Enhancement of sensitivity of Pd-based hydrogen-gas sensor by plasma exposure studied by wireless quartz resonator

Zhou, Lianjie; Nakamura, Nobutomo; Nagakubo, Akira; Ogi, Hirotsugu

doi:https://doi.org/10.35848/1347-4065/ab78e2

Enhancement of sensitivity of Pd-based hydrogen-gas sensor by plasma exposure studied by wireless quartz resonator

Zhou, Lianjie; Nakamura, Nobutomo; Nagakubo, Akira et al.

Japanese Journal of Applied Physics, 2020, 59, SKKB02

アクセス数:497件（2025-07-30 14:26 集計）

固定URL: https://hdl.handle.net/11094/85130

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タイトル	Enhancement of sensitivity of Pd-based hydrogen-gas sensor by plasma exposure studied by wireless quartz resonator
著者	著者名 Zhou, Lianjie
	NRID 1000050452404 1000050452404 researchmap permalink nnakamura nnakamura Scopus Author ID 7403356186 7403356186 ORCID 0000-0002-5338-842X 0000-0002-5338-842X 著者名 Nakamura, Nobutomo
	NRID 1000070751113 1000070751113 ORCID 0000-0001-7494-5099 0000-0001-7494-5099 researchmap permalink nagakubo nagakubo Scopus Author ID 55329400300 55329400300 著者名 Nagakubo, Akira
	NRID 1000090252626 1000090252626 researchmap permalink read0042771 read0042771 Scopus Author ID 35563683500 35563683500 著者名 Ogi, Hirotsugu
内容	This is the Accepted Manuscript version of an article accepted for publication in Japanese Journal of Applied Physics. IOP Publishing Ltd are not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at https://doi.org/10.35848/1347-4065/ab78e2.
抄録	Sensitivity of a hydrogen-gas sensor based on lattice expansion of palladium highly depends on the surface morphology of palladium. We find that the sensitivity can be significantly improved by exposing the as-deposited palladium film to low-power plasma. The hydrogen-gas detection was performed by a wireless-electrodeless AT-cut quartz-crystal resonator with 125 MHz fundamental resonance frequency. It detects hydrogen gas through bending deformation of the resonator caused by the volume expansion of palladium. The surface morphology of palladium film before and after the plasma treatment were analyzed using atomic force microscopy. The plasma treated palladium film exhibits a rougher surface, finer grains, voids, and grain boundary extension. Such morphology and structure changes along with defects induced by the ion bombardment during the plasma treatment strongly contribute to increase in hydrogen absorption rate and then the sensor sensitivity. We further investigate the thickness dependence of the sensitivity, revealing an optimum palladium film thickness of 300 nm.
出版者	The Japan Society of Applied Physics
収録物名	Japanese Journal of Applied Physics
巻(号)	59
ページ	SKKB02
刊行年月	2020-07
言語	英語
ハンドルURL	https://hdl.handle.net/11094/85130
PISSN	00214922
eISSN	13474065
NCID	AA12295836
関連情報 (isVersionOf)	DOI (出版社版) https://doi.org/10.35848/1347-4065/ab78e2
アクセス権	open access
権利情報	© 2020 The Japan Society of Applied Physics. This Accepted Manuscript is available for reuse under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License after the 12 month embargo period provided that all the terms of the license are adhered to.
出版タイプ	Accepted Manuscript
カテゴリ	学術雑誌論文 Journal Article

資源タイプ	学術雑誌論文
ローカル資源タイプ	学術雑誌論文
DCMI資源タイプ	text
DCTERMS.bibliographicCitation	Japanese Journal of Applied Physics. 2020, 59, p. SKKB02
DC.title	Enhancement of sensitivity of Pd-based hydrogen-gas sensor by plasma exposure studied by wireless quartz resonator
DC.creator	Zhou, Lianjie
	Nakamura, Nobutomo
	Nagakubo, Akira
	Ogi, Hirotsugu
DC.publisher	The Japan Society of Applied Physics
DC.language' scheme='DCTERMS.RFC1766	英語
DC.type' scheme='DCTERMS.DCMIType	text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2020-07
DC.identifier	https://doi.org/10.35848/1347-4065/ab78e2
DC.description	This is the Accepted Manuscript version of an article accepted for publication in Japanese Journal of Applied Physics. IOP Publishing Ltd are not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at https://doi.org/10.35848/1347-4065/ab78e2.
DCTERMS.abstract	Sensitivity of a hydrogen-gas sensor based on lattice expansion of palladium highly depends on the surface morphology of palladium. We find that the sensitivity can be significantly improved by exposing the as-deposited palladium film to low-power plasma. The hydrogen-gas detection was performed by a wireless-electrodeless AT-cut quartz-crystal resonator with 125 MHz fundamental resonance frequency. It detects hydrogen gas through bending deformation of the resonator caused by the volume expansion of palladium. The surface morphology of palladium film before and after the plasma treatment were analyzed using atomic force microscopy. The plasma treated palladium film exhibits a rougher surface, finer grains, voids, and grain boundary extension. Such morphology and structure changes along with defects induced by the ion bombardment during the plasma treatment strongly contribute to increase in hydrogen absorption rate and then the sensor sensitivity. We further investigate the thickness dependence of the sensitivity, revealing an optimum palladium film thickness of 300 nm.
DC.rights	© 2020 The Japan Society of Applied Physics. This Accepted Manuscript is available for reuse under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License after the 12 month embargo period provided that all the terms of the license are adhered to.
DC.format	85130
citation_title	Enhancement of sensitivity of Pd-based hydrogen-gas sensor by plasma exposure studied by wireless quartz resonator
citation_author	Zhou, Lianjie
	Nakamura, Nobutomo
	Nagakubo, Akira
	Ogi, Hirotsugu
citation_publisher	The Japan Society of Applied Physics
citation_language	英語
citation_date	2020-07
citation_journal_title	Japanese Journal of Applied Physics
citation_volume	59
citation_firstpage	SKKB02
citation_doi	https://doi.org/10.35848/1347-4065/ab78e2
citation_public_url	https://hdl.handle.net/11094/85130

Enhancement of sensitivity of Pd-based hydrogen-gas sensor by plasma exposure studied by wireless quartz resonator

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