Modeling characterisation of a bipolar pulsed discharge

Donkó, Zoltán; Zajičková, Lenka; Sugimoto, Satoshi; Harumningtyas, Anjar Anggraini; Hamaguchi, Satoshi

doi:https://doi.org/10.1088/1361-6595/abb321

Modeling characterisation of a bipolar pulsed discharge

Donkó, Zoltán; Zajičková, Lenka; Sugimoto, Satoshi et al.

Plasma Sources Science and Technology, 2020, 29(10), 104001

アクセス数:410件（2025-08-28 10:33 集計）

固定URL: https://hdl.handle.net/11094/78268

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タイトル	Modeling characterisation of a bipolar pulsed discharge
著者	著者名 Donkó, Zoltán
	著者名 Zajičková, Lenka
	NRID 1000070187665 1000070187665 researchmap permalink read0014151 read0014151 Scopus Author ID 55505129300 55505129300 著者名 Sugimoto, Satoshi
	著者名 Harumningtyas, Anjar Anggraini
	NRID 1000060301826 1000060301826 ORCID 0000-0001-6580-8797 0000-0001-6580-8797 researchmap permalink satoshi_hamaguchi satoshi_hamaguchi Scopus Author ID 55220082400 55220082400 著者名 Hamaguchi, Satoshi
キーワード等	kinetic simulation
	numerical modeling
	pulsed waveform
内容	Zoltán Donkó et al 2020 Plasma Sources Sci. Technol. 29 104001
抄録	We apply particle based kinetic simulations to explore the characteristics of a low-pressure gas discharge driven by high-voltage (∼kV) pulses with alternating polarity, with a duty cycle of ≈ 1% and a repetition rate of 5 kHz. The computations allow tracing the spatio-temporal development of several discharge characteristics, the potential and electric field distributions, charged particle densities and fluxes, the mean ion energy at the electrode surfaces, etc. As such discharges have important surface processing applications, e.g. in the treatment of artificial bones, we analyse the time-dependence of the flux and the mean energy of the ions reaching the electrode surfaces, which can be both conducting and dielectric. Our investigations are conducted for argon buffer gas in the 40-140 Pa pressure range, for 1-5 cm electrode gaps and voltage pulse amplitudes ranging between 600 V and 1200 V.
出版者	IOP Publishing Ltd
収録物名	Plasma Sources Science and Technology
巻(号)	29(10)
ページ	104001
刊行年月	2020-10-16
言語	英語
ハンドルURL	https://hdl.handle.net/11094/78268
PISSN	09630252
eISSN	13616595
NCID	AA1247267X
関連情報 (isIdenticalTo)	DOI (出版社版) https://doi.org/10.1088/1361-6595/abb321
アクセス権	open access
権利情報	© 2020 The Author(s). Original content from this work may be used under the terms of the Creative Commons Attribution 4.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
出版タイプ	Version of Record
カテゴリ	学術雑誌論文 Journal Article

資源タイプ	学術雑誌論文
ローカル資源タイプ	学術雑誌論文
DCMI資源タイプ	text
DCTERMS.bibliographicCitation	Plasma Sources Science and Technology. 2020, 29(10), p. 104001
DC.title	Modeling characterisation of a bipolar pulsed discharge
DC.creator	Donkó, Zoltán
	Zajičková, Lenka
	Sugimoto, Satoshi
	Harumningtyas, Anjar Anggraini
	Hamaguchi, Satoshi
DC.publisher	IOP Publishing Ltd
DC.language' scheme='DCTERMS.RFC1766	英語
DC.type' scheme='DCTERMS.DCMIType	text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2020-10-16
DC.identifier	https://doi.org/10.1088/1361-6595/abb321
DC.subject	kinetic simulation
	numerical modeling
	pulsed waveform
DC.description	Zoltán Donkó et al 2020 Plasma Sources Sci. Technol. 29 104001
DCTERMS.abstract	We apply particle based kinetic simulations to explore the characteristics of a low-pressure gas discharge driven by high-voltage (∼kV) pulses with alternating polarity, with a duty cycle of ≈ 1% and a repetition rate of 5 kHz. The computations allow tracing the spatio-temporal development of several discharge characteristics, the potential and electric field distributions, charged particle densities and fluxes, the mean ion energy at the electrode surfaces, etc. As such discharges have important surface processing applications, e.g. in the treatment of artificial bones, we analyse the time-dependence of the flux and the mean energy of the ions reaching the electrode surfaces, which can be both conducting and dielectric. Our investigations are conducted for argon buffer gas in the 40-140 Pa pressure range, for 1-5 cm electrode gaps and voltage pulse amplitudes ranging between 600 V and 1200 V.
DC.rights	© 2020 The Author(s). Original content from this work may be used under the terms of the Creative Commons Attribution 4.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
DC.format	78268
citation_title	Modeling characterisation of a bipolar pulsed discharge
citation_author	Donkó, Zoltán
	Zajičková, Lenka
	Sugimoto, Satoshi
	Harumningtyas, Anjar Anggraini
	Hamaguchi, Satoshi
citation_publisher	IOP Publishing Ltd
citation_language	英語
citation_date	2020-10-16
citation_journal_title	Plasma Sources Science and Technology
citation_volume	29
citation_issue	10
citation_firstpage	104001
citation_doi	https://doi.org/10.1088/1361-6595/abb321
citation_public_url	https://hdl.handle.net/11094/78268

Modeling characterisation of a bipolar pulsed discharge

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