Results of x-ray mirror round-robin metrology measurements at the APS, ESRF, and SPring-8 optical metrology laboratories

Assoufid, Lahsen; Rommeveaux, Amparo; Ohashi, Haruhiko; Yamauchi, Kazuto; Mimura, Hidekazu; Qian, Jun; Hignette, Olivier; Ishikawa, Tetsuya; Morawe, Christian; Macrander, Albert; Khounsary, Ali; Goto, Shunji

doi:https://doi.org/10.1117/12.623209

Results of x-ray mirror round-robin metrology measurements at the APS, ESRF, and SPring-8 optical metrology laboratories

Assoufid, Lahsen; Rommeveaux, Amparo; Ohashi, Haruhiko et al.

Proceedings of SPIE - The International Society for Optical Engineering, 2005, 5921, 59210J

アクセス数:746件（2025-10-11 10:39 集計）

固定URL: https://hdl.handle.net/11094/86989

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タイトル	Results of x-ray mirror round-robin metrology measurements at the APS, ESRF, and SPring-8 optical metrology laboratories
著者	著者名 Assoufid, Lahsen
	著者名 Rommeveaux, Amparo
	NRID 1000030443550 1000030443550 著者名 Ohashi, Haruhiko
	NRID 1000010174575 1000010174575 researchmap permalink yamauchikazuto yamauchikazuto Scopus Author ID 7801509680 7801509680 著者名 Yamauchi, Kazuto
	NRID 1000030362651 1000030362651 著者名 Mimura, Hidekazu
	著者名 Qian, Jun
	著者名 Hignette, Olivier
	NRID 1000080159699 1000080159699 著者名 Ishikawa, Tetsuya
	著者名 Morawe, Christian
	著者名 Macrander, Albert
	著者名 Khounsary, Ali
	著者名 Goto, Shunji
キーワード等	Long trace profiler
	Round robin
	Surface metrology
	Synchrotron radiation
	X-ray mirrors
内容	Lahsen Assoufid, Amparo Rommeveaux, Haruhiko Ohashi, Kazuto Yamauchi, Hidekazu Mimura, Jun Qian, Olivier Hignette, Tetsuya Ishikawa, Christian Morawe, Albert Macrander, Ali Khounsary, and Shunji Goto "Results of x-ray mirror round-robin metrology measurements at the APS, ESRF, and SPring-8 optical metrology laboratories", Proc. SPIE 5921, Advances in Metrology for X-Ray and EUV Optics, 59210J (16 September 2005); https://doi.org/10.1117/12.623209.
内容	Optics and Photonics 2005, 2005, San Diego, California, United States
抄録	This paper presents the first series of round-robin metrology measurements of x-ray mirrors organized at the Advanced Photon Source (APS) in the USA, the European Synchrotron Radiation Facility in France, and the Super Photon Ring (SPring-8) (in a collaboration with Osaka University,) in Japan. This work is part of the three institutions' three-way agreement to promote a direct exchange of research information and experience amongst their specialists. The purpose of the metrology round robin is to compare the performance and limitations of the instrumentation used at the optical metrology laboratories of these facilities and to set the basis for establishing guidelines and procedures to accurately perform the measurements. The optics used in the measurements were selected to reflect typical, as well as state of the art, in mirror fabrication. The first series of the round robin measurements focuses on flat and cylindrical mirrors with varying sizes and quality. Three mirrors (two flats and one cylinder) were successively measured using long trace profilers. Although the three facilities' LTPs are of different design, the measurements were found to be in excellent agreement. The maximum discrepancy of the rms slope error values is 0.1 μrad, that of the rms shape error was 3 nm, and they all relate to the measurement of the cylindrical mirror. The next round-robin measurements will deal with elliptical and spherical optics.
出版者	Society of Photo-Optical Instrumentation Engineers (SPIE)
収録物名	Proceedings of SPIE - The International Society for Optical Engineering
巻(号)	5921
ページ	59210J
刊行年月	2005-09-16
言語	英語
ハンドルURL	https://hdl.handle.net/11094/86989
PISSN	0277786X
NCID	AA10619755
関連情報 (isIdenticalTo)	DOI (出版社版) https://doi.org/10.1117/12.623209
アクセス権	open access
権利情報	Copyright 2005 Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
出版タイプ	Version of Record
カテゴリ	会議発表論文 Conference Paper

