Elastic constant of dielectric nano-thin films using three-layer resonance studied by picosecond ultrasonics

Fukuda, Hiroki; Nagakubo, Akira; Ogi, Hirotsugu

doi:https://doi.org/10.35848/1347-4065/abec5a

Elastic constant of dielectric nano-thin films using three-layer resonance studied by picosecond ultrasonics

Fukuda, Hiroki; Nagakubo, Akira; Ogi, Hirotsugu

Japanese Journal of Applied Physics, 2021, 60(SD), SDDA05-1-SDDA05-5

アクセス数:172件（2025-04-26 09:40 集計）

固定URL: https://hdl.handle.net/11094/84529

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タイトル	Elastic constant of dielectric nano-thin films using three-layer resonance studied by picosecond ultrasonics
著者	著者名 Fukuda, Hiroki
	NRID 1000070751113 1000070751113 ORCID 0000-0001-7494-5099 0000-0001-7494-5099 researchmap permalink nagakubo nagakubo Scopus Author ID 55329400300 55329400300 著者名 Nagakubo, Akira
	NRID 1000090252626 1000090252626 researchmap permalink read0042771 read0042771 Scopus Author ID 35563683500 35563683500 著者名 Ogi, Hirotsugu
内容	This is the Accepted Manuscript version of an article accepted for publication in Japanese Journal of Applied Physics. IOP Publishing Ltd are not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at https://doi.org/10.35848/1347-4065/abec5a.
抄録	Elastic constants and sound velocities of nm order thin films are essential for designing acoustic filters. However, it is difficult to measure them for dielectric thin films. In this study, we use a three-layer structure where a dielectric nano-thin film is sandwiched between thicker metallic films to measure the longitudinal elastic constant of the dielectric film. We propose an efficiency function to estimate the optimal thicknesses of the components. We use Pt/NiO/Pt three-layer films for confirming our proposed method. The determined elastic constant of NiO deposited at room temperature is smaller than the bulk value by ∼40%. However, it approaches the bulk value as the deposition temperature increases. We also reveal that the uncertainty of the elastic constant of the Pt film insignificantly affects the accuracy of the determined elastic constant of NiO in this structure.
出版者	The Japan Society of Applied Physics
収録物名	Japanese Journal of Applied Physics
巻(号)	60(SD)
ページ	SDDA05-1-SDDA05-5
刊行年月	2021-03-24
言語	英語
ハンドルURL	https://hdl.handle.net/11094/84529
PISSN	00214922
eISSN	13474065
NCID	AA12295836
関連情報 (isVersionOf)	DOI (出版社版) https://doi.org/10.35848/1347-4065/abec5a
アクセス権	open access
権利情報	© 2021 The Japan Society of Applied Physics. This Accepted Manuscript is available for reuse under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License after the 12 month embargo period provided that all the terms of the license are adhered to.
出版タイプ	Accepted Manuscript
カテゴリ	学術雑誌論文 Journal Article

資源タイプ	学術雑誌論文
ローカル資源タイプ	学術雑誌論文
DCMI資源タイプ	text
DCTERMS.bibliographicCitation	Japanese Journal of Applied Physics. 2021, 60(SD), p. SDDA05-1-SDDA05-5
DC.title	Elastic constant of dielectric nano-thin films using three-layer resonance studied by picosecond ultrasonics
DC.creator	Fukuda, Hiroki
	Nagakubo, Akira
	Ogi, Hirotsugu
DC.publisher	The Japan Society of Applied Physics
DC.language' scheme='DCTERMS.RFC1766	英語
DC.type' scheme='DCTERMS.DCMIType	text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2021-03-24
DC.identifier	https://doi.org/10.35848/1347-4065/abec5a
DC.description	This is the Accepted Manuscript version of an article accepted for publication in Japanese Journal of Applied Physics. IOP Publishing Ltd are not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at https://doi.org/10.35848/1347-4065/abec5a.
DCTERMS.abstract	Elastic constants and sound velocities of nm order thin films are essential for designing acoustic filters. However, it is difficult to measure them for dielectric thin films. In this study, we use a three-layer structure where a dielectric nano-thin film is sandwiched between thicker metallic films to measure the longitudinal elastic constant of the dielectric film. We propose an efficiency function to estimate the optimal thicknesses of the components. We use Pt/NiO/Pt three-layer films for confirming our proposed method. The determined elastic constant of NiO deposited at room temperature is smaller than the bulk value by ∼40%. However, it approaches the bulk value as the deposition temperature increases. We also reveal that the uncertainty of the elastic constant of the Pt film insignificantly affects the accuracy of the determined elastic constant of NiO in this structure.
DC.rights	© 2021 The Japan Society of Applied Physics. This Accepted Manuscript is available for reuse under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License after the 12 month embargo period provided that all the terms of the license are adhered to.
DC.format	84529
citation_title	Elastic constant of dielectric nano-thin films using three-layer resonance studied by picosecond ultrasonics
citation_author	Fukuda, Hiroki
	Nagakubo, Akira
	Ogi, Hirotsugu
citation_publisher	The Japan Society of Applied Physics
citation_language	英語
citation_date	2021-03-24
citation_journal_title	Japanese Journal of Applied Physics
citation_volume	60
citation_issue	SD
citation_firstpage	SDDA05-1
citation_lastpage	SDDA05-5
citation_doi	https://doi.org/10.35848/1347-4065/abec5a
citation_public_url	https://hdl.handle.net/11094/84529

Elastic constant of dielectric nano-thin films using three-layer resonance studied by picosecond ultrasonics

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