Acoustic properties of co-doped AlN thin films at low temperatures studied by picosecond ultrasonics

Nagakubo, Akira; Arita, Mari; Yokoyama, Tsuyoshi; Matsuda, Satoru; Ueda, Masanori; Ogi, Hirotsugu; Hirao, Masahiko

doi:https://doi.org/10.7567/JJAP.54.07HD01

Acoustic properties of co-doped AlN thin films at low temperatures studied by picosecond ultrasonics

Nagakubo, Akira; Arita, Mari; Yokoyama, Tsuyoshi et al.

Japanese Journal of Applied Physics, 2015, 54(7), 07HD01-1-07HD01-4

Number of Access:628（2025-11-25 02:19 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/84531

Link to primary information

File	Format	Terms of use	Size	Views	Date.Available	Description	information
JpnJApplPhys_54_7_07HD01	pdf	None	473 KB	243	2021.09.24

Item Information

Output File Export EndNote Basic Export Mendeley

Title	Acoustic properties of co-doped AlN thin films at low temperatures studied by picosecond ultrasonics
Creator	NRID 1000070751113 1000070751113 ORCID 0000-0001-7494-5099 0000-0001-7494-5099 researchmap permalink nagakubo nagakubo Scopus Author ID 55329400300 55329400300 CreatorName Nagakubo, Akira
	CreatorName Arita, Mari
	CreatorName Yokoyama, Tsuyoshi
	CreatorName Matsuda, Satoru
	CreatorName Ueda, Masanori
	NRID 1000090252626 1000090252626 researchmap permalink read0042771 read0042771 Scopus Author ID 35563683500 35563683500 ORCID 0000-0002-9602-5194 0000-0002-9602-5194 CreatorName Ogi, Hirotsugu
	NRID 1000080112027 1000080112027 CreatorName Hirao, Masahiko
Description	Nagakubo A., Arita M., Yokoyama T., et al. "Acoustic properties of co-doped AlN thin films at low temperatures studied by picosecond ultrasonics", Japanese Journal of Applied Physics, 54(7), 07HD01 (2015) https://doi.org/10.7567/JJAP.54.07HD01.
Abstract	(Mg<inf>0</inf>.5Zr<inf>0.5</inf>)<inf>x</inf>Al<inf>1-x</inf>N and (Mg<inf>0.5</inf>Hf<inf>0.5</inf>)<inf>x</inf>Al<inf>1-x</inf>N thin films are AlN-base piezoelectric materials, and their piezoelectric coefficients are higher than those of pure AlN, being promising materials for acoustic devices. However, their acoustic properties remain unknown because of measurement difficulty for deposited thin films. In this study, we measure their longitudinal-wave elastic constants C<inf>33</inf> and their temperature coefficients using picosecond ultrasound spectroscopy for 0 < x < 0.13; we obtain C<inf>33</inf> = 398.2 ± 0.7GPa for pure AlN, and it largely decreases by doping Mg, Zr, and Hf, leading to a minimum values of 316.8 ± 1.6 GPa for (Mg<inf>0.5</inf>Zr<inf>0.5</inf>)<inf>0.126</inf>Al<inf>0.874</inf>N.
Publisher	The Japan Society of Applied Physics
Source Title	Japanese Journal of Applied Physics
Volume (Issue)	54(7)
Page	07HD01-1-07HD01-4
Date of Issued	2015-05-13
Language	English
Handle URL	https://hdl.handle.net/11094/84531
PISSN	00214922
eISSN	13474065
NCID	AA12295836
Relation.isVersionOf	DOI (Publisher Version) https://doi.org/10.7567/JJAP.54.07HD01
Access Rights	open access
CopyRight	© 2015 The Japan Society of Applied Physics.
oaire:version	Accepted Manuscript
Category	学術雑誌論文 Journal Article

Resource Type	journal article
Local Type	Journal Article
DCMI Type	Text
DCTERMS.bibliographicCitation	Japanese Journal of Applied Physics. 2015, 54(7), p. 07HD01-1-07HD01-4
DC.title	Acoustic properties of co-doped AlN thin films at low temperatures studied by picosecond ultrasonics
DC.creator	Nagakubo, Akira
	Arita, Mari
	Yokoyama, Tsuyoshi
	Matsuda, Satoru
	Ueda, Masanori
	Ogi, Hirotsugu
	Hirao, Masahiko
DC.publisher	The Japan Society of Applied Physics
DC.language' scheme='DCTERMS.RFC1766	English
DC.type' scheme='DCTERMS.DCMIType	Text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2015-05-13
DC.identifier	https://doi.org/10.7567/JJAP.54.07HD01
DC.description	Nagakubo A., Arita M., Yokoyama T., et al. "Acoustic properties of co-doped AlN thin films at low temperatures studied by picosecond ultrasonics", Japanese Journal of Applied Physics, 54(7), 07HD01 (2015) https://doi.org/10.7567/JJAP.54.07HD01.
DCTERMS.abstract	(Mg<inf>0</inf>.5Zr<inf>0.5</inf>)<inf>x</inf>Al<inf>1-x</inf>N and (Mg<inf>0.5</inf>Hf<inf>0.5</inf>)<inf>x</inf>Al<inf>1-x</inf>N thin films are AlN-base piezoelectric materials, and their piezoelectric coefficients are higher than those of pure AlN, being promising materials for acoustic devices. However, their acoustic properties remain unknown because of measurement difficulty for deposited thin films. In this study, we measure their longitudinal-wave elastic constants C<inf>33</inf> and their temperature coefficients using picosecond ultrasound spectroscopy for 0 < x < 0.13; we obtain C<inf>33</inf> = 398.2 ± 0.7GPa for pure AlN, and it largely decreases by doping Mg, Zr, and Hf, leading to a minimum values of 316.8 ± 1.6 GPa for (Mg<inf>0.5</inf>Zr<inf>0.5</inf>)<inf>0.126</inf>Al<inf>0.874</inf>N.
DC.rights	© 2015 The Japan Society of Applied Physics.
DC.format	84531
citation_title	Acoustic properties of co-doped AlN thin films at low temperatures studied by picosecond ultrasonics
citation_author	Nagakubo, Akira
	Arita, Mari
	Yokoyama, Tsuyoshi
	Matsuda, Satoru
	Ueda, Masanori
	Ogi, Hirotsugu
	Hirao, Masahiko
citation_publisher	The Japan Society of Applied Physics
citation_language	English
citation_date	2015-05-13
citation_journal_title	Japanese Journal of Applied Physics
citation_volume	54
citation_issue	7
citation_firstpage	07HD01-1
citation_lastpage	07HD01-4
citation_doi	https://doi.org/10.7567/JJAP.54.07HD01
citation_public_url	https://hdl.handle.net/11094/84531

Acoustic properties of co-doped AlN thin films at low temperatures studied by picosecond ultrasonics

Link to primary information

Item Information

Show details