Deterministic retrieval of surface waviness by means of topography with coherent X-rays

Souvorov, A.; Yabashi, M.; Tamasaku, K.; Ishikawa, T.; Mori, Y.; Yamauchi, K.; Yamamura, K.; Saito, A.

doi:https://doi.org/10.1107/S0909049502008804

アクセス数:204件（2025-01-21 01:44 集計）

固定URL: https://hdl.handle.net/11094/86986

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タイトル	Deterministic retrieval of surface waviness by means of topography with coherent X-rays
著者	著者名 Souvorov, A.
	NRID 1000000372144 1000000372144 著者名 Yabashi, M.
	NRID 1000030300883 1000030300883 著者名 Tamasaku, K.
	NRID 1000080159699 1000080159699 著者名 Ishikawa, T.
	NRID 1000000029125 1000000029125 著者名 Mori, Y.
	NRID 1000010174575 1000010174575 researchmap permalink yamauchikazuto yamauchikazuto Scopus Author ID 7801509680 7801509680 著者名 Yamauchi, K.
	NRID 1000060240074 1000060240074 researchmap permalink read0014013 read0014013 Scopus Author ID 7201754767 7201754767 著者名 Yamamura, K.
	著者名 Saito, A.
キーワード等	Coherent X-rays
	Surface profiles
	Topography
内容	Souvorov, A., Yabashi, M., Tamasaku, K., Ishikawa, T., Mori, Y., Yamauchi, K., Yamamura, K. & Saito, A. (2002). J. Synchrotron Rad. 9, 223-228.
抄録	A surface profile retrieval technique from multiple X-ray total reflection images taken at various distances with full coherent illumination is demonstrated. An experiment was performed using the 1 km-long BL29XU beamline at the SPring-8 facility, Japan. Obtained results are compared with results from the optical metrology technique (Fizeau's interferometer). Good agreement between X-ray and optical methods proves the validity of the current approach. Meanwhile, the sensitivity of the X-ray technique is several times higher than that of the standard one. This technique is well suited to the needs of characterizing grazing optics for new-generation X-ray sources.
出版者	International Union of Crystallography
収録物名	Journal of Synchrotron Radiation
巻(号)	9(4)
ページ	223-228
刊行年月	2002-07
言語	英語
ハンドルURL	https://hdl.handle.net/11094/86986
PISSN	09090495
NCID	AA11022317
NCID	AA1210096X
関連情報 (isVersionOf)	DOI (出版社版) https://doi.org/10.1107/S0909049502008804
関連情報 (isIdenticalTo)	PMID 12091730
アクセス権	open access
権利情報	Copyright International Union of Crystallography
出版タイプ	Accepted Manuscript
カテゴリ	学術雑誌論文 Journal Article

資源タイプ	学術雑誌論文
ローカル資源タイプ	学術雑誌論文
DCMI資源タイプ	text
DCTERMS.bibliographicCitation	Journal of Synchrotron Radiation. 2002, 9(4), p. 223-228
DC.title	Deterministic retrieval of surface waviness by means of topography with coherent X-rays
DC.creator	Souvorov, A.
	Yabashi, M.
	Tamasaku, K.
	Ishikawa, T.
	Mori, Y.
	Yamauchi, K.
	Yamamura, K.
	Saito, A.
DC.publisher	International Union of Crystallography
DC.language' scheme='DCTERMS.RFC1766	英語
DC.type' scheme='DCTERMS.DCMIType	text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2002-07
DC.identifier	https://doi.org/10.1107/S0909049502008804
DC.subject	Coherent X-rays
	Surface profiles
	Topography
DC.description	Souvorov, A., Yabashi, M., Tamasaku, K., Ishikawa, T., Mori, Y., Yamauchi, K., Yamamura, K. & Saito, A. (2002). J. Synchrotron Rad. 9, 223-228.
DCTERMS.abstract	A surface profile retrieval technique from multiple X-ray total reflection images taken at various distances with full coherent illumination is demonstrated. An experiment was performed using the 1 km-long BL29XU beamline at the SPring-8 facility, Japan. Obtained results are compared with results from the optical metrology technique (Fizeau's interferometer). Good agreement between X-ray and optical methods proves the validity of the current approach. Meanwhile, the sensitivity of the X-ray technique is several times higher than that of the standard one. This technique is well suited to the needs of characterizing grazing optics for new-generation X-ray sources.
DC.rights	Copyright International Union of Crystallography
DC.format	86986
citation_title	Deterministic retrieval of surface waviness by means of topography with coherent X-rays
citation_author	Souvorov, A.
	Yabashi, M.
	Tamasaku, K.
	Ishikawa, T.
	Mori, Y.
	Yamauchi, K.
	Yamamura, K.
	Saito, A.
citation_publisher	International Union of Crystallography
citation_language	英語
citation_date	2002-07
citation_journal_title	Journal of Synchrotron Radiation
citation_volume	9
citation_issue	4
citation_firstpage	223
citation_lastpage	228
citation_doi	https://doi.org/10.1107/S0909049502008804
citation_pmid	12091730
citation_public_url	https://hdl.handle.net/11094/86986

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