Characterization of Ultrathin Conductive Films Using a Simplified Approach for Terahertz Time-Domain Spectroscopic Ellipsometry

Nagai, Masaya; Watanabe, Sou; Imamura, Ryosuke et al.

Journal of Infrared, Millimeter, and Terahertz Waves, 2024, 45(11-12), 949-966

アクセス数:875件（2025-07-13 00:59 集計）

固定URL: https://hdl.handle.net/11094/98278

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タイトル
Characterization of Ultrathin Conductive Films Using a Simplified Approach for Terahertz Time-Domain Spectroscopic Ellipsometry
著者
NRID
1000030343239 1000030343239
researchmap permalink
nagai_masaya nagai_masaya
Scopus Author ID
7402616480 7402616480
著者名
Nagai, Masaya
著者名
Watanabe, Sou
著者名
Imamura, Ryosuke
NRID
1000060240818 1000060240818
researchmap permalink
Masaaki_Ashida Masaaki_Ashida
Scopus Author ID
11043349200 11043349200
著者名
Ashida, Masaaki
著者名
Shimoyama, Kohei
NRID
1000020938188 1000020938188
ORCID
0000-0002-0277-0848 0000-0002-0277-0848
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Hao-Bo_Li Hao-Bo_Li
Scopus Author ID
57226874126 57226874126
著者名
Li, Haobo
NRID
1000080464238 1000080464238
ORCID
0000-0002-5770-6026 0000-0002-5770-6026
researchmap permalink
hattori_n_azusa hattori_n_azusa
Scopus Author ID
7202095122 7202095122
著者名
Hattori, Azusa N.
NRID
1000080294130 1000080294130
researchmap permalink
read0051711 read0051711
Scopus Author ID
55628563936 55628563936
著者名
Tanaka, Hidekazu
キーワード等
Conductive sheets
Perovskite rare-earth nickelate
Spectroscopic ellipsometry
Terahertz
Ultrathin films
内容
The version of record of this article, first published in Journal of Infrared, Millimeter, and Terahertz Waves, is available online at Publisher’s website: https://doi.org/10.1007/s10762-024-01011-x.
抄録
We present two ideas to simplify the measurement and analysis of terahertz time-domain spectroscopic ellipsometry data of ultrathin films. The measurement is simplified by using a specially designed sample holder with mirrors, which can be mounted on a cryostat. It allows us to perform spectroscopic ellipsometry by simply inserting the holder into a conventional terahertz spectroscopy system for measurements in transmission geometry. The analysis of the obtained data is simplified by considering a single interface with a certain sheet conductivity σs (since the film thickness is significantly smaller than the wavelength of the terahertz light). We demonstrate the application of these ideas by evaluating the sheet conductivities of two perovskite rare-earth nickelate thin films in the temperature range 78–478 K. The use of this particular analytical method and the sample holder design will help to establish terahertz time-domain spectroscopic ellipsometry as a characterization technique for ultrathin films.
出版者
Springer
収録物名
Journal of Infrared, Millimeter, and Terahertz Waves
巻(号)
45(11-12)
ページ
949-966
刊行年月
2024-09-12
言語
英語
ハンドルURL
https://hdl.handle.net/11094/98278
PISSN
18666892
eISSN
18666906
関連情報 (isIdenticalTo)
DOI (出版社版)
https://doi.org/10.1007/s10762-024-01011-x
アクセス権
open access
権利情報
This article is licensed under a Creative Commons Attribution 4.0 International License.
出版タイプ
Version of Record
カテゴリ
学術雑誌論文 Journal Article