Molecular dynamics simulation of the formation of sp3 hybridized bonds in hydrogenated diamondlike carbon deposition processes

Murakami, Yasuo; Horiguchi, Seishi; Hamaguchi, Satoshi

Physical Review E - Statistical, Nonlinear, and Soft Matter Physics, 2010, 81(4), 041602

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Identifier to cite or link to this item: https://hdl.handle.net/11094/78474

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Title
Molecular dynamics simulation of the formation of sp3 hybridized bonds in hydrogenated diamondlike carbon deposition processes
Creator
CreatorName
Murakami, Yasuo
CreatorName
Horiguchi, Seishi
NRID
1000060301826 1000060301826
ORCID
0000-0001-6580-8797 0000-0001-6580-8797
researchmap permalink
satoshi_hamaguchi satoshi_hamaguchi
Scopus Author ID
55220082400 55220082400
CreatorName
Hamaguchi, Satoshi
Description
Yasuo Murakami, Seishi Horiguchi, and Satoshi Hamaguchi, Physical Review E 81, 041602, 2010
Abstract
The formation process of s p3 hybridized carbon networks (i.e., diamondlike structures) in hydrogenated diamondlike carbon (DLC) films has been studied with the use of molecular-dynamics simulations. The processes simulated in this study are injections of hydrocarbon (CH3 and CH) beams into amorphous carbon (a-C) substrates. It has been shown that diamondlike s p3 structures are formed predominantly at a subsurface level when the beam energy is relatively high, as in the "subplantation" process for hydrogen-free DLC deposition. However, for hydrogenated DLC deposition, the presence of abundant hydrogen at subsurface levels, together with thermal spikes caused by energetic ion injections, substantially enhances the formation of carbon-to-carbon s p3 bonds. Therefore, the s p3 bond formation process for hydrogenated DLC films essentially differs from that for hydrogen-free DLC films. © 2010 The American Physical Society.
Publisher
American Physical Society
Source Title
Physical Review E - Statistical, Nonlinear, and Soft Matter Physics
Volume (Issue)
81(4)
Page
041602
Date of Issued
2010-04-05
Language
English
Handle URL
https://hdl.handle.net/11094/78474
PISSN
15393755
eISSN
15502376
NCID
AA11558033
Relation.isIdenticalTo
DOI (Publisher Version)
https://doi.org/10.1103/PhysRevE.81.041602
Access Rights
open access
CopyRight
Copyright (2010) by the American Physical Society
oaire:version
Version of Record
Category
学術雑誌論文 Journal Article