Applications of Femtosecond Laser Ablation of Metals to Microprocessing

佐野, 智一

Number of Access:1,024（2025-08-21 07:42 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/1888

File	Format	Terms of use	Size	Views	Date.Available	Description	information
18893_Abstract	pdf	None	103 KB	205	2014.08.04	要旨/Abstract
18893_Dissertation	pdf	None	28.0 MB	267	2012.09.22	論文/Dissertation

Title	Applications of Femtosecond Laser Ablation of Metals to Microprocessing
	金属のフェムト秒レーザーアブレーションの微細加工への応用
	キンゾクノフェムトビョウレーザーアブレーションノビサイカコウエノオウヨウ
Creator	NRID 1000030314371 1000030314371 ORCID 0000-0003-2624-5092 0000-0003-2624-5092 researchmap permalink read0068627 read0068627 Scopus Author ID 7402240743 7402240743 CreatorName 佐野, 智一 ; サノ, トモカズ ; Sano, Tomokazu
Degree Name	博士（工学）
Date of Granted	2004-03-25
Grantor	Osaka University
Faculty	工学
Grant ID	乙第08888号
Description Number	18893
Language	English
Handle URL	https://hdl.handle.net/11094/1888
Access Rights	open access
oaire:version	Version of Record
Category	Doctoral Thesis with Full Text / Graduate School of Engineering / 2003
Category	Doctoral Thesis / Graduate School of Engineering / 2003

Resource Type	doctoral thesis
Local Type	Doctoral Thesis with Full Text
Local Type	Doctoral Thesis
DCMI Type	Text
DCTERMS.bibliographicCitation	大阪大学, 2004, 博士論文
DC.title	Applications of Femtosecond Laser Ablation of Metals to Microprocessing
	金属のフェムト秒レーザーアブレーションの微細加工への応用
	キンゾクノフェムトビョウレーザーアブレーションノビサイカコウエノオウヨウ
DC.creator	佐野, 智一
	サノ, トモカズ
	Sano, Tomokazu
DC.language' scheme='DCTERMS.RFC1766	English
DC.type' scheme='DCTERMS.DCMIType	Text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2004-03-25
DC.format	1888
citation_title	Applications of Femtosecond Laser Ablation of Metals to Microprocessing
citation_author	佐野, 智一
citation_language	English
citation_public_url	https://hdl.handle.net/11094/1888
citation_date	2004-03-25