An experimental procedure for precise evaluation of electron density distribution of a nanostructured material by coherent x-ray diffraction microscopy

Takahashi, Yukio; Kubo, Hideto; Nishino, Yoshinori; Furukawa, Hayato; Tsutsumi, Ryosuke; Yamauchi, Kazuto; Ishikawa, Tetsuya; Matsubara, Eiichiro

doi:https://doi.org/10.1063/1.3361265

An experimental procedure for precise evaluation of electron density distribution of a nanostructured material by coherent x-ray diffraction microscopy

Takahashi, Yukio; Kubo, Hideto; Nishino, Yoshinori et al.

Review of Scientific Instruments, 2010, 81(3), 033707

アクセス数:677件（2025-07-13 17:10 集計）

固定URL: https://hdl.handle.net/11094/86976

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タイトル	An experimental procedure for precise evaluation of electron density distribution of a nanostructured material by coherent x-ray diffraction microscopy
著者	NRID 1000000415217 1000000415217 著者名 Takahashi, Yukio
	著者名 Kubo, Hideto
	NRID 1000040392063 1000040392063 著者名 Nishino, Yoshinori
	著者名 Furukawa, Hayato
	著者名 Tsutsumi, Ryosuke
	NRID 1000010174575 1000010174575 researchmap permalink yamauchikazuto yamauchikazuto Scopus Author ID 7801509680 7801509680 著者名 Yamauchi, Kazuto
	NRID 1000080159699 1000080159699 著者名 Ishikawa, Tetsuya
	NRID 1000090173864 1000090173864 著者名 Matsubara, Eiichiro
内容	Yukio Takahashi, Hideto Kubo, Yoshinori Nishino, Hayato Furukawa, Ryosuke Tsutsumi, Kazuto Yamauchi, Tetsuya Ishikawa, and Eiichiro Matsubara, "An experimental procedure for precise evaluation of electron density distribution of a nanostructured material by coherent x-ray diffraction microscopy", Review of Scientific Instruments 81(3), 033707 (2010) https://doi.org/10.1063/1.3361265.
抄録	We developed a coherent x-ray diffraction microscopy (CXDM) system that enables us to precisely evaluate the electron density of an isolated sample. This system enables us to determine the dose per surface unit of x rays illuminated onto an isolated sample by combining incident x-ray intensity monitoring and the CXDM of a reference sample. By using this system, we determined the dose of x rays illuminated onto a nanostructured island fabricated by focused-ion-beam chemical vapor deposition and derived the electron density distribution of such a nanostructured island. A projection image of the nanostructured island with a spatial resolution of 24.1 nm and a contrast resolution higher than 2.3× 107 electrons/pixel was successfully reconstructed. © 2010 American Institute of Physics.
出版者	American Institute of Physics
収録物名	Review of Scientific Instruments
巻(号)	81(3)
ページ	033707
刊行年月	2010-03-30
言語	英語
ハンドルURL	https://hdl.handle.net/11094/86976
PISSN	00346748
eISSN	10897623
NCID	AA00817730
NCID	AA12442307
関連情報 (isIdenticalTo)	DOI (出版社版) https://doi.org/10.1063/1.3361265
アクセス権	open access
権利情報	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Review of Scientific Instruments 81(3), 033707 (2010) and may be found at https://doi.org/10.1063/1.3361265.
出版タイプ	Version of Record
カテゴリ	学術雑誌論文 Journal Article

資源タイプ	学術雑誌論文
ローカル資源タイプ	学術雑誌論文
DCMI資源タイプ	text
DCTERMS.bibliographicCitation	Review of Scientific Instruments. 2010, 81(3), p. 033707
DC.title	An experimental procedure for precise evaluation of electron density distribution of a nanostructured material by coherent x-ray diffraction microscopy
DC.creator	Takahashi, Yukio
	Kubo, Hideto
	Nishino, Yoshinori
	Furukawa, Hayato
	Tsutsumi, Ryosuke
	Yamauchi, Kazuto
	Ishikawa, Tetsuya
	Matsubara, Eiichiro
DC.publisher	American Institute of Physics
DC.language' scheme='DCTERMS.RFC1766	英語
DC.type' scheme='DCTERMS.DCMIType	text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2010-03-30
DC.identifier	https://doi.org/10.1063/1.3361265
DC.description	Yukio Takahashi, Hideto Kubo, Yoshinori Nishino, Hayato Furukawa, Ryosuke Tsutsumi, Kazuto Yamauchi, Tetsuya Ishikawa, and Eiichiro Matsubara, "An experimental procedure for precise evaluation of electron density distribution of a nanostructured material by coherent x-ray diffraction microscopy", Review of Scientific Instruments 81(3), 033707 (2010) https://doi.org/10.1063/1.3361265.
DCTERMS.abstract	We developed a coherent x-ray diffraction microscopy (CXDM) system that enables us to precisely evaluate the electron density of an isolated sample. This system enables us to determine the dose per surface unit of x rays illuminated onto an isolated sample by combining incident x-ray intensity monitoring and the CXDM of a reference sample. By using this system, we determined the dose of x rays illuminated onto a nanostructured island fabricated by focused-ion-beam chemical vapor deposition and derived the electron density distribution of such a nanostructured island. A projection image of the nanostructured island with a spatial resolution of 24.1 nm and a contrast resolution higher than 2.3× 107 electrons/pixel was successfully reconstructed. © 2010 American Institute of Physics.
DC.rights	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Review of Scientific Instruments 81(3), 033707 (2010) and may be found at https://doi.org/10.1063/1.3361265.
DC.format	86976
citation_title	An experimental procedure for precise evaluation of electron density distribution of a nanostructured material by coherent x-ray diffraction microscopy
citation_author	Takahashi, Yukio
	Kubo, Hideto
	Nishino, Yoshinori
	Furukawa, Hayato
	Tsutsumi, Ryosuke
	Yamauchi, Kazuto
	Ishikawa, Tetsuya
	Matsubara, Eiichiro
citation_publisher	American Institute of Physics
citation_language	英語
citation_date	2010-03-30
citation_journal_title	Review of Scientific Instruments
citation_volume	81
citation_issue	3
citation_firstpage	033707
citation_doi	https://doi.org/10.1063/1.3361265
citation_public_url	https://hdl.handle.net/11094/86976

An experimental procedure for precise evaluation of electron density distribution of a nanostructured material by coherent x-ray diffraction microscopy

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