Elastic constant of dielectric nano-thin films using three-layer resonance studied by picosecond ultrasonics

Fukuda, Hiroki; Nagakubo, Akira; Ogi, Hirotsugu

Japanese Journal of Applied Physics, 2021, 60(SD), SDDA05-1-SDDA05-5

Number of Access:569（2025-10-09 11:45 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/84529

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Title
Elastic constant of dielectric nano-thin films using three-layer resonance studied by picosecond ultrasonics
Creator
CreatorName
Fukuda, Hiroki
NRID
1000070751113 1000070751113
ORCID
0000-0001-7494-5099 0000-0001-7494-5099
researchmap permalink
nagakubo nagakubo
Scopus Author ID
55329400300 55329400300
CreatorName
Nagakubo, Akira
NRID
1000090252626 1000090252626
researchmap permalink
read0042771 read0042771
Scopus Author ID
35563683500 35563683500
CreatorName
Ogi, Hirotsugu
Description
This is the Accepted Manuscript version of an article accepted for publication in Japanese Journal of Applied Physics. IOP Publishing Ltd are not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at https://doi.org/10.35848/1347-4065/abec5a.
Abstract
Elastic constants and sound velocities of nm order thin films are essential for designing acoustic filters. However, it is difficult to measure them for dielectric thin films. In this study, we use a three-layer structure where a dielectric nano-thin film is sandwiched between thicker metallic films to measure the longitudinal elastic constant of the dielectric film. We propose an efficiency function to estimate the optimal thicknesses of the components. We use Pt/NiO/Pt three-layer films for confirming our proposed method. The determined elastic constant of NiO deposited at room temperature is smaller than the bulk value by ∼40%. However, it approaches the bulk value as the deposition temperature increases. We also reveal that the uncertainty of the elastic constant of the Pt film insignificantly affects the accuracy of the determined elastic constant of NiO in this structure.
Publisher
The Japan Society of Applied Physics
Source Title
Japanese Journal of Applied Physics
Volume (Issue)
60(SD)
Page
SDDA05-1-SDDA05-5
Date of Issued
2021-03-24
Language
English
Handle URL
https://hdl.handle.net/11094/84529
PISSN
00214922
eISSN
13474065
NCID
AA12295836
Relation.isVersionOf
DOI (Publisher Version)
https://doi.org/10.35848/1347-4065/abec5a
Access Rights
open access
CopyRight
© 2021 The Japan Society of Applied Physics. This Accepted Manuscript is available for reuse under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License after the 12 month embargo period provided that all the terms of the license are adhered to.
oaire:version
Accepted Manuscript
Category
学術雑誌論文 Journal Article