Machine learning-based prediction of the electron energy distribution function and electron density of argon plasma from the optical emission spectra

Arellano, Fatima Jenina; Kusaba, Minoru; Wu, Stephen; Yoshida, Ryo; Donkó, Zoltán; Hartmann, Peter; Tsankov, Tsanko V.; Hamaguchi, Satoshi

doi:https://doi.org/10.1116/6.0003731

Machine learning-based prediction of the electron energy distribution function and electron density of argon plasma from the optical emission spectra

Arellano, Fatima Jenina; Kusaba, Minoru; Wu, Stephen et al.

Journal of Vacuum Science and Technology A, 2024, 42(5), 053001

アクセス数:422件（2026-02-17 22:26 集計）

固定URL: https://hdl.handle.net/11094/97738

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タイトル	Machine learning-based prediction of the electron energy distribution function and electron density of argon plasma from the optical emission spectra
著者	著者名 Arellano, Fatima Jenina
	NRID 1000050965803 1000050965803 著者名 Kusaba, Minoru
	NRID 1000070804186 1000070804186 著者名 Wu, Stephen
	NRID 1000070401263 1000070401263 著者名 Yoshida, Ryo
	著者名 Donkó, Zoltán
	著者名 Hartmann, Peter
	著者名 Tsankov, Tsanko V.
	NRID 1000060301826 1000060301826 ORCID 0000-0001-6580-8797 0000-0001-6580-8797 researchmap permalink satoshi_hamaguchi satoshi_hamaguchi Scopus Author ID 55220082400 55220082400 著者名 Hamaguchi, Satoshi
内容	Arellano F.J., Kusaba M., Wu S., et al. Journal of Vacuum Science and Technology A 42, 053001 (2024) https://doi.org/10.1116/6.0003731.
抄録	Optical emission spectroscopy (OES) is a highly valuable tool for plasma characterization due to its nonintrusive and versatile nature. The intensities of the emission lines contain information about the parameters of the underlying plasma-electron density n e and temperature or, more generally, the electron energy distribution function (EEDF). This study aims to obtain the EEDF and n e from the OES data of argon plasma with machine learning (ML) techniques. Two different models, i.e., the Kernel Regression for Functional Data (KRFD) and an artificial neural network (ANN), are used to predict the normalized EEDF and Random Forest (RF) regression is used to predict n e . The ML models are trained with computed plasma data obtained from Particle-in-Cell/Monte Carlo Collision simulations coupled with a collisional-radiative model. All three ML models developed in this study are found to predict with high accuracy what they are trained to predict when the simulated test OES data are used as the input data. When the experimentally measured OES data are used as the input data, the ANN-based model predicts the normalized EEDF with reasonable accuracy under the discharge conditions where the simulation data are known to agree well with the corresponding experimental data. However, the capabilities of the KRFD and RF models to predict the EEDF and n e from experimental OES data are found to be rather limited, reflecting the need for further improvement of the robustness of these models.
出版者	AVS Science and Technology Society
収録物名	Journal of Vacuum Science and Technology A
巻(号)	42(5)
ページ	053001
刊行年月	2024-07-11
言語	英語
ハンドルURL	https://hdl.handle.net/11094/97738
PISSN	07342101
eISSN	15208559
関連情報 (isIdenticalTo)	DOI (出版社版) https://doi.org/10.1116/6.0003731
アクセス権	open access
権利情報	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Arellano F.J., Kusaba M., Wu S., et al. Machine learning-based prediction of the electron energy distribution function and electron density of argon plasma from the optical emission spectra. Journal of Vacuum Science and Technology A 42, 053001 (2024) and may be found at https://doi.org/10.1116/6.0003731.
出版タイプ	Version of Record
カテゴリ	学術雑誌論文 Journal Article

資源タイプ	学術雑誌論文
ローカル資源タイプ	学術雑誌論文
DCTERMS.bibliographicCitation	Journal of Vacuum Science and Technology A. 2024, 42(5), p. 053001
DC.title	Machine learning-based prediction of the electron energy distribution function and electron density of argon plasma from the optical emission spectra
DC.creator	Arellano, Fatima Jenina
	Kusaba, Minoru
	Wu, Stephen
	Yoshida, Ryo
	Donkó, Zoltán
	Hartmann, Peter
	Tsankov, Tsanko V.
	Hamaguchi, Satoshi
DC.publisher	AVS Science and Technology Society
DC.language' scheme='DCTERMS.RFC1766	英語
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2024-07-11
DC.identifier	https://doi.org/10.1116/6.0003731
DC.description	Arellano F.J., Kusaba M., Wu S., et al. Journal of Vacuum Science and Technology A 42, 053001 (2024) https://doi.org/10.1116/6.0003731.
DCTERMS.abstract	Optical emission spectroscopy (OES) is a highly valuable tool for plasma characterization due to its nonintrusive and versatile nature. The intensities of the emission lines contain information about the parameters of the underlying plasma-electron density n e and temperature or, more generally, the electron energy distribution function (EEDF). This study aims to obtain the EEDF and n e from the OES data of argon plasma with machine learning (ML) techniques. Two different models, i.e., the Kernel Regression for Functional Data (KRFD) and an artificial neural network (ANN), are used to predict the normalized EEDF and Random Forest (RF) regression is used to predict n e . The ML models are trained with computed plasma data obtained from Particle-in-Cell/Monte Carlo Collision simulations coupled with a collisional-radiative model. All three ML models developed in this study are found to predict with high accuracy what they are trained to predict when the simulated test OES data are used as the input data. When the experimentally measured OES data are used as the input data, the ANN-based model predicts the normalized EEDF with reasonable accuracy under the discharge conditions where the simulation data are known to agree well with the corresponding experimental data. However, the capabilities of the KRFD and RF models to predict the EEDF and n e from experimental OES data are found to be rather limited, reflecting the need for further improvement of the robustness of these models.
DC.rights	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Arellano F.J., Kusaba M., Wu S., et al. Machine learning-based prediction of the electron energy distribution function and electron density of argon plasma from the optical emission spectra. Journal of Vacuum Science and Technology A 42, 053001 (2024) and may be found at https://doi.org/10.1116/6.0003731.
DC.format	97738
citation_title	Machine learning-based prediction of the electron energy distribution function and electron density of argon plasma from the optical emission spectra
citation_author	Arellano, Fatima Jenina
	Kusaba, Minoru
	Wu, Stephen
	Yoshida, Ryo
	Donkó, Zoltán
	Hartmann, Peter
	Tsankov, Tsanko V.
	Hamaguchi, Satoshi
citation_publisher	AVS Science and Technology Society
citation_language	英語
citation_date	2024-07-11
citation_journal_title	Journal of Vacuum Science and Technology A
citation_volume	42
citation_issue	5
citation_firstpage	053001
citation_doi	https://doi.org/10.1116/6.0003731
citation_public_url	https://hdl.handle.net/11094/97738

Machine learning-based prediction of the electron energy distribution function and electron density of argon plasma from the optical emission spectra

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