学術雑誌論文

学術雑誌論文

text

Review of Scientific Instruments. 2015, 86(9), p. 093103

Development of ion beam figuring system with electrostatic deflection for ultraprecise X-ray reflective optics

American Institute of Physics

英語

text

2015-09

https://doi.org/10.1063/1.4929323

Jumpei Yamada, Satoshi Matsuyama, Yasuhisa Sano, and Kazuto Yamauchi, "Development of ion beam figuring system with electrostatic deflection for ultraprecise X-ray reflective optics", Review of Scientific Instruments 86, 093103 (2015) https://doi.org/10.1063/1.4929323.

We developed an ion beam figuring system that utilizes electrostatic deflection. The system can produce an arbitrary shape by deterministically scanning the ion beam. The scan of the ion beam, which can be precisely controlled using only an electrical signal, enables us to avoid degradation of the mirror shape caused by imperfect acceleration or deceleration of a mechanically scanning stage. Additionally, this surface figuring method can easily be combined with X-ray metrology because the workpiece remains fixed during the figuring. We evaluated the figuring accuracy of the system by fabricating a plano-elliptical mirror for X-ray focusing. A mirror with a shape error of 1.4 nm root mean square (RMS) with a maximum removal depth of 992 nm, which corresponds to figuring accuracy of 0.14% RMS, was achieved. After the second shape corrections, an elliptical shape with a shape error of approximately 1 nm peak-to-valley, 0.48 nm RMS could be fabricated. Then, the mirror surface was smoothed by a low-energy ion beam. Consequently, a micro-roughness of 0.117 nm RMS, measured by atomic force microscopy, was achieved over an area of 1 × 1 μm2.

This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in (citation of published article) and may be found at https://doi.org/10.1063/1.4929323.

86930

Development of ion beam figuring system with electrostatic deflection for ultraprecise X-ray reflective optics

American Institute of Physics

英語

2015-09

Review of Scientific Instruments

86

9

093103

https://doi.org/10.1063/1.4929323

https://hdl.handle.net/11094/86930