Ion distribution function in a weakly collisional sheath

Hamaguchi, S.; Farouki, R. T.; Dalvie, M.

Physical Review A, 1991, 44(6), 3804-3821

Number of Access:222（2025-08-28 17:13 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/78522

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Title
Ion distribution function in a weakly collisional sheath
Creator
NRID
1000060301826 1000060301826
ORCID
0000-0001-6580-8797 0000-0001-6580-8797
researchmap permalink
satoshi_hamaguchi satoshi_hamaguchi
Scopus Author ID
55220082400 55220082400
CreatorName
Hamaguchi, S.
CreatorName
Farouki, R. T.
CreatorName
Dalvie, M.
Description
S. Hamaguchi, R. T. Farouki, and M. Dalvie, Phys. Rev. A 44, 3804, 1991
Abstract
The ion distribution function in a weakly collisional sheath is obtained analytically for arbitrary electric-field configurations, based on kinetic equations with elastic collisions. In the light of application to plasma etching and deposition, the distribution function is integrated to derive the angular and energy distributions of the ion flux incident at the electrodes. Under the assumption of a constant-sheath electric field, the simple analytic expressions 2 sin cos(-4 ln sin+sin4-1)/(1+sin2)2 and en-ln(1-) for the angular and energy distributions of the nonballistic ion flux are obtained, where denotes the normalized ion kinetic energy. For the more realistic case of a self-consistent electric field, integral formulas for and en, which are amenable to numerical quadrature, are also obtained from the Boltzmann-Poisson system. These analytic expressions are compared with Monte Carlo sheath simulations under various conditions and are found to be in excellent agreement. © 1991 The American Physical Society.
Publisher
American Physical Society
Source Title
Physical Review A
Volume (Issue)
44(6)
Page
3804-3821
Date of Issued
1991-09
Language
English
Handle URL
https://hdl.handle.net/11094/78522
PISSN
10502947
NCID
AA10803980
Relation.isIdenticalTo
DOI (Publisher Version)
https://doi.org/10.1103/PhysRevA.44.3804
Access Rights
open access
CopyRight
Copyright (1991) by the American Physical Society
oaire:version
Version of Record
Category
学術雑誌論文 Journal Article