Picosecond ultrasound spectroscopy for studying elastic modulus of thin films: A review

Ogi, Hirotsugu; Nakamura, Nobutomo; Hirao, Masahiko

doi:https://doi.org/10.1080/10589759.2011.569027

Picosecond ultrasound spectroscopy for studying elastic modulus of thin films: A review

Ogi, Hirotsugu; Nakamura, Nobutomo; Hirao, Masahiko

Nondestructive Testing and Evaluation, 2011, 26(3-4), 267-280

Number of Access:993（2025-11-25 04:22 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/84473

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Title	Picosecond ultrasound spectroscopy for studying elastic modulus of thin films: A review
Creator	NRID 1000090252626 1000090252626 researchmap permalink read0042771 read0042771 Scopus Author ID 35563683500 35563683500 ORCID 0000-0002-9602-5194 0000-0002-9602-5194 CreatorName Ogi, Hirotsugu
	NRID 1000050452404 1000050452404 researchmap permalink nnakamura nnakamura Scopus Author ID 7403356186 7403356186 ORCID 0000-0002-5338-842X 0000-0002-5338-842X CreatorName Nakamura, Nobutomo
	NRID 1000080112027 1000080112027 CreatorName Hirao, Masahiko
Subject	elastic constants
	ellipsometry
	picoseconds ultrasound
	thin films
	X-ray reflectivity
Description	This is an Accepted Manuscript of an article published by Taylor & Francis in Nondestructive Testing and Evaluation on 2011, available at http://wwww.tandfonline.com/10.1080/10589759.2011.569027.
Abstract	This article introduces an advanced acoustic method for measuring the out-of-plane longitudinal-wave modulus of thin films using picosecond ultrasound. The ultrafast light pulse is focused on the film surface to excite the coherent acoustic pulse, which propagates in the thickness direction, and then, the time delayed probing light pulse irradiates the specimen for detecting the acoustic waves. For opaque thin films, the pulse echoes within the film or the thickness resonance frequency of the film is measured to determine the modulus. For transparent films, Brillouin oscillations from the film are observed, and their frequencies yield the modulus. The film thickness and refractive index are measured by X-ray reflectivity and ellipsometry, respectively. This method was applied to various thin films, providing important knowledge about the elasticity of thin films. Most thin films are softer than corresponding bulk materials, but some thin films are significantly stiffer. © 2011 Taylor & Francis.
Publisher	Taylor & Francis
Source Title	Nondestructive Testing and Evaluation
Volume (Issue)	26(3-4)
Page	267-280
Date of Issued	2011-09-13
Language	English
Handle URL	https://hdl.handle.net/11094/84473
PISSN	10589759
eISSN	14772671
NCID	AA10744611
Relation.isVersionOf	DOI (Publisher Version) https://doi.org/10.1080/10589759.2011.569027
Access Rights	open access
oaire:version	Accepted Manuscript
Category	学術雑誌論文 Journal Article

Resource Type	journal article
Local Type	Journal Article
DCMI Type	Text
DCTERMS.bibliographicCitation	Nondestructive Testing and Evaluation. 2011, 26(3-4), p. 267-280
DC.title	Picosecond ultrasound spectroscopy for studying elastic modulus of thin films: A review
DC.creator	Ogi, Hirotsugu
	Nakamura, Nobutomo
	Hirao, Masahiko
DC.publisher	Taylor & Francis
DC.language' scheme='DCTERMS.RFC1766	English
DC.type' scheme='DCTERMS.DCMIType	Text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2011-09-13
DC.identifier	https://doi.org/10.1080/10589759.2011.569027
DC.subject	elastic constants
	ellipsometry
	picoseconds ultrasound
	thin films
	X-ray reflectivity
DC.description	This is an Accepted Manuscript of an article published by Taylor & Francis in Nondestructive Testing and Evaluation on 2011, available at http://wwww.tandfonline.com/10.1080/10589759.2011.569027.
DCTERMS.abstract	This article introduces an advanced acoustic method for measuring the out-of-plane longitudinal-wave modulus of thin films using picosecond ultrasound. The ultrafast light pulse is focused on the film surface to excite the coherent acoustic pulse, which propagates in the thickness direction, and then, the time delayed probing light pulse irradiates the specimen for detecting the acoustic waves. For opaque thin films, the pulse echoes within the film or the thickness resonance frequency of the film is measured to determine the modulus. For transparent films, Brillouin oscillations from the film are observed, and their frequencies yield the modulus. The film thickness and refractive index are measured by X-ray reflectivity and ellipsometry, respectively. This method was applied to various thin films, providing important knowledge about the elasticity of thin films. Most thin films are softer than corresponding bulk materials, but some thin films are significantly stiffer. © 2011 Taylor & Francis.
DC.format	84473
citation_title	Picosecond ultrasound spectroscopy for studying elastic modulus of thin films: A review
citation_author	Ogi, Hirotsugu
	Nakamura, Nobutomo
	Hirao, Masahiko
citation_publisher	Taylor & Francis
citation_language	English
citation_date	2011-09-13
citation_journal_title	Nondestructive Testing and Evaluation
citation_volume	26
citation_issue	3-4
citation_firstpage	267
citation_lastpage	280
citation_doi	https://doi.org/10.1080/10589759.2011.569027
citation_public_url	https://hdl.handle.net/11094/84473

Picosecond ultrasound spectroscopy for studying elastic modulus of thin films: A review

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