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Title	Properties of (Ti, Al) N films prepared by ion beam assisted deposition(Physics, Process, Instrument & Measurements)
Creator	CreatorName Suzuki, Tsuneo
	NRID 1000080236108 1000080236108 researchmap permalink y_setsuhara y_setsuhara Scopus Author ID 7004203671 7004203671 CreatorName Setsuhara, Yuichi
	NRID 1000020089890 1000020089890 CreatorName Makino, Yukio
	NRID 1000040029286 1000040029286 CreatorName Miyake, Shoji
	CreatorName Sakata, Takao
	NRID 1000010024366 1000010024366 CreatorName Mori, Hirotaro
Publisher	大阪大学溶接工学研究所
	オオサカ ダイガク ヨウセツ コウガク ケンキュウジョ
	Welding Research Institute Osaka University
Source Title	Transactions of JWRI
Volume (Issue)	24(1)
Page	31-37
Date of Issued	1995-07
Language	English
Handle URL	https://hdl.handle.net/11094/8174
DOI	https://doi.org/10.18910/8174
PISSN	03874508
NCID	AA00867058
Access Rights	open access
oaire:version	Version of Record
Category	紀要論文 Departmental Bulletin Paper
	Transactions of JWRI / Vol.24 No.1 (1995-07)

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