Enhancement of sensitivity of Pd-based hydrogen-gas sensor by plasma exposure studied by wireless quartz resonator

Zhou, Lianjie; Nakamura, Nobutomo; Nagakubo, Akira et al.

Japanese Journal of Applied Physics, 2020, 59, SKKB02

Number of Access:597（2025-11-25 02:20 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/85130

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Title
Enhancement of sensitivity of Pd-based hydrogen-gas sensor by plasma exposure studied by wireless quartz resonator
Creator
CreatorName
Zhou, Lianjie
NRID
1000050452404 1000050452404
researchmap permalink
nnakamura nnakamura
Scopus Author ID
7403356186 7403356186
ORCID
0000-0002-5338-842X 0000-0002-5338-842X
CreatorName
Nakamura, Nobutomo
NRID
1000070751113 1000070751113
ORCID
0000-0001-7494-5099 0000-0001-7494-5099
researchmap permalink
nagakubo nagakubo
Scopus Author ID
55329400300 55329400300
CreatorName
Nagakubo, Akira
NRID
1000090252626 1000090252626
researchmap permalink
read0042771 read0042771
Scopus Author ID
35563683500 35563683500
ORCID
0000-0002-9602-5194 0000-0002-9602-5194
CreatorName
Ogi, Hirotsugu
Description
This is the Accepted Manuscript version of an article accepted for publication in Japanese Journal of Applied Physics. IOP Publishing Ltd are not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at https://doi.org/10.35848/1347-4065/ab78e2.
Abstract
Sensitivity of a hydrogen-gas sensor based on lattice expansion of palladium highly depends on the surface morphology of palladium. We find that the sensitivity can be significantly improved by exposing the as-deposited palladium film to low-power plasma. The hydrogen-gas detection was performed by a wireless-electrodeless AT-cut quartz-crystal resonator with 125 MHz fundamental resonance frequency. It detects hydrogen gas through bending deformation of the resonator caused by the volume expansion of palladium. The surface morphology of palladium film before and after the plasma treatment were analyzed using atomic force microscopy. The plasma treated palladium film exhibits a rougher surface, finer grains, voids, and grain boundary extension. Such morphology and structure changes along with defects induced by the ion bombardment during the plasma treatment strongly contribute to increase in hydrogen absorption rate and then the sensor sensitivity. We further investigate the thickness dependence of the sensitivity, revealing an optimum palladium film thickness of 300 nm.
Publisher
The Japan Society of Applied Physics
Source Title
Japanese Journal of Applied Physics
Volume (Issue)
59
Page
SKKB02
Date of Issued
2020-07
Language
English
Handle URL
https://hdl.handle.net/11094/85130
PISSN
00214922
eISSN
13474065
NCID
AA12295836
Relation.isVersionOf
DOI (Publisher Version)
https://doi.org/10.35848/1347-4065/ab78e2
Access Rights
open access
CopyRight
© 2020 The Japan Society of Applied Physics. This Accepted Manuscript is available for reuse under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License after the 12 month embargo period provided that all the terms of the license are adhered to.
oaire:version
Accepted Manuscript
Category
学術雑誌論文 Journal Article