Test structure for precise statistical characteristics measurement of MOSFETs

Shimizu, Yoshiyuki; Nakamura, Mitsuo; Matsuoka, Toshimasa et al.

IEEE International Conference on Microelectronic Test Structures, 2002, 49-54

アクセス数:384件（2025-03-26 00:46 集計）

固定URL: https://hdl.handle.net/11094/14076

ファイル	フォーマット	利用条件	サイズ	閲覧回数	利用開始日	説明	information
01193170	pdf	なし	385 KB	465	2012.09.22

タイトル	Test structure for precise statistical characteristics measurement of MOSFETs
著者	著者名 Shimizu, Yoshiyuki
	著者名 Nakamura, Mitsuo
	NRID 1000080324820 1000080324820 ORCID 0000-0003-3876-2679 0000-0003-3876-2679 researchmap permalink read0068628 read0068628 Scopus Author ID 7402741552 7402741552 著者名 Matsuoka, Toshimasa
	NRID 1000020192180 1000020192180 著者名 Taniguchi, Kenji
出版者	IEEE
収録物名	IEEE International Conference on Microelectronic Test Structures
ページ	49-54
刊行年月	2002-04
言語	英語
ハンドルURL	https://hdl.handle.net/11094/14076
アクセス権	open access
権利情報	c2002 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE..
出版タイプ	Version of Record
カテゴリ	会議発表論文 Conference Paper

資源タイプ	会議発表論文
ローカル資源タイプ	会議発表論文
作成日	2002-04
DCTERMS.bibliographicCitation	IEEE International Conference on Microelectronic Test Structures. 2002, p. 49-54
DC.title	Test structure for precise statistical characteristics measurement of MOSFETs
DC.creator	Shimizu, Yoshiyuki
	Nakamura, Mitsuo
	Matsuoka, Toshimasa
	Taniguchi, Kenji
DC.publisher	IEEE
DC.language' scheme='DCTERMS.RFC1766	英語
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2002-04
DC.rights	c2002 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE..
DC.format	14076
citation_title	Test structure for precise statistical characteristics measurement of MOSFETs
citation_author	Shimizu, Yoshiyuki
	Nakamura, Mitsuo
	Matsuoka, Toshimasa
	Taniguchi, Kenji
citation_publisher	IEEE
citation_language	英語
citation_date	2002-04
citation_journal_title	IEEE International Conference on Microelectronic Test Structures
citation_firstpage	49
citation_lastpage	54
citation_public_url	https://hdl.handle.net/11094/14076