資源タイプ	会議発表論文
ローカル資源タイプ	会議発表論文
DCMI資源タイプ	text
DCTERMS.bibliographicCitation	Proceedings of SPIE - The International Society for Optical Engineering. 2005, 5921, p. 59210J
DC.title	Results of x-ray mirror round-robin metrology measurements at the APS, ESRF, and SPring-8 optical metrology laboratories
DC.creator	Assoufid, Lahsen
	Rommeveaux, Amparo
	Ohashi, Haruhiko
	Yamauchi, Kazuto
	Mimura, Hidekazu
	Qian, Jun
	Hignette, Olivier
	Ishikawa, Tetsuya
	Morawe, Christian
	Macrander, Albert
	Khounsary, Ali
	Goto, Shunji
DC.publisher	Society of Photo-Optical Instrumentation Engineers (SPIE)
DC.language' scheme='DCTERMS.RFC1766	英語
DC.type' scheme='DCTERMS.DCMIType	text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2005-09-16
DC.identifier	https://doi.org/10.1117/12.623209
DC.subject	Long trace profiler
	Round robin
	Surface metrology
	Synchrotron radiation
	X-ray mirrors
DC.description	Lahsen Assoufid, Amparo Rommeveaux, Haruhiko Ohashi, Kazuto Yamauchi, Hidekazu Mimura, Jun Qian, Olivier Hignette, Tetsuya Ishikawa, Christian Morawe, Albert Macrander, Ali Khounsary, and Shunji Goto "Results of x-ray mirror round-robin metrology measurements at the APS, ESRF, and SPring-8 optical metrology laboratories", Proc. SPIE 5921, Advances in Metrology for X-Ray and EUV Optics, 59210J (16 September 2005); https://doi.org/10.1117/12.623209.
DC.description	Optics and Photonics 2005, 2005, San Diego, California, United States
DCTERMS.abstract	This paper presents the first series of round-robin metrology measurements of x-ray mirrors organized at the Advanced Photon Source (APS) in the USA, the European Synchrotron Radiation Facility in France, and the Super Photon Ring (SPring-8) (in a collaboration with Osaka University,) in Japan. This work is part of the three institutions' three-way agreement to promote a direct exchange of research information and experience amongst their specialists. The purpose of the metrology round robin is to compare the performance and limitations of the instrumentation used at the optical metrology laboratories of these facilities and to set the basis for establishing guidelines and procedures to accurately perform the measurements. The optics used in the measurements were selected to reflect typical, as well as state of the art, in mirror fabrication. The first series of the round robin measurements focuses on flat and cylindrical mirrors with varying sizes and quality. Three mirrors (two flats and one cylinder) were successively measured using long trace profilers. Although the three facilities' LTPs are of different design, the measurements were found to be in excellent agreement. The maximum discrepancy of the rms slope error values is 0.1 μrad, that of the rms shape error was 3 nm, and they all relate to the measurement of the cylindrical mirror. The next round-robin measurements will deal with elliptical and spherical optics.
DC.rights	Copyright 2005 Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
DC.format	86989
citation_title	Results of x-ray mirror round-robin metrology measurements at the APS, ESRF, and SPring-8 optical metrology laboratories
citation_author	Assoufid, Lahsen
	Rommeveaux, Amparo
	Ohashi, Haruhiko
	Yamauchi, Kazuto
	Mimura, Hidekazu
	Qian, Jun
	Hignette, Olivier
	Ishikawa, Tetsuya
	Morawe, Christian
	Macrander, Albert
	Khounsary, Ali
	Goto, Shunji
citation_publisher	Society of Photo-Optical Instrumentation Engineers (SPIE)
citation_language	英語
citation_date	2005-09-16
citation_journal_title	Proceedings of SPIE - The International Society for Optical Engineering
citation_volume	5921
citation_firstpage	59210J
citation_doi	https://doi.org/10.1117/12.623209
citation_public_url	https://hdl.handle.net/11094/86989

Results of x-ray mirror round-robin metrology measurements at the APS, ESRF, and SPring-8 optical metrology laboratories

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