Development of a one-dimensional Wolter mirror for achromatic full-field X-ray microscopy

Matsuyama, S.; Kidani, N.; Mimura, H.; Kim, J.; Sano, Y.; Tamasaku, K.; Kohmura, Y.; Yabashi, M.; Ishikawa, T.; Yamauchi, K.

doi:https://doi.org/10.1117/12.892987

Development of a one-dimensional Wolter mirror for achromatic full-field X-ray microscopy

Matsuyama, S.; Kidani, N.; Mimura, H. et al.

Proceedings of SPIE - The International Society for Optical Engineering, 2011, 8139, 813905

アクセス数:942件（2025-07-04 21:16 集計）

固定URL: https://hdl.handle.net/11094/86991

閲覧可能ファイル

ファイル	フォーマット	利用条件	サイズ	閲覧回数	利用開始日	説明	information
ProcSPIEIntSocOptEng_8139_813905	pdf	なし	1.40 MB	120	2022.03.29

論文情報

ファイル出力 EndNote Basic出力 Mendeley出力

タイトル	Development of a one-dimensional Wolter mirror for achromatic full-field X-ray microscopy
著者	NRID 1000010423196 1000010423196 著者名 Matsuyama, S.
	著者名 Kidani, N.
	NRID 1000030362651 1000030362651 著者名 Mimura, H.
	著者名 Kim, J.
	NRID 1000040252598 1000040252598 ORCID 0000-0002-1767-922X 0000-0002-1767-922X researchmap permalink read0042804 read0042804 Scopus Author ID 7402344818 7402344818 著者名 Sano, Y.
	NRID 1000030300883 1000030300883 著者名 Tamasaku, K.
	NRID 1000030270599 1000030270599 著者名 Kohmura, Y.
	NRID 1000000372144 1000000372144 著者名 Yabashi, M.
	NRID 1000080159699 1000080159699 著者名 Ishikawa, T.
	NRID 1000010174575 1000010174575 researchmap permalink yamauchikazuto yamauchikazuto Scopus Author ID 7801509680 7801509680 著者名 Yamauchi, K.
キーワード等	Advanced Kirkpatrick-Baez mirrors
	Full-field X-ray microscopy
	Wolter mirror
	X-ray mirror
内容	S. Matsuyama, N. Kidani, H. Mimura, J. Kim, Y. Sano, K. Tamasaku, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi "Development of a one-dimensional Wolter mirror for achromatic full-field x-ray microscopy", Proc. SPIE 8139, Advances in X-Ray/EUV Optics and Components VI, 813905 (28 September 2011); https://doi.org/10.1117/12.892987.
内容	SPIE Optical Engineering + Applications, 2011, San Diego, California, United States
抄録	We investigated a one-dimensional Wolter mirror (which consists of an elliptical mirror and a hyperbolic mirror) with the aim of developing an achromatic full-field X-ray microscope with a resolution of better than 50 nm. X-ray mirrors were ultraprecisely fabricated by elastic emission machining to give a figure accuracy of 2 nm (peak-to-valley). A one-dimensional Wolter mirror that had been precisely constructed was evaluated in terms of the point-spread function at the center of the field of view (FOV) and the FOV at an X-ray energy of 11.5 keV at BL29XUL of SPring-8. It was found to have a minimum resolution of 43 nm and a FOV equivalent to 12.1 μm. These results are highly consistent with calculation results. © 2011 SPIE.
出版者	Society of Photo-Optical Instrumentation Engineers (SPIE)
収録物名	Proceedings of SPIE - The International Society for Optical Engineering
巻(号)	8139
ページ	813905
刊行年月	2011-09-28
言語	英語
ハンドルURL	https://hdl.handle.net/11094/86991
PISSN	0277786X
NCID	AA10619755
関連情報 (isIdenticalTo)	DOI (出版社版) https://doi.org/10.1117/12.892987
アクセス権	open access
権利情報	Copyright 2011 Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
出版タイプ	Version of Record
カテゴリ	会議発表論文 Conference Paper

資源タイプ	会議発表論文
ローカル資源タイプ	会議発表論文
DCMI資源タイプ	text
DCTERMS.bibliographicCitation	Proceedings of SPIE - The International Society for Optical Engineering. 2011, 8139, p. 813905
DC.title	Development of a one-dimensional Wolter mirror for achromatic full-field X-ray microscopy
DC.creator	Matsuyama, S.
	Kidani, N.
	Mimura, H.
	Kim, J.
	Sano, Y.
	Tamasaku, K.
	Kohmura, Y.
	Yabashi, M.
	Ishikawa, T.
	Yamauchi, K.
DC.publisher	Society of Photo-Optical Instrumentation Engineers (SPIE)
DC.language' scheme='DCTERMS.RFC1766	英語
DC.type' scheme='DCTERMS.DCMIType	text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2011-09-28
DC.identifier	https://doi.org/10.1117/12.892987
DC.subject	Advanced Kirkpatrick-Baez mirrors
	Full-field X-ray microscopy
	Wolter mirror
	X-ray mirror
DC.description	S. Matsuyama, N. Kidani, H. Mimura, J. Kim, Y. Sano, K. Tamasaku, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi "Development of a one-dimensional Wolter mirror for achromatic full-field x-ray microscopy", Proc. SPIE 8139, Advances in X-Ray/EUV Optics and Components VI, 813905 (28 September 2011); https://doi.org/10.1117/12.892987.
DC.description	SPIE Optical Engineering + Applications, 2011, San Diego, California, United States
DCTERMS.abstract	We investigated a one-dimensional Wolter mirror (which consists of an elliptical mirror and a hyperbolic mirror) with the aim of developing an achromatic full-field X-ray microscope with a resolution of better than 50 nm. X-ray mirrors were ultraprecisely fabricated by elastic emission machining to give a figure accuracy of 2 nm (peak-to-valley). A one-dimensional Wolter mirror that had been precisely constructed was evaluated in terms of the point-spread function at the center of the field of view (FOV) and the FOV at an X-ray energy of 11.5 keV at BL29XUL of SPring-8. It was found to have a minimum resolution of 43 nm and a FOV equivalent to 12.1 μm. These results are highly consistent with calculation results. © 2011 SPIE.
DC.rights	Copyright 2011 Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
DC.format	86991
citation_title	Development of a one-dimensional Wolter mirror for achromatic full-field X-ray microscopy
citation_author	Matsuyama, S.
	Kidani, N.
	Mimura, H.
	Kim, J.
	Sano, Y.
	Tamasaku, K.
	Kohmura, Y.
	Yabashi, M.
	Ishikawa, T.
	Yamauchi, K.
citation_publisher	Society of Photo-Optical Instrumentation Engineers (SPIE)
citation_language	英語
citation_date	2011-09-28
citation_journal_title	Proceedings of SPIE - The International Society for Optical Engineering
citation_volume	8139
citation_firstpage	813905
citation_doi	https://doi.org/10.1117/12.892987
citation_public_url	https://hdl.handle.net/11094/86991

Development of a one-dimensional Wolter mirror for achromatic full-field X-ray microscopy

閲覧可能ファイル

論文情報

論文詳細を表示