Development of mirror manipulator for hard-x-ray nanofocusing at sub-50-nm level

Matsuyama, S.; Mimura, H.; Yumoto, H.; Hara, H.; Yamamura, K.; Sano, Y.; Endo, K.; Mori, Y.; Yabashi, M.; Nishino, Y.; Tamasaku, K.; Ishikawa, T.; Yamauchi, K.

doi:https://doi.org/10.1063/1.2349594

Development of mirror manipulator for hard-x-ray nanofocusing at sub-50-nm level

Matsuyama, S.; Mimura, H.; Yumoto, H. et al.

Review of Scientific Instruments, 2006, 77(9), 093107

アクセス数:1,202件（2025-07-09 23:39 集計）

固定URL: https://hdl.handle.net/11094/86970

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タイトル	Development of mirror manipulator for hard-x-ray nanofocusing at sub-50-nm level
著者	NRID 1000010423196 1000010423196 著者名 Matsuyama, S.
	NRID 1000030362651 1000030362651 著者名 Mimura, H.
	NRID 1000020423197 1000020423197 著者名 Yumoto, H.
	著者名 Hara, H.
	NRID 1000060240074 1000060240074 researchmap permalink read0014013 read0014013 Scopus Author ID 7201754767 7201754767 著者名 Yamamura, K.
	NRID 1000040252598 1000040252598 ORCID 0000-0002-1767-922X 0000-0002-1767-922X researchmap permalink read0042804 read0042804 Scopus Author ID 7402344818 7402344818 著者名 Sano, Y.
	NRID 1000090152008 1000090152008 researchmap permalink endo5352 endo5352 Scopus Author ID 7402712908 7402712908 著者名 Endo, K.
	NRID 1000000029125 1000000029125 著者名 Mori, Y.
	NRID 1000000372144 1000000372144 著者名 Yabashi, M.
	NRID 1000040392063 1000040392063 著者名 Nishino, Y.
	NRID 1000030300883 1000030300883 著者名 Tamasaku, K.
	NRID 1000080159699 1000080159699 著者名 Ishikawa, T.
	NRID 1000010174575 1000010174575 researchmap permalink yamauchikazuto yamauchikazuto Scopus Author ID 7801509680 7801509680 著者名 Yamauchi, K.
内容	S. Matsuyama, H. Mimura, et al. "Development of mirror manipulator for hard-x-ray nanofocusing at sub-50-nm level", Review of Scientific Instruments 77(9), 093107 (2006) https://doi.org/10.1063/1.2349594
抄録	X-ray focusing using Kirkpatrick-Baez (KB) mirrors is promising owing to their capability of highly efficient and energy-tunable focusing. We report the development of a mirror manipulator which enables KB mirror alignment with a high degree of accuracy. Mirror alignment tolerances were estimated using two types of simulators. On the basis of the simulation results, the mirror manipulator was developed to achieve an optimum KB mirror setup. As a result of focusing tests at BL29XUL of SPring-8, the beam size of 48 × 36 nm 2 (V×H) was achieved in the full width at half maximum at an x-ray energy of 15 keV. Spatial resolution tests showed that a scanning x-ray microscope equipped with the KB focusing system could resolve line-and-space patterns of 80 nm linewidth in a high visibility of 60%. © 2006 American Institute of Physics.
出版者	American Institute of Physics
収録物名	Review of Scientific Instruments
巻(号)	77(9)
ページ	093107
刊行年月	2006-09-25
言語	英語
ハンドルURL	https://hdl.handle.net/11094/86970
PISSN	00346748
eISSN	10897623
NCID	AA00817730
NCID	AA12442307
関連情報 (isIdenticalTo)	DOI (出版社版) https://doi.org/10.1063/1.2349594
アクセス権	open access
権利情報	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Review of Scientific Instruments 77(9), 093107 (2006) and may be found at https://doi.org/10.1063/1.2349594.
出版タイプ	Version of Record
カテゴリ	学術雑誌論文 Journal Article

資源タイプ	学術雑誌論文
ローカル資源タイプ	学術雑誌論文
DCMI資源タイプ	text
DCTERMS.bibliographicCitation	Review of Scientific Instruments. 2006, 77(9), p. 093107
DC.title	Development of mirror manipulator for hard-x-ray nanofocusing at sub-50-nm level
DC.creator	Matsuyama, S.
	Mimura, H.
	Yumoto, H.
	Hara, H.
	Yamamura, K.
	Sano, Y.
	Endo, K.
	Mori, Y.
	Yabashi, M.
	Nishino, Y.
	Tamasaku, K.
	Ishikawa, T.
	Yamauchi, K.
DC.publisher	American Institute of Physics
DC.language' scheme='DCTERMS.RFC1766	英語
DC.type' scheme='DCTERMS.DCMIType	text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2006-09-25
DC.identifier	https://doi.org/10.1063/1.2349594
DC.description	S. Matsuyama, H. Mimura, et al. "Development of mirror manipulator for hard-x-ray nanofocusing at sub-50-nm level", Review of Scientific Instruments 77(9), 093107 (2006) https://doi.org/10.1063/1.2349594
DCTERMS.abstract	X-ray focusing using Kirkpatrick-Baez (KB) mirrors is promising owing to their capability of highly efficient and energy-tunable focusing. We report the development of a mirror manipulator which enables KB mirror alignment with a high degree of accuracy. Mirror alignment tolerances were estimated using two types of simulators. On the basis of the simulation results, the mirror manipulator was developed to achieve an optimum KB mirror setup. As a result of focusing tests at BL29XUL of SPring-8, the beam size of 48 × 36 nm 2 (V×H) was achieved in the full width at half maximum at an x-ray energy of 15 keV. Spatial resolution tests showed that a scanning x-ray microscope equipped with the KB focusing system could resolve line-and-space patterns of 80 nm linewidth in a high visibility of 60%. © 2006 American Institute of Physics.
DC.rights	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Review of Scientific Instruments 77(9), 093107 (2006) and may be found at https://doi.org/10.1063/1.2349594.
DC.format	86970
citation_title	Development of mirror manipulator for hard-x-ray nanofocusing at sub-50-nm level
citation_author	Matsuyama, S.
	Mimura, H.
	Yumoto, H.
	Hara, H.
	Yamamura, K.
	Sano, Y.
	Endo, K.
	Mori, Y.
	Yabashi, M.
	Nishino, Y.
	Tamasaku, K.
	Ishikawa, T.
	Yamauchi, K.
citation_publisher	American Institute of Physics
citation_language	英語
citation_date	2006-09-25
citation_journal_title	Review of Scientific Instruments
citation_volume	77
citation_issue	9
citation_firstpage	093107
citation_doi	https://doi.org/10.1063/1.2349594
citation_public_url	https://hdl.handle.net/11094/86970

Development of mirror manipulator for hard-x-ray nanofocusing at sub-50-nm level

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