Electron density measurement of inductively coupled plasmas by terahertz time-domain spectroscopy (THz-TDS)

Ando, Ayumi; Kurose, Tomoko; Reymond, Vivien; Kitano, Katsuhisa; Kitahara, Hideaki; Takano, Keisuke; Tani, Masahiko; Hangyo, Masanori; Hamaguchi, Satoshi

doi:https://doi.org/10.1063/1.3633488

Electron density measurement of inductively coupled plasmas by terahertz time-domain spectroscopy (THz-TDS)

Ando, Ayumi; Kurose, Tomoko; Reymond, Vivien et al.

Journal of Applied Physics, 2011, 110(7), 073303

Number of Access:836（2025-08-28 19:16 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/78471

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Title	Electron density measurement of inductively coupled plasmas by terahertz time-domain spectroscopy (THz-TDS)
Creator	NRID 1000060452471 1000060452471 CreatorName Ando, Ayumi
	CreatorName Kurose, Tomoko
	CreatorName Reymond, Vivien
	NRID 1000020379118 1000020379118 ORCID 0000-0003-3861-3817 0000-0003-3861-3817 researchmap permalink katsuhisa.kitano katsuhisa.kitano Scopus Author ID 7102045891 7102045891 CreatorName Kitano, Katsuhisa
	NRID 1000020397649 1000020397649 CreatorName Kitahara, Hideaki
	NRID 1000070583102 1000070583102 CreatorName Takano, Keisuke
	NRID 1000000346181 1000000346181 CreatorName Tani, Masahiko
	NRID 1000010144429 1000010144429 CreatorName Hangyo, Masanori
	NRID 1000060301826 1000060301826 ORCID 0000-0001-6580-8797 0000-0001-6580-8797 researchmap permalink satoshi_hamaguchi satoshi_hamaguchi Scopus Author ID 55220082400 55220082400 CreatorName Hamaguchi, Satoshi
Description	Ando, A., et al., Journal of Applied Physics 110, 073303 (2011) https://doi.org/10.1063/1.3633488
Abstract	The electron densities of argon inductively coupled plasmas were measured by terahertz time-domain spectroscopy (THz-TDS). At a low pressure, the electron densities were also measured with a Langmuir-type double probe and the validity of THz-TDS electron-density measurement in a plasma has been corroborated. As the input radio-frequency (RF) power increases, the plasma density and gas temperature increase, which makes the probe measurement less reliable or even impossible, due to the large heat load to the probe surface. On the contrary, the THz-TDS measurement is unaffected by the gas temperature and becomes more reliable due to the higher electron density at higher input power for plasma generation. © 2011 American Institute of Physics.
Publisher	American Institute of Physics
Source Title	Journal of Applied Physics
Volume (Issue)	110(7)
Page	073303
Date of Issued	2011-10-05
Language	English
Handle URL	https://hdl.handle.net/11094/78471
PISSN	00218979
NCID	AA00693547
Relation.isIdenticalTo	DOI (Publisher Version) https://doi.org/10.1063/1.3633488
Access Rights	open access
CopyRight	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Journal of Applied Physics 110, 073303 (2011) and may be found at https://doi.org/10.1063/1.3633488.
oaire:version	Version of Record
Category	学術雑誌論文 Journal Article

Resource Type	journal article
Local Type	Journal Article
DCTERMS.bibliographicCitation	Journal of Applied Physics. 2011, 110(7), p. 073303
DC.title	Electron density measurement of inductively coupled plasmas by terahertz time-domain spectroscopy (THz-TDS)
DC.creator	Ando, Ayumi
	Kurose, Tomoko
	Reymond, Vivien
	Kitano, Katsuhisa
	Kitahara, Hideaki
	Takano, Keisuke
	Tani, Masahiko
	Hangyo, Masanori
	Hamaguchi, Satoshi
DC.publisher	American Institute of Physics
DC.language' scheme='DCTERMS.RFC1766	English
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2011-10-05
DC.identifier	https://doi.org/10.1063/1.3633488
DC.description	Ando, A., et al., Journal of Applied Physics 110, 073303 (2011) https://doi.org/10.1063/1.3633488
DCTERMS.abstract	The electron densities of argon inductively coupled plasmas were measured by terahertz time-domain spectroscopy (THz-TDS). At a low pressure, the electron densities were also measured with a Langmuir-type double probe and the validity of THz-TDS electron-density measurement in a plasma has been corroborated. As the input radio-frequency (RF) power increases, the plasma density and gas temperature increase, which makes the probe measurement less reliable or even impossible, due to the large heat load to the probe surface. On the contrary, the THz-TDS measurement is unaffected by the gas temperature and becomes more reliable due to the higher electron density at higher input power for plasma generation. © 2011 American Institute of Physics.
DC.rights	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Journal of Applied Physics 110, 073303 (2011) and may be found at https://doi.org/10.1063/1.3633488.
DC.format	78471
citation_title	Electron density measurement of inductively coupled plasmas by terahertz time-domain spectroscopy (THz-TDS)
citation_author	Ando, Ayumi
	Kurose, Tomoko
	Reymond, Vivien
	Kitano, Katsuhisa
	Kitahara, Hideaki
	Takano, Keisuke
	Tani, Masahiko
	Hangyo, Masanori
	Hamaguchi, Satoshi
citation_publisher	American Institute of Physics
citation_language	English
citation_date	2011-10-05
citation_journal_title	Journal of Applied Physics
citation_volume	110
citation_issue	7
citation_firstpage	073303
citation_doi	https://doi.org/10.1063/1.3633488
citation_public_url	https://hdl.handle.net/11094/78471

Electron density measurement of inductively coupled plasmas by terahertz time-domain spectroscopy (THz-TDS)

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