At-wavelength figure metrology of hard x-ray focusing mirrors

Yumoto, Hirokatsu; Mimura, Hidekazu; Matsuyama, Satoshi; Handa, Soichiro; Sano, Yasuhisa; Yabashi, Makina; Nishino, Yoshinori; Tamasaku, Kenji; Ishikawa, Tetsuya; Yamauchi, Kazuto

doi:https://doi.org/10.1063/1.2216870

At-wavelength figure metrology of hard x-ray focusing mirrors

Yumoto, Hirokatsu; Mimura, Hidekazu; Matsuyama, Satoshi et al.

Review of Scientific Instruments, 2006, 77(6), 063712

アクセス数:838件（2025-07-23 11:39 集計）

固定URL: https://hdl.handle.net/11094/87560

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タイトル	At-wavelength figure metrology of hard x-ray focusing mirrors
著者	NRID 1000020423197 1000020423197 著者名 Yumoto, Hirokatsu
	NRID 1000030362651 1000030362651 著者名 Mimura, Hidekazu
	NRID 1000010423196 1000010423196 著者名 Matsuyama, Satoshi
	著者名 Handa, Soichiro
	NRID 1000040252598 1000040252598 ORCID 0000-0002-1767-922X 0000-0002-1767-922X researchmap permalink read0042804 read0042804 Scopus Author ID 7402344818 7402344818 著者名 Sano, Yasuhisa
	NRID 1000000372144 1000000372144 著者名 Yabashi, Makina
	NRID 1000040392063 1000040392063 著者名 Nishino, Yoshinori
	NRID 1000030300883 1000030300883 著者名 Tamasaku, Kenji
	NRID 1000080159699 1000080159699 著者名 Ishikawa, Tetsuya
	NRID 1000010174575 1000010174575 researchmap permalink yamauchikazuto yamauchikazuto Scopus Author ID 7801509680 7801509680 著者名 Yamauchi, Kazuto
内容	Yumoto H., Mimura H., Matsuyama S., et al. At-wavelength figure metrology of hard x-ray focusing mirrors. Review of Scientific Instruments, 77, 6, 063712 (2006) https://doi.org/10.1063/1.2216870
抄録	We have developed an at-wavelength wave-front metrology of a grazing-incidence focusing optical systems in the hard x-ray region. The metrology is based on numerical retrieval from the intensity profile around the focal point. We demonstrated the at-wavelength metrology and estimated the surface figure error on a test mirror. An experiment for measuring the focusing intensity profile was performed at the 1-km-long beamline (BL29XUL) of SPring-8. The obtained results were compared with the profile measured using an optical interferometer and were confirmed to be in good agreement with it. This technique is a potential method of characterizing wave-front aberrations on elliptical mirrors for sub-10-nm focusing. © 2006 American Institute of Physics.
出版者	AIP Publishing
収録物名	Review of Scientific Instruments
巻(号)	77(6)
ページ	063712
刊行年月	2006-06-30
言語	英語
ハンドルURL	https://hdl.handle.net/11094/87560
PISSN	00346748
NCID	AA00817730
NCID	AA12442307
関連情報 (isIdenticalTo)	DOI (出版社版) https://doi.org/10.1063/1.2216870
アクセス権	open access
権利情報	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Yumoto H., Mimura H., Matsuyama S., et al. At-wavelength figure metrology of hard x-ray focusing mirrors. Review of Scientific Instruments, 77, 6, 063712 (2006) and may be found at https://doi.org/10.1063/1.2216870.
出版タイプ	Version of Record
カテゴリ	学術雑誌論文 Journal Article

資源タイプ	学術雑誌論文
ローカル資源タイプ	学術雑誌論文
DCMI資源タイプ	text
DCTERMS.bibliographicCitation	Review of Scientific Instruments. 2006, 77(6), p. 063712
DC.title	At-wavelength figure metrology of hard x-ray focusing mirrors
DC.creator	Yumoto, Hirokatsu
	Mimura, Hidekazu
	Matsuyama, Satoshi
	Handa, Soichiro
	Sano, Yasuhisa
	Yabashi, Makina
	Nishino, Yoshinori
	Tamasaku, Kenji
	Ishikawa, Tetsuya
	Yamauchi, Kazuto
DC.publisher	AIP Publishing
DC.language' scheme='DCTERMS.RFC1766	英語
DC.type' scheme='DCTERMS.DCMIType	text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2006-06-30
DC.identifier	https://doi.org/10.1063/1.2216870
DC.description	Yumoto H., Mimura H., Matsuyama S., et al. At-wavelength figure metrology of hard x-ray focusing mirrors. Review of Scientific Instruments, 77, 6, 063712 (2006) https://doi.org/10.1063/1.2216870
DCTERMS.abstract	We have developed an at-wavelength wave-front metrology of a grazing-incidence focusing optical systems in the hard x-ray region. The metrology is based on numerical retrieval from the intensity profile around the focal point. We demonstrated the at-wavelength metrology and estimated the surface figure error on a test mirror. An experiment for measuring the focusing intensity profile was performed at the 1-km-long beamline (BL29XUL) of SPring-8. The obtained results were compared with the profile measured using an optical interferometer and were confirmed to be in good agreement with it. This technique is a potential method of characterizing wave-front aberrations on elliptical mirrors for sub-10-nm focusing. © 2006 American Institute of Physics.
DC.rights	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Yumoto H., Mimura H., Matsuyama S., et al. At-wavelength figure metrology of hard x-ray focusing mirrors. Review of Scientific Instruments, 77, 6, 063712 (2006) and may be found at https://doi.org/10.1063/1.2216870.
DC.format	87560
citation_title	At-wavelength figure metrology of hard x-ray focusing mirrors
citation_author	Yumoto, Hirokatsu
	Mimura, Hidekazu
	Matsuyama, Satoshi
	Handa, Soichiro
	Sano, Yasuhisa
	Yabashi, Makina
	Nishino, Yoshinori
	Tamasaku, Kenji
	Ishikawa, Tetsuya
	Yamauchi, Kazuto
citation_publisher	AIP Publishing
citation_language	英語
citation_date	2006-06-30
citation_journal_title	Review of Scientific Instruments
citation_volume	77
citation_issue	6
citation_firstpage	063712
citation_doi	https://doi.org/10.1063/1.2216870
citation_public_url	https://hdl.handle.net/11094/87560

At-wavelength figure metrology of hard x-ray focusing mirrors

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