Figuring and smoothing capabilities of elastic emission machining for low-thermal-expansion glass optics

Kanaoka, M.; Liu, C.; Nomura, K.; Ando, M.; Takino, H.; Fukuda, Y.; Mimura, H.; Yamauchi, K.; Mori, Y.

doi:https://doi.org/10.1116/1.2789440

Figuring and smoothing capabilities of elastic emission machining for low-thermal-expansion glass optics

Kanaoka, M.; Liu, C.; Nomura, K. et al.

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 2007, 25(6), 2110-2113

アクセス数:174件（2025-03-15 12:46 集計）

固定URL: https://hdl.handle.net/11094/86987

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タイトル	Figuring and smoothing capabilities of elastic emission machining for low-thermal-expansion glass optics
著者	著者名 Kanaoka, M.
	著者名 Liu, C.
	著者名 Nomura, K.
	著者名 Ando, M.
	著者名 Takino, H.
	著者名 Fukuda, Y.
	NRID 1000030362651 1000030362651 著者名 Mimura, H.
	NRID 1000010174575 1000010174575 researchmap permalink yamauchikazuto yamauchikazuto Scopus Author ID 7801509680 7801509680 著者名 Yamauchi, K.
	NRID 1000000029125 1000000029125 著者名 Mori, Y.
内容	M. Kanaoka et al. "Figuring and smoothing capabilities of elastic emission machining for low-thermal-expansion glass optics", Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 25, 2110-2113 (2007) https://doi.org/10.1116/1.2789440.
抄録	The use of elastic emission machining (EEM) for fabricating optics from low-thermal-expansion glass for extreme ultraviolet (EUV) lithography is examined. EUV optics require figure accuracy and surface roughness of 0.1 nm root mean square (rms) or better. EEM using a rotating-sphere head is demonstrated to achieve this level of surface smoothness after a certain depth of removal dependent on the material being processed. In tests of continuous machining for 12 h, no increase in surface roughness is observed, demonstrating the high temporal stability of this noncontact processing method. EEM using a rotating-sphere head is thus confirmed to have sufficient figuring and smoothing capability for the fabrication of EUV optics. © 2007 American Vacuum Society.
出版者	American Institute of Physics
収録物名	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
巻(号)	25(6)
ページ	2110-2113
刊行年月	2007-12-07
言語	英語
ハンドルURL	https://hdl.handle.net/11094/86987
PISSN	10711023
NCID	AA10804928
関連情報 (isIdenticalTo)	DOI (出版社版) https://doi.org/10.1116/1.2789440
アクセス権	open access
権利情報	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 25, 2110-2113 (2007) and may be found at https://doi.org/10.1116/1.2789440.
出版タイプ	Version of Record
カテゴリ	学術雑誌論文 Journal Article

資源タイプ	学術雑誌論文
ローカル資源タイプ	学術雑誌論文
DCMI資源タイプ	text
DCTERMS.bibliographicCitation	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2007, 25(6), p. 2110-2113
DC.title	Figuring and smoothing capabilities of elastic emission machining for low-thermal-expansion glass optics
DC.creator	Kanaoka, M.
	Liu, C.
	Nomura, K.
	Ando, M.
	Takino, H.
	Fukuda, Y.
	Mimura, H.
	Yamauchi, K.
	Mori, Y.
DC.publisher	American Institute of Physics
DC.language' scheme='DCTERMS.RFC1766	英語
DC.type' scheme='DCTERMS.DCMIType	text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2007-12-07
DC.identifier	https://doi.org/10.1116/1.2789440
DC.description	M. Kanaoka et al. "Figuring and smoothing capabilities of elastic emission machining for low-thermal-expansion glass optics", Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 25, 2110-2113 (2007) https://doi.org/10.1116/1.2789440.
DCTERMS.abstract	The use of elastic emission machining (EEM) for fabricating optics from low-thermal-expansion glass for extreme ultraviolet (EUV) lithography is examined. EUV optics require figure accuracy and surface roughness of 0.1 nm root mean square (rms) or better. EEM using a rotating-sphere head is demonstrated to achieve this level of surface smoothness after a certain depth of removal dependent on the material being processed. In tests of continuous machining for 12 h, no increase in surface roughness is observed, demonstrating the high temporal stability of this noncontact processing method. EEM using a rotating-sphere head is thus confirmed to have sufficient figuring and smoothing capability for the fabrication of EUV optics. © 2007 American Vacuum Society.
DC.rights	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 25, 2110-2113 (2007) and may be found at https://doi.org/10.1116/1.2789440.
DC.format	86987
citation_title	Figuring and smoothing capabilities of elastic emission machining for low-thermal-expansion glass optics
citation_author	Kanaoka, M.
	Liu, C.
	Nomura, K.
	Ando, M.
	Takino, H.
	Fukuda, Y.
	Mimura, H.
	Yamauchi, K.
	Mori, Y.
citation_publisher	American Institute of Physics
citation_language	英語
citation_date	2007-12-07
citation_journal_title	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
citation_volume	25
citation_issue	6
citation_firstpage	2110
citation_lastpage	2113
citation_doi	https://doi.org/10.1116/1.2789440
citation_public_url	https://hdl.handle.net/11094/86987

Figuring and smoothing capabilities of elastic emission machining for low-thermal-expansion glass optics

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