Surface Modification of Fluoropolymer Using Open-Air Plasma Treatment at Atmospheric Pressure with Ar, Ar＋O2, and Ar＋H2 for Application in HighAdhesion Metal Wiring Patterns

Kodama, Yoshinori; Ohkubo, Yuji; Oshita, Takaya; Nakano, Yoshinori; Uehara, Tsuyoshi; Aoyama, Teppei; Endo, Katsuyoshi; Yamamura, Kazuya

doi:https://doi.org/10.4139/sfj.69.155

Surface Modification of Fluoropolymer Using Open-Air Plasma Treatment at Atmospheric Pressure with Ar, Ar＋O2, and Ar＋H2 for Application in HighAdhesion Metal Wiring Patterns

Kodama, Yoshinori; Ohkubo, Yuji; Oshita, Takaya et al.

Journal of The Surface Finishing Society of Japan, 2018, 69(4), 155-162

アクセス数:892件（2025-08-20 20:04 集計）

固定URL: https://hdl.handle.net/11094/84526

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タイトル	Surface Modification of Fluoropolymer Using Open-Air Plasma Treatment at Atmospheric Pressure with Ar, Ar＋O2, and Ar＋H2 for Application in HighAdhesion Metal Wiring Patterns
著者	著者名 Kodama, Yoshinori
	NRID 1000010525786 1000010525786 ORCID 0000-0001-7366-5108 0000-0001-7366-5108 researchmap permalink okb okb Scopus Author ID 37461879400 37461879400 著者名 Ohkubo, Yuji
	著者名 Oshita, Takaya
	著者名 Nakano, Yoshinori
	著者名 Uehara, Tsuyoshi
	著者名 Aoyama, Teppei
	NRID 1000090152008 1000090152008 researchmap permalink endo5352 endo5352 Scopus Author ID 7402712908 7402712908 著者名 Endo, Katsuyoshi
	NRID 1000060240074 1000060240074 researchmap permalink read0014013 read0014013 Scopus Author ID 7201754767 7201754767 著者名 Yamamura, Kazuya
キーワード等	Adhesion
	Ag Ink
	Atmospheric Plasma Treatment
	Polytetrafluoroethylene (PTFE)
	Printed Circuit Board for High-Frequency
抄録	We performed open-air plasma treatment of polytetrafluoroethylene (PTFE) at atmospheric pressure to increase the adhesion strength between PTFE and an Ag metal film formed from Ag ink. Coloration of the PTFE surface occurred during 600 s treatment with Ar plasma. The Ag/PTFE adhesion strength was 0.06 N/mm. To resolve the problem of coloration and to improve the adhesion strength, O2 or H2 gas was added. During treatment with Ar+O2 plasma with O2 content of 0.33% for 600 s, no coloration occurred but the adhesion strength decreased to zero. During treatment with Ar+H2 plasma for 600 s, coloration did not occur. Moreover, the adhesion strength increased to 0.25-0.55 N/mm. These results showed that H2 addition was effective for preventing coloration and improving adhesion strength during long-period plasma treatment. Furthermore, the uniformity of surface treatment with Ar+H2 plasma was higher than that for Ar plasma.
出版者	The Surface Finishing Society of Japan
出版者	表面技術協会
収録物名	Journal of The Surface Finishing Society of Japan
巻(号)	69(4)
ページ	155-162
刊行年月	2018-04-01
言語	英語
ハンドルURL	https://hdl.handle.net/11094/84526
PISSN	09151869
eISSN	18843409
NCID	AN1005202X
NCID	AA12022458
関連情報 (isIdenticalTo)	DOI (出版社版) https://doi.org/10.4139/sfj.69.155
アクセス権	open access
出版タイプ	Version of Record
カテゴリ	学術雑誌論文 Journal Article

資源タイプ	学術雑誌論文
ローカル資源タイプ	学術雑誌論文
DCMI資源タイプ	text
DCTERMS.bibliographicCitation	Journal of The Surface Finishing Society of Japan. 2018, 69(4), p. 155-162
DC.title	Surface Modification of Fluoropolymer Using Open-Air Plasma Treatment at Atmospheric Pressure with Ar, Ar＋O2, and Ar＋H2 for Application in HighAdhesion Metal Wiring Patterns
DC.creator	Kodama, Yoshinori
	Ohkubo, Yuji
	Oshita, Takaya
	Nakano, Yoshinori
	Uehara, Tsuyoshi
	Aoyama, Teppei
	Endo, Katsuyoshi
	Yamamura, Kazuya
DC.publisher	The Surface Finishing Society of Japan
DC.publisher	表面技術協会
DC.language' scheme='DCTERMS.RFC1766	英語
DC.type' scheme='DCTERMS.DCMIType	text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2018-04-01
DC.identifier	https://doi.org/10.4139/sfj.69.155
DC.subject	Adhesion
	Ag Ink
	Atmospheric Plasma Treatment
	Polytetrafluoroethylene (PTFE)
	Printed Circuit Board for High-Frequency
DCTERMS.abstract	We performed open-air plasma treatment of polytetrafluoroethylene (PTFE) at atmospheric pressure to increase the adhesion strength between PTFE and an Ag metal film formed from Ag ink. Coloration of the PTFE surface occurred during 600 s treatment with Ar plasma. The Ag/PTFE adhesion strength was 0.06 N/mm. To resolve the problem of coloration and to improve the adhesion strength, O2 or H2 gas was added. During treatment with Ar+O2 plasma with O2 content of 0.33% for 600 s, no coloration occurred but the adhesion strength decreased to zero. During treatment with Ar+H2 plasma for 600 s, coloration did not occur. Moreover, the adhesion strength increased to 0.25-0.55 N/mm. These results showed that H2 addition was effective for preventing coloration and improving adhesion strength during long-period plasma treatment. Furthermore, the uniformity of surface treatment with Ar+H2 plasma was higher than that for Ar plasma.
DC.format	84526
citation_title	Surface Modification of Fluoropolymer Using Open-Air Plasma Treatment at Atmospheric Pressure with Ar, Ar＋O2, and Ar＋H2 for Application in HighAdhesion Metal Wiring Patterns
citation_author	Kodama, Yoshinori
	Ohkubo, Yuji
	Oshita, Takaya
	Nakano, Yoshinori
	Uehara, Tsuyoshi
	Aoyama, Teppei
	Endo, Katsuyoshi
	Yamamura, Kazuya
citation_publisher	The Surface Finishing Society of Japan
citation_language	英語
citation_date	2018-04-01
citation_journal_title	Journal of The Surface Finishing Society of Japan
citation_volume	69
citation_issue	4
citation_firstpage	155
citation_lastpage	162
citation_doi	https://doi.org/10.4139/sfj.69.155
citation_public_url	https://hdl.handle.net/11094/84526

Surface Modification of Fluoropolymer Using Open-Air Plasma Treatment at Atmospheric Pressure with Ar, Ar＋O2, and Ar＋H2 for Application in HighAdhesion Metal Wiring Patterns

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