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Title	Effects of photon irradiation in UV and VUV regions during plasma processing of organic materials
Creator	NRID 1000000633661 1000000633661 researchmap permalink choken choken Scopus Author ID 55535308400 55535308400 CreatorName Cho, Ken
	NRID 1000060432423 1000060432423 researchmap permalink takenaka takenaka Scopus Author ID 18635173500 18635173500 CreatorName Takenaka, Kosuke
	NRID 1000080236108 1000080236108 researchmap permalink y_setsuhara y_setsuhara Scopus Author ID 7004203671 7004203671 CreatorName Setsuhara, Yuichi
	NRID 1000090206293 1000090206293 CreatorName Shiratani, Masaharu
	NRID 1000080437087 1000080437087 CreatorName Sekine, Makoto
	NRID 1000080242824 1000080242824 CreatorName Hori, Masaru
Subject	Inductively-coupled plasma
	Low-inductance antenna
	Low-damage process
	Hard x-ray photoelectron spectroscopy
Publisher	大阪大学接合科学研究所
	オオサカ ダイガク セツゴウ カガク ケンキュウジョ
	Joining and Welding Research Institute, Osaka University
Source Title	Transactions of JWRI
Volume (Issue)	39(2)
Page	298-300
Date of Issued	2010-12
Language	English
Handle URL	https://hdl.handle.net/11094/24830
DOI	https://doi.org/10.18910/24830
PISSN	03874508
NCID	AA00867058
Access Rights	open access
oaire:version	Version of Record
Category	紀要論文 Departmental Bulletin Paper
	Transactions of JWRI / Vol.39 No.2 (2010-12)

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