MEMS hydrogen gas sensor with wireless quartz crystal resonator

Zhou, Lianjie; Kato, Fumihito; Nakamura, Nobutomo; Oshikane, Yasushi; Nagakubo, Akira; Ogi, Hirotsugu

doi:https://doi.org/10.1016/j.snb.2021.129651

MEMS hydrogen gas sensor with wireless quartz crystal resonator

Zhou, Lianjie; Kato, Fumihito; Nakamura, Nobutomo et al.

Sensors and Actuators, B: Chemical, 2021, 334, 129651

Number of Access:660（2025-08-14 21:06 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/84198

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Title	MEMS hydrogen gas sensor with wireless quartz crystal resonator
Creator	CreatorName Zhou, Lianjie
	NRID 1000070780170 1000070780170 CreatorName Kato, Fumihito
	NRID 1000050452404 1000050452404 researchmap permalink nnakamura nnakamura Scopus Author ID 7403356186 7403356186 ORCID 0000-0002-5338-842X 0000-0002-5338-842X CreatorName Nakamura, Nobutomo
	NRID 1000040263206 1000040263206 researchmap permalink Yasushi_Oshikane_QMI Yasushi_Oshikane_QMI Scopus Author ID 6602398121 6602398121 CreatorName Oshikane, Yasushi
	NRID 1000070751113 1000070751113 ORCID 0000-0001-7494-5099 0000-0001-7494-5099 researchmap permalink nagakubo nagakubo Scopus Author ID 55329400300 55329400300 CreatorName Nagakubo, Akira
	NRID 1000090252626 1000090252626 researchmap permalink read0042771 read0042771 Scopus Author ID 35563683500 35563683500 CreatorName Ogi, Hirotsugu
Subject	Air-plasma
	Hydrogen-gas sensor
	MEMS
	QCM
	Surface oxidation
	Wireless
Abstract	A highly sensitive hydrogen-gas sensor fabricated using MEMS technology is presented. The sensor chip consists of glass substrates, silicon substrate, and an AT-cut quartz crystal resonator, which is embedded in the microchannel constructed on the substrates. The quartz resonator has a fundamental resonant frequency of 165 MHz and a 200 nm palladium film deposited on its single surface as the hydrogen-gas sensing material. The MEMS hydrogen-gas sensor operates in a wireless manner by exciting and detecting the resonator vibration using the non-contacting antennas. The curvature induced resonant frequency change of the resonator plate caused by the expansion of the palladium film is used for the detection of the hydrogen gas. We succeeded in improving the hydrogen absorption rate and then the sensitivity for the hydrogen-gas detection by applying the air-plasma treatment method, and clarified the role of palladium oxide in lowering the energy barrier for the hydrogen-atom migration from surface to subsurface with the X-ray photoelectron spectroscopy. Thus sensitivity enhanced MEMS hydrogen-gas sensor exhibits a detection limit of 10 ppm or less at room temperature both in nitrogen and air.
Publisher	Elsevier B.V.
Source Title	Sensors and Actuators, B: Chemical
Volume (Issue)	334
Page	129651
Date of Issued	2021-02-16
Language	English
Handle URL	https://hdl.handle.net/11094/84198
PISSN	09254005
NCID	AA1078104X
NCID	AA11540366
Relation.isVersionOf	DOI (Publisher Version) https://doi.org/10.1016/j.snb.2021.129651
Access Rights	open access
CopyRight	© 2021 Elsevier B.V. This manuscript version is made available under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.
oaire:version	Accepted Manuscript
Category	学術雑誌論文 Journal Article

Resource Type	journal article
Local Type	Journal Article
DCMI Type	Text
DCTERMS.bibliographicCitation	Sensors and Actuators, B: Chemical. 2021, 334, p. 129651
DC.title	MEMS hydrogen gas sensor with wireless quartz crystal resonator
DC.creator	Zhou, Lianjie
	Kato, Fumihito
	Nakamura, Nobutomo
	Oshikane, Yasushi
	Nagakubo, Akira
	Ogi, Hirotsugu
DC.publisher	Elsevier B.V.
DC.language' scheme='DCTERMS.RFC1766	English
DC.type' scheme='DCTERMS.DCMIType	Text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2021-02-16
DC.identifier	https://doi.org/10.1016/j.snb.2021.129651
DC.subject	Air-plasma
	Hydrogen-gas sensor
	MEMS
	QCM
	Surface oxidation
	Wireless
DCTERMS.abstract	A highly sensitive hydrogen-gas sensor fabricated using MEMS technology is presented. The sensor chip consists of glass substrates, silicon substrate, and an AT-cut quartz crystal resonator, which is embedded in the microchannel constructed on the substrates. The quartz resonator has a fundamental resonant frequency of 165 MHz and a 200 nm palladium film deposited on its single surface as the hydrogen-gas sensing material. The MEMS hydrogen-gas sensor operates in a wireless manner by exciting and detecting the resonator vibration using the non-contacting antennas. The curvature induced resonant frequency change of the resonator plate caused by the expansion of the palladium film is used for the detection of the hydrogen gas. We succeeded in improving the hydrogen absorption rate and then the sensitivity for the hydrogen-gas detection by applying the air-plasma treatment method, and clarified the role of palladium oxide in lowering the energy barrier for the hydrogen-atom migration from surface to subsurface with the X-ray photoelectron spectroscopy. Thus sensitivity enhanced MEMS hydrogen-gas sensor exhibits a detection limit of 10 ppm or less at room temperature both in nitrogen and air.
DC.rights	© 2021 Elsevier B.V. This manuscript version is made available under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.
DC.format	84198
citation_title	MEMS hydrogen gas sensor with wireless quartz crystal resonator
citation_author	Zhou, Lianjie
	Kato, Fumihito
	Nakamura, Nobutomo
	Oshikane, Yasushi
	Nagakubo, Akira
	Ogi, Hirotsugu
citation_publisher	Elsevier B.V.
citation_language	English
citation_date	2021-02-16
citation_journal_title	Sensors and Actuators, B: Chemical
citation_volume	334
citation_firstpage	129651
citation_doi	https://doi.org/10.1016/j.snb.2021.129651
citation_public_url	https://hdl.handle.net/11094/84198

MEMS hydrogen gas sensor with wireless quartz crystal resonator

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