学術雑誌論文

学術雑誌論文

Physical Review E - Statistical, Nonlinear, and Soft Matter Physics. 2010, 81(4), p. 041602

Molecular dynamics simulation of the formation of sp3 hybridized bonds in hydrogenated diamondlike carbon deposition processes

American Physical Society

英語

2010-04-05

https://doi.org/10.1103/PhysRevE.81.041602

Yasuo Murakami, Seishi Horiguchi, and Satoshi Hamaguchi, Physical Review E 81, 041602, 2010

The formation process of s p3 hybridized carbon networks (i.e., diamondlike structures) in hydrogenated diamondlike carbon (DLC) films has been studied with the use of molecular-dynamics simulations. The processes simulated in this study are injections of hydrocarbon (CH3 and CH) beams into amorphous carbon (a-C) substrates. It has been shown that diamondlike s p3 structures are formed predominantly at a subsurface level when the beam energy is relatively high, as in the "subplantation" process for hydrogen-free DLC deposition. However, for hydrogenated DLC deposition, the presence of abundant hydrogen at subsurface levels, together with thermal spikes caused by energetic ion injections, substantially enhances the formation of carbon-to-carbon s p3 bonds. Therefore, the s p3 bond formation process for hydrogenated DLC films essentially differs from that for hydrogen-free DLC films. © 2010 The American Physical Society.

Copyright (2010) by the American Physical Society

78474

Molecular dynamics simulation of the formation of sp3 hybridized bonds in hydrogenated diamondlike carbon deposition processes

American Physical Society

英語

2010-04-05

Physical Review E - Statistical, Nonlinear, and Soft Matter Physics

81

4

041602

https://doi.org/10.1103/PhysRevE.81.041602

https://hdl.handle.net/11094/78474