Surface Modification of Fluoropolymer Using Open-Air Plasma Treatment at Atmospheric Pressure with Ar, Ar＋O2, and Ar＋H2 for Application in HighAdhesion Metal Wiring Patterns

Kodama, Yoshinori; Ohkubo, Yuji; Oshita, Takaya; Nakano, Yoshinori; Uehara, Tsuyoshi; Aoyama, Teppei; Endo, Katsuyoshi; Yamamura, Kazuya

doi:https://doi.org/10.4139/sfj.69.155

Surface Modification of Fluoropolymer Using Open-Air Plasma Treatment at Atmospheric Pressure with Ar, Ar＋O2, and Ar＋H2 for Application in HighAdhesion Metal Wiring Patterns

Kodama, Yoshinori; Ohkubo, Yuji; Oshita, Takaya et al.

Journal of The Surface Finishing Society of Japan, 2018, 69(4), 155-162

Number of Access:892（2025-08-21 00:35 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/84526

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Title	Surface Modification of Fluoropolymer Using Open-Air Plasma Treatment at Atmospheric Pressure with Ar, Ar＋O2, and Ar＋H2 for Application in HighAdhesion Metal Wiring Patterns
Creator	CreatorName Kodama, Yoshinori
	NRID 1000010525786 1000010525786 ORCID 0000-0001-7366-5108 0000-0001-7366-5108 researchmap permalink okb okb Scopus Author ID 37461879400 37461879400 CreatorName Ohkubo, Yuji
	CreatorName Oshita, Takaya
	CreatorName Nakano, Yoshinori
	CreatorName Uehara, Tsuyoshi
	CreatorName Aoyama, Teppei
	NRID 1000090152008 1000090152008 researchmap permalink endo5352 endo5352 Scopus Author ID 7402712908 7402712908 CreatorName Endo, Katsuyoshi
	NRID 1000060240074 1000060240074 researchmap permalink read0014013 read0014013 Scopus Author ID 7201754767 7201754767 CreatorName Yamamura, Kazuya
Subject	Adhesion
	Ag Ink
	Atmospheric Plasma Treatment
	Polytetrafluoroethylene (PTFE)
	Printed Circuit Board for High-Frequency
Abstract	We performed open-air plasma treatment of polytetrafluoroethylene (PTFE) at atmospheric pressure to increase the adhesion strength between PTFE and an Ag metal film formed from Ag ink. Coloration of the PTFE surface occurred during 600 s treatment with Ar plasma. The Ag/PTFE adhesion strength was 0.06 N/mm. To resolve the problem of coloration and to improve the adhesion strength, O2 or H2 gas was added. During treatment with Ar+O2 plasma with O2 content of 0.33% for 600 s, no coloration occurred but the adhesion strength decreased to zero. During treatment with Ar+H2 plasma for 600 s, coloration did not occur. Moreover, the adhesion strength increased to 0.25-0.55 N/mm. These results showed that H2 addition was effective for preventing coloration and improving adhesion strength during long-period plasma treatment. Furthermore, the uniformity of surface treatment with Ar+H2 plasma was higher than that for Ar plasma.
Publisher	The Surface Finishing Society of Japan
Publisher	表面技術協会
Source Title	Journal of The Surface Finishing Society of Japan
Volume (Issue)	69(4)
Page	155-162
Date of Issued	2018-04-01
Language	English
Handle URL	https://hdl.handle.net/11094/84526
PISSN	09151869
eISSN	18843409
NCID	AN1005202X
NCID	AA12022458
Relation.isIdenticalTo	DOI (Publisher Version) https://doi.org/10.4139/sfj.69.155
Access Rights	open access
oaire:version	Version of Record
Category	学術雑誌論文 Journal Article

Resource Type	journal article
Local Type	Journal Article
DCMI Type	Text
DCTERMS.bibliographicCitation	Journal of The Surface Finishing Society of Japan. 2018, 69(4), p. 155-162
DC.title	Surface Modification of Fluoropolymer Using Open-Air Plasma Treatment at Atmospheric Pressure with Ar, Ar＋O2, and Ar＋H2 for Application in HighAdhesion Metal Wiring Patterns
DC.creator	Kodama, Yoshinori
	Ohkubo, Yuji
	Oshita, Takaya
	Nakano, Yoshinori
	Uehara, Tsuyoshi
	Aoyama, Teppei
	Endo, Katsuyoshi
	Yamamura, Kazuya
DC.publisher	The Surface Finishing Society of Japan
DC.publisher	表面技術協会
DC.language' scheme='DCTERMS.RFC1766	English
DC.type' scheme='DCTERMS.DCMIType	Text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2018-04-01
DC.identifier	https://doi.org/10.4139/sfj.69.155
DC.subject	Adhesion
	Ag Ink
	Atmospheric Plasma Treatment
	Polytetrafluoroethylene (PTFE)
	Printed Circuit Board for High-Frequency
DCTERMS.abstract	We performed open-air plasma treatment of polytetrafluoroethylene (PTFE) at atmospheric pressure to increase the adhesion strength between PTFE and an Ag metal film formed from Ag ink. Coloration of the PTFE surface occurred during 600 s treatment with Ar plasma. The Ag/PTFE adhesion strength was 0.06 N/mm. To resolve the problem of coloration and to improve the adhesion strength, O2 or H2 gas was added. During treatment with Ar+O2 plasma with O2 content of 0.33% for 600 s, no coloration occurred but the adhesion strength decreased to zero. During treatment with Ar+H2 plasma for 600 s, coloration did not occur. Moreover, the adhesion strength increased to 0.25-0.55 N/mm. These results showed that H2 addition was effective for preventing coloration and improving adhesion strength during long-period plasma treatment. Furthermore, the uniformity of surface treatment with Ar+H2 plasma was higher than that for Ar plasma.
DC.format	84526
citation_title	Surface Modification of Fluoropolymer Using Open-Air Plasma Treatment at Atmospheric Pressure with Ar, Ar＋O2, and Ar＋H2 for Application in HighAdhesion Metal Wiring Patterns
citation_author	Kodama, Yoshinori
	Ohkubo, Yuji
	Oshita, Takaya
	Nakano, Yoshinori
	Uehara, Tsuyoshi
	Aoyama, Teppei
	Endo, Katsuyoshi
	Yamamura, Kazuya
citation_publisher	The Surface Finishing Society of Japan
citation_language	English
citation_date	2018-04-01
citation_journal_title	Journal of The Surface Finishing Society of Japan
citation_volume	69
citation_issue	4
citation_firstpage	155
citation_lastpage	162
citation_doi	https://doi.org/10.4139/sfj.69.155
citation_public_url	https://hdl.handle.net/11094/84526

Surface Modification of Fluoropolymer Using Open-Air Plasma Treatment at Atmospheric Pressure with Ar, Ar＋O2, and Ar＋H2 for Application in HighAdhesion Metal Wiring Patterns

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