Elastic constant and Brillouin oscillations in sputtered vitreous SiO2 thin films

Ogi, H.; Shagawa, T.; Nakamura, N.; Hirao, M.; Odaka, H.; Kihara, N.

doi:https://doi.org/10.1103/PhysRevB.78.134204

Elastic constant and Brillouin oscillations in sputtered vitreous SiO2 thin films

Ogi, H.; Shagawa, T.; Nakamura, N. et al.

Physical Review B - Condensed Matter and Materials Physics, 2008, 78(13), 134204-1-134204-7

アクセス数:611件（2025-07-31 07:53 集計）

固定URL: https://hdl.handle.net/11094/84179

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タイトル	Elastic constant and Brillouin oscillations in sputtered vitreous SiO2 thin films
著者	NRID 1000090252626 1000090252626 researchmap permalink read0042771 read0042771 Scopus Author ID 35563683500 35563683500 著者名 Ogi, H.
	著者名 Shagawa, T.
	NRID 1000050452404 1000050452404 researchmap permalink nnakamura nnakamura Scopus Author ID 7403356186 7403356186 ORCID 0000-0002-5338-842X 0000-0002-5338-842X 著者名 Nakamura, N.
	NRID 1000080112027 1000080112027 著者名 Hirao, M.
	著者名 Odaka, H.
	著者名 Kihara, N.
内容	Ogi H., Shagawa T., Nakamura N., et al. "Elastic constant and Brillouin oscillations in sputtered vitreous SiO2 thin films", Physical Review B - Condensed Matter and Materials Physics, 78(13), 134204, 2008. https://doi.org/10.1103/PhysRevB.78.134204.
抄録	We studied the relationship between elastic constants and microstructure in sputtered vitreous SiO2 thin films using pump-probe picosecond laser ultrasound. The delayed probe light pulse is diffracted by the acoustic wave excited by the pump light pulse, inducing Brillouin oscillations, seen as reflectivity change in the probe pulse, whose frequency can be used to extract the sound velocity and elastic moduli. Theoretical calculations were made to explain the asymmetric response of Brillouin oscillations and to predict the possible error limit of the determined elastic constants. The thin films containing defects exhibited lower elastic constant. A micromechanics modeling was developed to evaluate defect porosity and attenuation caused by scattering was able to predict the defect size. Elastic moduli of the defect-free specimens increased with increasing sputtering power, eventually exceeding the bulk value, and correlated with phonon frequencies, indicating that the decrease in the Si-O-Si bond angle of the tetrahedral structure increased the stiffness. © 2008 The American Physical Society.
出版者	American Physical Society
収録物名	Physical Review B - Condensed Matter and Materials Physics
巻(号)	78(13)
ページ	134204-1-134204-7
刊行年月	2008-10-14
言語	英語
ハンドルURL	https://hdl.handle.net/11094/84179
PISSN	10980121
eISSN	1550235X
NCID	AA11187113
関連情報 (isIdenticalTo)	DOI (出版社版) https://doi.org/10.1103/PhysRevB.78.134204
アクセス権	open access
権利情報	Copyright 2008 by the American Physical Society
出版タイプ	Version of Record
カテゴリ	学術雑誌論文 Journal Article

資源タイプ	学術雑誌論文
ローカル資源タイプ	学術雑誌論文
DCMI資源タイプ	text
DCTERMS.bibliographicCitation	Physical Review B - Condensed Matter and Materials Physics. 2008, 78(13), p. 134204-1-134204-7
DC.title	Elastic constant and Brillouin oscillations in sputtered vitreous SiO2 thin films
DC.creator	Ogi, H.
	Shagawa, T.
	Nakamura, N.
	Hirao, M.
	Odaka, H.
	Kihara, N.
DC.publisher	American Physical Society
DC.language' scheme='DCTERMS.RFC1766	英語
DC.type' scheme='DCTERMS.DCMIType	text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2008-10-14
DC.identifier	https://doi.org/10.1103/PhysRevB.78.134204
DC.description	Ogi H., Shagawa T., Nakamura N., et al. "Elastic constant and Brillouin oscillations in sputtered vitreous SiO2 thin films", Physical Review B - Condensed Matter and Materials Physics, 78(13), 134204, 2008. https://doi.org/10.1103/PhysRevB.78.134204.
DCTERMS.abstract	We studied the relationship between elastic constants and microstructure in sputtered vitreous SiO2 thin films using pump-probe picosecond laser ultrasound. The delayed probe light pulse is diffracted by the acoustic wave excited by the pump light pulse, inducing Brillouin oscillations, seen as reflectivity change in the probe pulse, whose frequency can be used to extract the sound velocity and elastic moduli. Theoretical calculations were made to explain the asymmetric response of Brillouin oscillations and to predict the possible error limit of the determined elastic constants. The thin films containing defects exhibited lower elastic constant. A micromechanics modeling was developed to evaluate defect porosity and attenuation caused by scattering was able to predict the defect size. Elastic moduli of the defect-free specimens increased with increasing sputtering power, eventually exceeding the bulk value, and correlated with phonon frequencies, indicating that the decrease in the Si-O-Si bond angle of the tetrahedral structure increased the stiffness. © 2008 The American Physical Society.
DC.rights	Copyright 2008 by the American Physical Society
DC.format	84179
citation_title	Elastic constant and Brillouin oscillations in sputtered vitreous SiO2 thin films
citation_author	Ogi, H.
	Shagawa, T.
	Nakamura, N.
	Hirao, M.
	Odaka, H.
	Kihara, N.
citation_publisher	American Physical Society
citation_language	英語
citation_date	2008-10-14
citation_journal_title	Physical Review B - Condensed Matter and Materials Physics
citation_volume	78
citation_issue	13
citation_firstpage	134204-1
citation_lastpage	134204-7
citation_doi	https://doi.org/10.1103/PhysRevB.78.134204
citation_public_url	https://hdl.handle.net/11094/84179

Elastic constant and Brillouin oscillations in sputtered vitreous SiO2 thin films

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