学術雑誌論文

学術雑誌論文

text

Applied Physics Express. 2019, 13(1), p. 016504-1-016504-4

GHz-range resonant ultrasound spectroscopy for a free-standing nano film studied by picosecond ultrasonics

The Japan Society of Applied Physics

英語

text

2019-12-19

https://doi.org/10.7567/1882-0786/ab600d

This is the Accepted Manuscript version of an article accepted for publication in Applied Physics Express. IOP Publishing Ltd are not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at https://doi.org/10.7567/1882-0786/ab600d.

Progress in the wireless communication requires higher frequency bandpass filters, and the bulk acoustic-wave filter is especially the key device for the GHz-range communication. Its resonance frequencies depend on the elastic constants of individual layers, but it is never straightforward to measure them. In this study, we apply resonant ultrasound spectroscopy to a GHz-range free-standing AlN/Ru/Cr resonator to simultaneously determine the elastic constant of each layer. Using picosecond ultrasonics, we measure free-vibration resonance frequencies up to ∼70 GHz and inversely determine it. The obtained values are reasonable as thin films elasticity, confirming the applicability of the proposed method.

© 2019 The Japan Society of Applied Physics. This Accepted Manuscript is available for reuse under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License after the 12 month embargo period provided that all the terms of the license are adhered to.

84530

GHz-range resonant ultrasound spectroscopy for a free-standing nano film studied by picosecond ultrasonics

The Japan Society of Applied Physics

英語

2019-12-19

Applied Physics Express

13

1

016504-1

016504-4

https://doi.org/10.7567/1882-0786/ab600d

https://hdl.handle.net/11094/84530