Stroboscopic sampling moiré microscope (SSMM) for investigating full field in-plane vibration of MEMS mechanical transducers

Yadi, Mona; Uenohara, Tsutomu; Mizutani, Yasuhiro et al.

Precision Engineering, 2025, 92, 21-29

Number of Access:571（2025-10-31 10:38 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/100207

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Title
Stroboscopic sampling moiré microscope (SSMM) for investigating full field in-plane vibration of MEMS mechanical transducers
Creator
CreatorName
Yadi, Mona
NRID
1000010868920 1000010868920
researchmap permalink
uenohara_tsutomu uenohara_tsutomu
Scopus Author ID
57194101957 57194101957
CreatorName
Uenohara, Tsutomu
NRID
1000040374152 1000040374152
ORCID
0000-0003-4646-9640 0000-0003-4646-9640
researchmap permalink
mztnyshr mztnyshr
Scopus Author ID
8570752500 8570752500
CreatorName
Mizutani, Yasuhiro
NRID
1000020029573 1000020029573
CreatorName
Morimoto, Yoshiharu
NRID
1000070243178 1000070243178
researchmap permalink
TAKAYA-SI_C299792458 TAKAYA-SI_C299792458
Scopus Author ID
7005796519 7005796519
CreatorName
Takaya, Yasuhiro
Subject
Atomic force microscopy (AFM)
Dynamic properties
In-plane vibration measurement
MEMS mechanical transducer
Quartz tuning fork (QTF)
Ultrafast stroboscopic system
Description
Yadi M., Uenohara T., Mizutani Y., et al. Stroboscopic sampling moiré microscope (SSMM) for investigating full field in-plane vibration of MEMS mechanical transducers. Precision Engineering 92, 21 (2025); https://doi.org/10.1016/j.precisioneng.2024.11.004.
Abstract
Precise analysis of the full-field in-plane vibration of microelectromechanical system (MEMS) transducers is crucial for assessing their device functionality and performance. As an example, in the context of frequency/amplitude modulation of Quartz Tuning Fork (QTF)-based atomic force microscopy (AFM) systems, understanding QTF's in-plane vibration can significantly enhance accurate evaluation of tip-sample forces. Current methods, such as analytical and numerical approaches, have limitations when it comes to providing accurate measurements. To address these limitations, we proposed an experimental approach that combines stroboscopic and sampling moiré (SM) techniques. This method focuses on investigating the in-plane vibration of a QTF and utilizes the obtained results to measure the sensor's dynamic properties such as vibration mode shape, resonance frequency (f0), and quality factor (Q). Nanometer-scale light pulses, generated using a custom-designed stroboscope, are synchronized with the QTF's excitation voltage to freeze the vibration effectively, enabling imaging using a standard CCD camera. Subsequently, SM analysis is employed to extract the surface vibration profile, facilitating the measurement of vibration mode shape, f0, and Q. This technique shows promise for analyzing the dynamic behavior of various micro-devices compatible with the sample preparation process.
Publisher
Elsevier Inc.
Source Title
Precision Engineering
Volume (Issue)
92
Page
21-29
Date of Issued
2025-03-01
Language
English
Handle URL
https://hdl.handle.net/11094/100207
PISSN
01416359
Relation.isIdenticalTo
DOI (Publisher Version)
https://doi.org/10.1016/j.precisioneng.2024.11.004
Access Rights
open access
CopyRight
This article is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.
oaire:version
Version of Record
Category
学術雑誌論文 Journal Article