学術雑誌論文

本学関連学会

text

電気材料技術雑誌. 2013, 22, p. 26-34

日本語

text

2013-12-10

In this paper, the principle of a narrow gap discharge for high concentration ozone generation is described and shown the advantage of the application of high concentration ozone. Non-equilibrium plasmas move into the limelight with the preservation of the global environment. Ozone generation by dielectric barrier discharge is the most practical environmental technology in the application of the plasmas. Recently, ozone gas is developed in not only environmental fields but also the advanced technologies such as the semiconductor manufacturing. And, the development of ultra-high density ozone generation of 400g/m3(N) is achieved by the narrow gap discharge with less than 0. 1mm. For the future of the global environment, it is extremely important to examine a detailed mechanism of narrow gap discharge for development of the high efficiency and high density ozone generators.

76900

高効率・高濃度オゾン発生技術

和田, 昇

電気材料技術懇談会

日本語

2013-12-10

電気材料技術雑誌

22

26

34

https://hdl.handle.net/11094/76900