Inductively Coupled RF Discharges Using Helical Antennas(Physics, Process, Instruments & Measurements)

Setsuhara, Yuichi; Ueda, Kunitsugu; Musil, Jindrich et al.

Transactions of JWRI, 1993, 22(1), 1-5

Number of Access:4032025-08-15 06:46 Counts

Identifier to cite or link to this item: https://doi.org/10.18910/7208

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File Format Terms of use Size Views Date.Available Description information
jwri22_01_001 pdf None 381 KB 84 2012.09.22  

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