Identifier to cite or link to this item: https://doi.org/10.18910/4744

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Title	Helicon Wave Plasma Enhanced Sputtering and Application to Synthesis of Carbon Nitride Films(Physics, Process, Instrument & Measurements)
Creator	CreatorName Zhang, Jinqiu
	NRID 1000090357327 1000090357327 CreatorName Seto, Naoki
	researchmap permalink mkamai mkamai CreatorName Kamai, Masayoshi
	NRID 1000080236108 1000080236108 researchmap permalink y_setsuhara y_setsuhara Scopus Author ID 7004203671 7004203671 CreatorName Setsuhara, Yuichi
	NRID 1000040029286 1000040029286 CreatorName Miyake, Shoji
Publisher	大阪大学溶接工学研究所
	オオサカ ダイガク ヨウセツ コウガク ケンキュウジョ
	Welding Research Institute Osaka University
Source Title	Transactions of JWRI
Volume (Issue)	24(2)
Page	17-22
Date of Issued	1995-12
Language	English
Handle URL	https://hdl.handle.net/11094/4744
DOI	https://doi.org/10.18910/4744
PISSN	03874508
NCID	AA00867058
Access Rights	open access
oaire:version	Version of Record
Category	紀要論文 Departmental Bulletin Paper
	Transactions of JWRI / Vol.24 No.2 (1995-12)

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