Kinetic analysis of workpiece rotation behavior during double-sided polishing

Satake, Urara; Seguchi, Yuta; Enomoto, Toshiyuki

CIRP Annals, 2025, 74(1), 435-439

Number of Access:29（2025-09-30 09:23 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/102603

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Title
Kinetic analysis of workpiece rotation behavior during double-sided polishing
Creator
NRID
1000070828409 1000070828409
researchmap permalink
su0413 su0413
Scopus Author ID
37102491700 37102491700
CreatorName
Satake, Urara
CreatorName
Seguchi, Yuta
NRID
1000020403149 1000020403149
researchmap permalink
read0076938 read0076938
Scopus Author ID
55702379200 55702379200
CreatorName
Enomoto, Toshiyuki
Subject
Double-sided machining
Modelling
Polishing
Description
Satake U., Seguchi Y., Enomoto T.. Kinetic analysis of workpiece rotation behavior during double-sided polishing. CIRP Annals 74, 435 (2025); https://doi.org/10.1016/j.cirp.2025.03.009.
Abstract
Unique clamping mechanism adopted in double-sided polishing (DSP) enables free rotation of workpieces, which is critical for achieving uniform material removal. However, the DSP process has long faced the issue of non-rotating workpieces, resulting in tapered shapes—an issue particularly relevant to silicon wafer polishing. In this study, a kinetic analysis is conducted to investigate workpiece rotation during DSP and to clarify the mechanism underlying tapering. This analysis identifies key variables governing rotational speed and primary factors contributing to workpiece nonrotation. These findings are validated experimentally, and a practical approach to preventing tapering is proposed.
Publisher
Elsevier Inc.
Source Title
CIRP Annals
Volume (Issue)
74(1)
Page
435-439
Date of Issued
2025-07-12
Language
English
Handle URL
https://hdl.handle.net/11094/102603
PISSN
00078506
eISSN
17260604
Relation.isIdenticalTo
DOI (Publisher Version)
https://doi.org/10.1016/j.cirp.2025.03.009
Access Rights
open access
CopyRight
This article is licensed under a Creative Commons Attribution 4.0 International License.
oaire:version
Version of Record
Category
学術雑誌論文 Journal Article