Dynamical N-body simulations of Coulomb scattering in plasma sheaths

Farouki, R. T.; Hamaguchi, S.; Surendra, M. et al.

Physical Review A, 1992, 46(12), 7815-7829

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Identifier to cite or link to this item: https://hdl.handle.net/11094/78519

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Title
Dynamical N-body simulations of Coulomb scattering in plasma sheaths
Creator
CreatorName
Farouki, R. T.
NRID
1000060301826 1000060301826
ORCID
0000-0001-6580-8797 0000-0001-6580-8797
researchmap permalink
satoshi_hamaguchi satoshi_hamaguchi
Scopus Author ID
55220082400 55220082400
CreatorName
Hamaguchi, S.
CreatorName
Surendra, M.
CreatorName
Dalvie, M.
Description
R. T. Farouki, S. Hamaguchi, M. Surendra, and M. Dalvie, Phys. Rev. A 46, 7815, 1992
Abstract
N-body simulations are used to assess the importance of discrete ion-ion Coulomb interactions in an electron-free plasma sheath, where ordinary Debye screening is ineffective. The angular dispersion θrms of the ion flux incident on the cathode is found to have a power-law dependence on a parameter Ω measuring the ''graininess'' of the sheath electric field, and an explanation for the observed exponent in this relation is postulated in terms of diffusion theory. In the Coulomb logarithm, a lower cutoff bmin equal to a fraction of the mean ion-ion distance at the plasma-sheath boundary is determined, while the upper cutoff bmax appears to be no more than about ten times the sheath thickness d; no sustained logarithmic growth of θrms2 with the lateral extent a over which Coulomb interactions are taken into account was observed. For sheath parameters representative of the low-pressure weakly ionized discharges used in very-large-scale-integration manufacturing processes, the dispersion due to Coulomb scattering in the sheath is typically θrms0.1°. © 1992 The American Physical Society.
Publisher
American Physical Society
Source Title
Physical Review A
Volume (Issue)
46(12)
Page
7815-7829
Date of Issued
1992-12
Language
English
Handle URL
https://hdl.handle.net/11094/78519
PISSN
10502947
NCID
AA10803980
Relation.isIdenticalTo
DOI (Publisher Version)
https://doi.org/10.1103/PhysRevA.46.7815
Access Rights
open access
CopyRight
Copyright (1992) by the American Physical Society.
oaire:version
Version of Record
Category
学術雑誌論文 Journal Article