Evaluation of Plasma Ion Beam Sputtered TiN/TiAlN Multilayers on Steel for Bio Implant Applications

Balasubramanian, Subramanian; Guruswamy, Brindha; Takahashi, Makoto et al.

Transactions of JWRI, 2011, 40(2), 55-58

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Identifier to cite or link to this item: https://doi.org/10.18910/4553

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Title
Evaluation of Plasma Ion Beam Sputtered TiN/TiAlN Multilayers on Steel for Bio Implant Applications
Creator
CreatorName
Balasubramanian, Subramanian
CreatorName
Guruswamy, Brindha
NRID
1000010294133 1000010294133
researchmap permalink
AB_MTakahashi AB_MTakahashi
Scopus Author ID
55701142600 55701142600
CreatorName
Takahashi, Makoto ; タカハシ, マコト
NRID
1000090346180 1000090346180
ORCID
0000-0002-4363-9520 0000-0002-4363-9520
researchmap permalink
read0191232 read0191232
Scopus Author ID
57219209494 57219209494
CreatorName
Nishikawa, Hiroshi ; ニシカワ, ヒロシ
NRID
1000070110773 1000070110773
CreatorName
Kobayashi, Akira ; コバヤシ, アキラ
Subject
Surface modification
Multilayers
Nanoindentation
Plasma ion beam sputtering
Abstract
Layers of 1.2 μm thick TiN / TiAlN were deposited onto 316L stainless steel substrates by a plasma ion beam sputtering technique. The layers were sputtered in pure Ar and N₂ with the ion beam voltage of 1 keV and ion beam current of 30mA. Polycrystalline nature with FCC structure was identified from XRD analysis. The presence of Ti, Al, C and N elements on the surface of the film was confirmed by the XPS survey spectrum taken on the surface of the coatings. The Ti2p region can be decomposed into several contributions corresponding to the different oxidation states of titanium. The columnar nature of growth was observed from the cross sectional HRTEM analysis. The nano-hardness of the TiN/TiAlNcoatings were found to be 30 GPa. The superior corrosion resistance in simulated body solution environment was observed for the multilayer coated specimen.
Publisher
大阪大学接合科学研究所
オオサカ ダイガク セツゴウ カガク ケンキュウジョ
Joining and Welding Research Institute, Osaka University
Source Title
Transactions of JWRI
Volume (Issue)
40(2)
Page
55-58
Date of Issued
2011-12
Language
English
Handle URL
https://hdl.handle.net/11094/4553
DOI
https://doi.org/10.18910/4553
PISSN
03874508
NCID
AA00867058
Access Rights
open access
oaire:version
Version of Record
Category
紀要論文 Departmental Bulletin Paper
Transactions of JWRI / Vol.40 No.2 (2011-12)