Enhancement of ultrahigh-frequency vibration of an Au/Si₃N₄ composite resonator with picosecond ultrasound

Uehara, Katsufumi; Ogi, Hirotsugu; Hirao, Masahiko

Applied Physics Express, 2014, 7(2), 025201

Number of Access:297（2025-08-23 22:42 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/84168

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Title
Enhancement of ultrahigh-frequency vibration of an Au/Si₃N₄ composite resonator with picosecond ultrasound
Creator
CreatorName
Uehara, Katsufumi
NRID
1000090252626 1000090252626
researchmap permalink
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Scopus Author ID
35563683500 35563683500
CreatorName
Ogi, Hirotsugu
NRID
1000080112027 1000080112027
CreatorName
Hirao, Masahiko
Description
Katsufumi Uehara, Hirotsugu Ogi and Masahiko Hirao. Enhancement of ultrahigh-frequency vibration of an Au/Si₃N₄ composite resonator with picosecond ultrasound. Applied Physics Express, 2014, 7(2), 025201. https://doi.org/10.7567/APEX.7.025201.
Abstract
We found that the second through-thickness vibration mode of a gold/silicon-nitride composite thin film is selectively excited by picosecond ultrasound with high efficiency by controlling the thickness ratio. Its mechanical vibration frequency exceeds 50 GHz, making it promising for mass detectors with ultrahigh sensitivity. We developed a theoretical model based on the strain-energy ratio between gold and silicon-nitride layers and successfully explained the enhancement of the second vibration mode. A sensor chip was applied to detect immobilized proteins through the change in resonance frequency.
Publisher
The Japan Society of Applied Physics
Source Title
Applied Physics Express
Volume (Issue)
7(2)
Page
025201
Date of Issued
2014-01-16
Language
English
Handle URL
https://hdl.handle.net/11094/84168
PISSN
18820778
eISSN
18820786
NCID
AA12295133
Relation.isVersionOf
DOI (Publisher Version)
https://doi.org/10.7567/APEX.7.025201
Access Rights
open access
oaire:version
Accepted Manuscript
Category
学術雑誌論文 Journal Article