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Title	Development of a Meters-Scale Large Area Plasma Reactor Using Multiple Low-Inductance Antenna Modules for Giant Electronics Processing
Creator	NRID 1000080236108 1000080236108 researchmap permalink y_setsuhara y_setsuhara Scopus Author ID 7004203671 7004203671 CreatorName Setsuhara, Yuichi
	NRID 1000030311731 1000030311731 CreatorName Ono, Kouichi
	CreatorName Ebe, Akinori
Subject	Large-Area Plasma
	High-Density Plasma
	Plasma-Fluid Simulation
Publisher	大阪大学接合科学研究所
	オオサカ ダイガク セツゴウ カガク ケンキュウジョ
	Joining and Welding Research Institute, Osaka University
Source Title	Transactions of JWRI
Volume (Issue)	36(2)
Page	95-97
Date of Issued	2007-12
Language	English
Handle URL	https://hdl.handle.net/11094/4138
DOI	https://doi.org/10.18910/4138
PISSN	03874508
NCID	AA00867058
Access Rights	open access
oaire:version	Version of Record
Category	紀要論文 Departmental Bulletin Paper
	Transactions of JWRI / Vol.36 No.2 (2007-12)

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