analytical Interconnect Formula
著者	著者名 Shima, Hideki
	NRID 1000080324820 1000080324820 ORCID 0000-0003-3876-2679 0000-0003-3876-2679 researchmap permalink read0068628 read0068628 Scopus Author ID 7402741552 7402741552 著者名 Matsuoka, Toshimasa
	NRID 1000020192180 1000020192180 著者名 Taniguchi, Kenji
キーワード等	spiral inductors
	interconnect
	closed-form expression
	inductance extraction
	analytical technique
抄録	A new inductance extraction technique of spiral inductor from measurement fixture is presented. We propose a scalable expression of parasitic inductance for interconnects, and design consideration of test structure accommodating spiral inductor. The simple expression includes mutual inductance between the interconnects with high accuracy. The formula matches a commercial field solver inductance values within 1.4%. The layout of the test structure to reduce magnetic coupling between the spiral and the interconnects allows us to extract the intrinsic inductance of spiral more accurately. The proposed technique requires neither special fixture used for measurement-based method nor skilled worker for precise extraction with the analytical technique used.
出版者	電子情報通信学会
	The Institute of Electronics, Information and Communication Engineers
	デンシ　ジョウホウ　ツウシン　ガッカイ
収録物名	IEICE Transactions on Electronics
巻(号)	E88-C(5)
ページ	824-828
刊行年月	2005-05
言語	英語
ハンドルURL	https://hdl.handle.net/11094/51713
PISSN	09168516
NCID	AA10826261
関連情報 (isIdenticalTo)	DOI (出版社版) https://doi.org/10.1093/ietele/e88-c.5.824
アクセス権	open access
権利情報	copyright©2005 IEICE
出版タイプ	Version of Record
カテゴリ	学術雑誌論文 Journal Article

資源タイプ	学術雑誌論文
ローカル資源タイプ	学術雑誌論文
DCMI資源タイプ	text
DCTERMS.bibliographicCitation	IEICE Transactions on Electronics. 2005, E88-C(5), p. 824-828
DC.title	A New Inductance Extraction Technique of On-wafer Spiral Inductor Based on Analytical Interconnect Formula
DC.creator	Shima, Hideki
	Matsuoka, Toshimasa
	Taniguchi, Kenji
DC.publisher	電子情報通信学会
	The Institute of Electronics, Information and Communication Engineers
	デンシ　ジョウホウ　ツウシン　ガッカイ
DC.language' scheme='DCTERMS.RFC1766	英語
DC.type' scheme='DCTERMS.DCMIType	text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2005-05
DC.identifier	https://doi.org/10.1093/ietele/e88-c.5.824
DC.subject	spiral inductors
	interconnect
	closed-form expression
	inductance extraction
	analytical technique
DCTERMS.abstract	A new inductance extraction technique of spiral inductor from measurement fixture is presented. We propose a scalable expression of parasitic inductance for interconnects, and design consideration of test structure accommodating spiral inductor. The simple expression includes mutual inductance between the interconnects with high accuracy. The formula matches a commercial field solver inductance values within 1.4%. The layout of the test structure to reduce magnetic coupling between the spiral and the interconnects allows us to extract the intrinsic inductance of spiral more accurately. The proposed technique requires neither special fixture used for measurement-based method nor skilled worker for precise extraction with the analytical technique used.
DC.rights	copyright©2005 IEICE
DC.format	51713
citation_title	A New Inductance Extraction Technique of On-wafer Spiral Inductor Based on Analytical Interconnect Formula
citation_author	Shima, Hideki
	Matsuoka, Toshimasa
	Taniguchi, Kenji
citation_publisher	電子情報通信学会
citation_language	英語
citation_date	2005-05
citation_journal_title	IEICE Transactions on Electronics
citation_volume	E88-C
citation_issue	5
citation_firstpage	824
citation_lastpage	828
citation_doi	https://doi.org/10.1093/ietele/e88-c.5.824
citation_public_url	https://hdl.handle.net/11094/51713

A New Inductance Extraction Technique of On-wafer Spiral Inductor Based on Analytical Interconnect Formula

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