Deposition of amorphous carbon nitride films on flexible substrates by reactive sputtering for applications in light-driven active devices

Aono, Masami; Harata, Tomo; Odawara, Taku; Asai, Shinnosuke; Orihara, Dai; Nogi, Masaya

doi:https://doi.org/10.7567/JJAP.57.01AC01

Deposition of amorphous carbon nitride films on flexible substrates by reactive sputtering for applications in light-driven active devices

Aono, Masami; Harata, Tomo; Odawara, Taku et al.

Japanese Journal of Applied Physics, 2018, 57(15), 01AC01

Number of Access:461（2025-08-14 01:27 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/78451

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Title	Deposition of amorphous carbon nitride films on flexible substrates by reactive sputtering for applications in light-driven active devices
Creator	NRID 1000080531988 1000080531988 CreatorName Aono, Masami
	CreatorName Harata, Tomo
	CreatorName Odawara, Taku
	CreatorName Asai, Shinnosuke
	CreatorName Orihara, Dai
	NRID 1000080379031 1000080379031 researchmap permalink read0151141 read0151141 Scopus Author ID 9846851200 9846851200 CreatorName Nogi, Masaya
Description	This is the Accepted Manuscript version of an article accepted for publication in Jpn. J. Appl. Phys.. IOP Publishing Ltd are not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at https://doi.org/10.7567/JJAP.57.01AC01.
Abstract	Amorphous carbon nitride (a-CN x ) thin films deposited by reactive sputtering have great potential for driving source applications of light-driven active devices. We demonstrate, for the first time, the photoinduced deformation of a-CN x deposited on flexible substrates, namely, poly(ethylene naphthalate) (PEN) films and transparent cellulose nanopaper. a-CN x films without delamination were obtained on both substrates. By decreasing the thickness of PEN films, the photoinduced deformation became extremely large. A light-driven pump was fabricated using a-CN x -coated PEN films, and then the pumping motion was observed up to 10 Hz. When a He-Ne laser traced the surface of a-CN x films deposited on the nanopaper, the sample moved to the opposite side of the laser spot. The motion involved repeated expansions and contractions similar to the motion of caterpillars occurring owing to the temporary photoinduced deformation of a-CN x films.
Publisher	Japan Society of Applied Physics
Source Title	Japanese Journal of Applied Physics
Volume (Issue)	57(15)
Page	01AC01
Date of Issued	2018
Language	English
Handle URL	https://hdl.handle.net/11094/78451
PISSN	00214922
eISSN	13474065
NCID	AA12295836
Relation.isVersionOf	DOI (Publisher Version) https://doi.org/10.7567/JJAP.57.01AC01
Access Rights	open access
CopyRight	© 2018 The Japan Society of Applied Physics
oaire:version	Accepted Manuscript
Category	学術雑誌論文 Journal Article

Resource Type	journal article
Local Type	Journal Article
DCMI Type	Text
DCTERMS.bibliographicCitation	Japanese Journal of Applied Physics. 2018, 57(15), p. 01AC01
DC.title	Deposition of amorphous carbon nitride films on flexible substrates by reactive sputtering for applications in light-driven active devices
DC.creator	Aono, Masami
	Harata, Tomo
	Odawara, Taku
	Asai, Shinnosuke
	Orihara, Dai
	Nogi, Masaya
DC.publisher	Japan Society of Applied Physics
DC.language' scheme='DCTERMS.RFC1766	English
DC.type' scheme='DCTERMS.DCMIType	Text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2018
DC.identifier	https://doi.org/10.7567/JJAP.57.01AC01
DC.description	This is the Accepted Manuscript version of an article accepted for publication in Jpn. J. Appl. Phys.. IOP Publishing Ltd are not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at https://doi.org/10.7567/JJAP.57.01AC01.
DCTERMS.abstract	Amorphous carbon nitride (a-CN x ) thin films deposited by reactive sputtering have great potential for driving source applications of light-driven active devices. We demonstrate, for the first time, the photoinduced deformation of a-CN x deposited on flexible substrates, namely, poly(ethylene naphthalate) (PEN) films and transparent cellulose nanopaper. a-CN x films without delamination were obtained on both substrates. By decreasing the thickness of PEN films, the photoinduced deformation became extremely large. A light-driven pump was fabricated using a-CN x -coated PEN films, and then the pumping motion was observed up to 10 Hz. When a He-Ne laser traced the surface of a-CN x films deposited on the nanopaper, the sample moved to the opposite side of the laser spot. The motion involved repeated expansions and contractions similar to the motion of caterpillars occurring owing to the temporary photoinduced deformation of a-CN x films.
DC.rights	© 2018 The Japan Society of Applied Physics
DC.format	78451
citation_title	Deposition of amorphous carbon nitride films on flexible substrates by reactive sputtering for applications in light-driven active devices
citation_author	Aono, Masami
	Harata, Tomo
	Odawara, Taku
	Asai, Shinnosuke
	Orihara, Dai
	Nogi, Masaya
citation_publisher	Japan Society of Applied Physics
citation_language	English
citation_date	2018
citation_journal_title	Japanese Journal of Applied Physics
citation_volume	57
citation_issue	15
citation_firstpage	01AC01
citation_doi	https://doi.org/10.7567/JJAP.57.01AC01
citation_public_url	https://hdl.handle.net/11094/78451

Deposition of amorphous carbon nitride films on flexible substrates by reactive sputtering for applications in light-driven active devices

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