Elastic constant and Brillouin oscillations in sputtered vitreous SiO2 thin films

Ogi, H.; Shagawa, T.; Nakamura, N.; Hirao, M.; Odaka, H.; Kihara, N.

doi:https://doi.org/10.1103/PhysRevB.78.134204

Elastic constant and Brillouin oscillations in sputtered vitreous SiO2 thin films

Ogi, H.; Shagawa, T.; Nakamura, N. et al.

Physical Review B - Condensed Matter and Materials Physics, 2008, 78(13), 134204-1-134204-7

Number of Access:627（2025-08-23 19:13 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/84179

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Title	Elastic constant and Brillouin oscillations in sputtered vitreous SiO2 thin films
Creator	NRID 1000090252626 1000090252626 researchmap permalink read0042771 read0042771 Scopus Author ID 35563683500 35563683500 CreatorName Ogi, H.
	CreatorName Shagawa, T.
	NRID 1000050452404 1000050452404 researchmap permalink nnakamura nnakamura Scopus Author ID 7403356186 7403356186 ORCID 0000-0002-5338-842X 0000-0002-5338-842X CreatorName Nakamura, N.
	NRID 1000080112027 1000080112027 CreatorName Hirao, M.
	CreatorName Odaka, H.
	CreatorName Kihara, N.
Description	Ogi H., Shagawa T., Nakamura N., et al. "Elastic constant and Brillouin oscillations in sputtered vitreous SiO2 thin films", Physical Review B - Condensed Matter and Materials Physics, 78(13), 134204, 2008. https://doi.org/10.1103/PhysRevB.78.134204.
Abstract	We studied the relationship between elastic constants and microstructure in sputtered vitreous SiO2 thin films using pump-probe picosecond laser ultrasound. The delayed probe light pulse is diffracted by the acoustic wave excited by the pump light pulse, inducing Brillouin oscillations, seen as reflectivity change in the probe pulse, whose frequency can be used to extract the sound velocity and elastic moduli. Theoretical calculations were made to explain the asymmetric response of Brillouin oscillations and to predict the possible error limit of the determined elastic constants. The thin films containing defects exhibited lower elastic constant. A micromechanics modeling was developed to evaluate defect porosity and attenuation caused by scattering was able to predict the defect size. Elastic moduli of the defect-free specimens increased with increasing sputtering power, eventually exceeding the bulk value, and correlated with phonon frequencies, indicating that the decrease in the Si-O-Si bond angle of the tetrahedral structure increased the stiffness. © 2008 The American Physical Society.
Publisher	American Physical Society
Source Title	Physical Review B - Condensed Matter and Materials Physics
Volume (Issue)	78(13)
Page	134204-1-134204-7
Date of Issued	2008-10-14
Language	English
Handle URL	https://hdl.handle.net/11094/84179
PISSN	10980121
eISSN	1550235X
NCID	AA11187113
Relation.isIdenticalTo	DOI (Publisher Version) https://doi.org/10.1103/PhysRevB.78.134204
Access Rights	open access
CopyRight	Copyright 2008 by the American Physical Society
oaire:version	Version of Record
Category	学術雑誌論文 Journal Article

Resource Type	journal article
Local Type	Journal Article
DCMI Type	Text
DCTERMS.bibliographicCitation	Physical Review B - Condensed Matter and Materials Physics. 2008, 78(13), p. 134204-1-134204-7
DC.title	Elastic constant and Brillouin oscillations in sputtered vitreous SiO2 thin films
DC.creator	Ogi, H.
	Shagawa, T.
	Nakamura, N.
	Hirao, M.
	Odaka, H.
	Kihara, N.
DC.publisher	American Physical Society
DC.language' scheme='DCTERMS.RFC1766	English
DC.type' scheme='DCTERMS.DCMIType	Text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2008-10-14
DC.identifier	https://doi.org/10.1103/PhysRevB.78.134204
DC.description	Ogi H., Shagawa T., Nakamura N., et al. "Elastic constant and Brillouin oscillations in sputtered vitreous SiO2 thin films", Physical Review B - Condensed Matter and Materials Physics, 78(13), 134204, 2008. https://doi.org/10.1103/PhysRevB.78.134204.
DCTERMS.abstract	We studied the relationship between elastic constants and microstructure in sputtered vitreous SiO2 thin films using pump-probe picosecond laser ultrasound. The delayed probe light pulse is diffracted by the acoustic wave excited by the pump light pulse, inducing Brillouin oscillations, seen as reflectivity change in the probe pulse, whose frequency can be used to extract the sound velocity and elastic moduli. Theoretical calculations were made to explain the asymmetric response of Brillouin oscillations and to predict the possible error limit of the determined elastic constants. The thin films containing defects exhibited lower elastic constant. A micromechanics modeling was developed to evaluate defect porosity and attenuation caused by scattering was able to predict the defect size. Elastic moduli of the defect-free specimens increased with increasing sputtering power, eventually exceeding the bulk value, and correlated with phonon frequencies, indicating that the decrease in the Si-O-Si bond angle of the tetrahedral structure increased the stiffness. © 2008 The American Physical Society.
DC.rights	Copyright 2008 by the American Physical Society
DC.format	84179
citation_title	Elastic constant and Brillouin oscillations in sputtered vitreous SiO2 thin films
citation_author	Ogi, H.
	Shagawa, T.
	Nakamura, N.
	Hirao, M.
	Odaka, H.
	Kihara, N.
citation_publisher	American Physical Society
citation_language	English
citation_date	2008-10-14
citation_journal_title	Physical Review B - Condensed Matter and Materials Physics
citation_volume	78
citation_issue	13
citation_firstpage	134204-1
citation_lastpage	134204-7
citation_doi	https://doi.org/10.1103/PhysRevB.78.134204
citation_public_url	https://hdl.handle.net/11094/84179

Elastic constant and Brillouin oscillations in sputtered vitreous SiO2 thin films

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