Stable elasticity of epitaxial Cu thin films on Si

Nakamura, N.; Ogi, H.; Hirao, M.

Physical Review B - Condensed Matter and Materials Physics, 2008, 77(24), 245416-1-245416-6

Number of Access:698（2025-11-25 02:19 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/84178

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Title
Stable elasticity of epitaxial Cu thin films on Si
Creator
NRID
1000050452404 1000050452404
researchmap permalink
nnakamura nnakamura
Scopus Author ID
7403356186 7403356186
ORCID
0000-0002-5338-842X 0000-0002-5338-842X
CreatorName
Nakamura, N.
NRID
1000090252626 1000090252626
researchmap permalink
read0042771 read0042771
Scopus Author ID
35563683500 35563683500
ORCID
0000-0002-9602-5194 0000-0002-9602-5194
CreatorName
Ogi, H.
NRID
1000080112027 1000080112027
CreatorName
Hirao, M.
Description
Nakamura N., Ogi H., Hirao M. "Stable elasticity of epitaxial Cu thin films on Si", Physical Review B - Condensed Matter and Materials Physics, 77(24), 245416 2008. https://doi.org/10.1103/PhysRevB.77.245416.
Abstract
In epitaxial films, large elastic strain originating from the lattice misfit with the substrate remains, and it could affect the elastic stiffness. However, we found that epitaxially grown Cu thin films on (001) Si show exceptionally stable stiffness: the average out-of-plane elastic constant throughout the film thickness was independent of the film thickness and of the annealing procedure up to 150°C. We calculated the strain dependence of the elastic constants using the higher-order elastic constants and confirmed that the misfit strain with the substrate hardly affects the stiffness in the particular case of Cu(001) thin films. © 2008 The American Physical Society.
Publisher
American Physical Society
Source Title
Physical Review B - Condensed Matter and Materials Physics
Volume (Issue)
77(24)
Page
245416-1-245416-6
Date of Issued
2008-06-11
Language
English
Handle URL
https://hdl.handle.net/11094/84178
PISSN
10980121
eISSN
1550235X
NCID
AA11187113
Relation.isIdenticalTo
DOI (Publisher Version)
https://doi.org/10.1103/PhysRevB.77.245416
Access Rights
open access
CopyRight
Copyright 2008 by the American Physical Society
oaire:version
Version of Record
Category
学術雑誌論文 Journal Article