Resonance acoustic microbalance with naked-embedded quartz (RAMNE-Q) biosensor fabricated by microelectromechanical-system process

Kato, Fumihito; Ogi, Hirotsugu; Yanagida, Taiji; Nishikawa, Shintaro; Hirao, Masahiko; Nishiyama, Masayoshi

doi:https://doi.org/10.1016/j.bios.2011.12.047

Resonance acoustic microbalance with naked-embedded quartz (RAMNE-Q) biosensor fabricated by microelectromechanical-system process

Kato, Fumihito; Ogi, Hirotsugu; Yanagida, Taiji et al.

Biosensors and Bioelectronics, 2011, 33(1), 139-145

Number of Access:435（2025-08-23 19:12 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/84195

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Title	Resonance acoustic microbalance with naked-embedded quartz (RAMNE-Q) biosensor fabricated by microelectromechanical-system process
Creator	CreatorName Kato, Fumihito
	NRID 1000090252626 1000090252626 researchmap permalink read0042771 read0042771 Scopus Author ID 35563683500 35563683500 CreatorName Ogi, Hirotsugu
	CreatorName Yanagida, Taiji
	CreatorName Nishikawa, Shintaro
	NRID 1000080112027 1000080112027 CreatorName Hirao, Masahiko
	CreatorName Nishiyama, Masayoshi
Subject	Electrodeless
	MEMS
	QCM
	Replacement-free
Abstract	A resonance acoustic microbalance with a naked-embedded quartz (RAMNE-Q) is realized by a microfabrication method, aiming at broader applications of quartz-crystal microbalance (QCM) biosensors. The RAMNE-Q biosensor consists of three layers; a silicon layer with an engraved microchannel and sandwiching glass layers. The naked AT-cut quartz resonator of 9.3 or 28.5 μm thick is located in the microchannel and supported by the silicon micropillars and semicircular walls without fixing, and it is encapsulated by the rigid body. Cupper antennas are used for generating and receiving electromagnetic fields to excite and detect the shear vibration of the quartz oscillator during the solution flow, thereby achieving the noncontact measurement of the resonance frequency. Because of the isolated resonator, the Q factor is high enough (about 1500 at 170-180. MHz) even in the flowing solution. We succeeded in detecting 1. ng/ml human immunoglobulin G in phosphate-buffered-saline solution via Staphylococcus aureus protein A immobilized nonspecifically on the quartz surfaces, demonstrating the high sensitivity and high signal-to-noise ratio of the RAMNE-Q biosensor. It does not require electrodes and is a replacement-free biosensor, and its reusability is confirmed. © 2011 Elsevier B.V.
Publisher	Elsevier B.V.
Source Title	Biosensors and Bioelectronics
Volume (Issue)	33(1)
Page	139-145
Date of Issued	2011-12-31
Language	English
Handle URL	https://hdl.handle.net/11094/84195
PISSN	09565663
eISSN	18734235
NCID	AA10739666
NCID	AA1152282X
Relation.isVersionOf	DOI (Publisher Version) https://doi.org/10.1016/j.bios.2011.12.047
Access Rights	open access
CopyRight	© 2011 Elsevier B.V. This manuscript version is made available under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.
oaire:version	Accepted Manuscript
Category	学術雑誌論文 Journal Article

Resource Type	journal article
Local Type	Journal Article
DCMI Type	Text
DCTERMS.bibliographicCitation	Biosensors and Bioelectronics. 2011, 33(1), p. 139-145
DC.title	Resonance acoustic microbalance with naked-embedded quartz (RAMNE-Q) biosensor fabricated by microelectromechanical-system process
DC.creator	Kato, Fumihito
	Ogi, Hirotsugu
	Yanagida, Taiji
	Nishikawa, Shintaro
	Hirao, Masahiko
	Nishiyama, Masayoshi
DC.publisher	Elsevier B.V.
DC.language' scheme='DCTERMS.RFC1766	English
DC.type' scheme='DCTERMS.DCMIType	Text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2011-12-31
DC.identifier	https://doi.org/10.1016/j.bios.2011.12.047
DC.subject	Electrodeless
	MEMS
	QCM
	Replacement-free
DCTERMS.abstract	A resonance acoustic microbalance with a naked-embedded quartz (RAMNE-Q) is realized by a microfabrication method, aiming at broader applications of quartz-crystal microbalance (QCM) biosensors. The RAMNE-Q biosensor consists of three layers; a silicon layer with an engraved microchannel and sandwiching glass layers. The naked AT-cut quartz resonator of 9.3 or 28.5 μm thick is located in the microchannel and supported by the silicon micropillars and semicircular walls without fixing, and it is encapsulated by the rigid body. Cupper antennas are used for generating and receiving electromagnetic fields to excite and detect the shear vibration of the quartz oscillator during the solution flow, thereby achieving the noncontact measurement of the resonance frequency. Because of the isolated resonator, the Q factor is high enough (about 1500 at 170-180. MHz) even in the flowing solution. We succeeded in detecting 1. ng/ml human immunoglobulin G in phosphate-buffered-saline solution via Staphylococcus aureus protein A immobilized nonspecifically on the quartz surfaces, demonstrating the high sensitivity and high signal-to-noise ratio of the RAMNE-Q biosensor. It does not require electrodes and is a replacement-free biosensor, and its reusability is confirmed. © 2011 Elsevier B.V.
DC.rights	© 2011 Elsevier B.V. This manuscript version is made available under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.
DC.format	84195
citation_title	Resonance acoustic microbalance with naked-embedded quartz (RAMNE-Q) biosensor fabricated by microelectromechanical-system process
citation_author	Kato, Fumihito
	Ogi, Hirotsugu
	Yanagida, Taiji
	Nishikawa, Shintaro
	Hirao, Masahiko
	Nishiyama, Masayoshi
citation_publisher	Elsevier B.V.
citation_language	English
citation_date	2011-12-31
citation_journal_title	Biosensors and Bioelectronics
citation_volume	33
citation_issue	1
citation_firstpage	139
citation_lastpage	145
citation_doi	https://doi.org/10.1016/j.bios.2011.12.047
citation_public_url	https://hdl.handle.net/11094/84195

Resonance acoustic microbalance with naked-embedded quartz (RAMNE-Q) biosensor fabricated by microelectromechanical-system process

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